Slide Screw Tuners with Offset Tuning Probes and Method

1. A method for mounting low profile and short slabline load pull tuners on wafer probe stations for highest tuning range at a DUT reference plane, wherein the tuners are mounted at an angle matching the angle of the wafer probe, whereby a coaxial connector of a tuner test port matches to and is directly attached to a coaxial connector of the wafer-probe.

2. A 3 axis tuner positioner for on-wafer load pull tuner setup as in claim 1 , comprising an X-axis, a Y-axis and a Z-axis, wherein a pyramidal wedge interface body is attached on the Z-axis and holds the tuner at the angle matching the angle of the wafer probe.

3. A tuner positioner as in claim 2 , wherein the pyramidal wedge interface is exchangeable and can be replaced by an interface allowing the connector of the tuner test port to match the connector of the wafer probe.