Patentable/Patents/11823922
11823922

Substrate Inspection Apparatus, Substrate Processing Apparatus, Substrate Inspection Method, and Computer-Readable Recording Medium

PublishedNovember 21, 2023
Assigneenot available in USPTO data we have
InventorsAkiko KIYOTOMIMasato HOSAKATadashi NISHIYAMAKazuya HISANO
Technical Abstract

Patent Claims
1 claims

Legal claims defining the scope of protection, as filed with the USPTO.

10

10. A non-transitory computer-readable recording medium having recorded therein a program for causing a substrate inspection apparatus to execute the substrate inspection method according to claim 9.

Patent Metadata

Filing Date

Unknown

Publication Date

November 21, 2023

Inventors

Akiko KIYOTOMI
Masato HOSAKA
Tadashi NISHIYAMA
Kazuya HISANO

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Cite as: Patentable. “SUBSTRATE INSPECTION APPARATUS, SUBSTRATE PROCESSING APPARATUS, SUBSTRATE INSPECTION METHOD, AND COMPUTER-READABLE RECORDING MEDIUM” (11823922). https://patentable.app/patents/11823922

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