Legal claims defining the scope of protection, as filed with the USPTO.
6. The computer implemented method according to claim 1, further comprising generating, by the one or more computer processors, metal interconnect features according to detected metal interconnect features using a second machine learning model; and integrating, by the one or more computer processors, the generated metal interconnect feature with the NIR image.
12. The computer program product according to claim 7, the stored program instructions further comprising program instructions to generate a metal interconnect feature according to detected metal interconnect features using a second machine learning model; and program instructions to integrate the generated metal interconnect feature with the NIR image.
17. The system according to claim 13, further comprising program instructions to generate metal interconnect features according to detected metal interconnect features using a second machine learning model; and program instructions to integrate the generated metal interconnect feature with the NIR image.
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August 1, 2023
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