Legal claims defining the scope of protection. Each claim is shown in both the original legal language and a plain English translation.
1. A method for mounting low profile and short slabline load pull tuners on wafer probe stations for highest tuning range at a DUT reference plane, wherein the tuners are mounted at an angle matching the angle of the wafer probe, whereby a coaxial connector of a tuner test port matches to and is directly attached to a coaxial connector of the wafer-probe.
This invention relates to a method for mounting low-profile and short slabline load pull tuners on wafer probe stations to achieve maximum tuning range at the device under test (DUT) reference plane. The method involves positioning the tuners at an angle that aligns with the angle of the wafer probe, ensuring that a coaxial connector of the tuner's test port directly matches and attaches to a coaxial connector of the wafer probe. This alignment minimizes signal loss and improves tuning performance by reducing parasitic effects at the DUT interface. The tuners are designed with a compact, low-profile structure to fit within the constrained space of a wafer probe station while maintaining high-frequency signal integrity. The direct coaxial connection between the tuner and wafer probe eliminates the need for additional adapters or cables, which can introduce impedance mismatches and signal degradation. The angled mounting ensures optimal mechanical stability and precise alignment, enhancing the accuracy of load pull measurements. This approach is particularly useful in high-frequency testing, where minimizing signal path length and maintaining impedance matching are critical for accurate characterization of semiconductor devices. The method improves measurement fidelity by reducing reflections and losses, enabling more precise tuning and characterization of high-frequency circuits.
2. A 3 axis tuner positioner for on-wafer load pull tuner setup as in claim 1 , comprising an X-axis, a Y-axis and a Z-axis, wherein a pyramidal wedge interface body is attached on the Z-axis and holds the tuner at the angle matching the angle of the wafer probe.
This invention relates to a 3-axis tuner positioner used in on-wafer load pull tuner setups, addressing the challenge of precisely aligning a tuner with a wafer probe during testing. The positioner includes three orthogonal axes—X, Y, and Z—for fine adjustment of the tuner's position. A pyramidal wedge interface body is mounted on the Z-axis, allowing the tuner to be held at an angle that matches the wafer probe's angle. This ensures accurate alignment and optimal signal coupling between the tuner and the device under test on the wafer. The X and Y axes enable horizontal and lateral positioning, while the Z-axis, combined with the wedge interface, provides vertical and angular adjustments. The design ensures stable, repeatable alignment, improving measurement accuracy in load pull testing. The positioner is particularly useful in semiconductor testing, where precise tuner positioning is critical for reliable characterization of high-frequency devices. The pyramidal wedge interface simplifies alignment by mechanically matching the probe's angle, reducing setup time and human error. The system integrates with existing load pull setups, enhancing their performance without requiring major modifications.
3. A tuner positioner as in claim 2 , wherein the pyramidal wedge interface is exchangeable and can be replaced by an interface allowing the connector of the tuner test port to match the connector of the wafer probe.
A tuner positioner is a device used in radio frequency (RF) testing to precisely position a tuner relative to a device under test (DUT), such as a wafer probe or other RF components. The primary challenge in RF testing is ensuring accurate alignment and stable mechanical coupling between the tuner and the DUT to maintain signal integrity during measurements. Traditional tuner positioners often lack flexibility in accommodating different connector types, leading to compatibility issues and the need for additional adapters. This invention improves upon existing tuner positioners by incorporating an exchangeable pyramidal wedge interface. The pyramidal wedge interface provides a stable mechanical connection between the tuner and the DUT, ensuring precise alignment and minimizing signal loss. The key innovation is that this interface can be replaced with an alternative interface, allowing the tuner's test port connector to match the connector of the wafer probe or other DUTs. This eliminates the need for external adapters and simplifies the testing setup. The exchangeable design enhances versatility, enabling the tuner positioner to work with various connector types without requiring modifications to the tuner itself. This improves efficiency in RF testing environments where multiple connector standards may be encountered.
Unknown
April 28, 2020
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