Legal claims defining the scope of protection, as filed with the USPTO.
1. A wiring layout method for a semiconductor integrated circuit device having a plurality of circuit elements and a plurality of wires connecting the circuit elements, comprising: generating data for an orthogonal wire having a first minimum wire width, which is formed in a first wiring layer and extends horizontally or vertically; generating data for a diagonal wire having a second minimum wire width which is substantially equal to said first minimum wire width, formed in a second wiring layer which differs from said first wiring layer and extending in a diagonal direction in relation to said orthogonal wire; and generating data for a via figure at point at which said orthogonal wire and said diagonal wire overlap, said via figure being constituted by a via having a size which is no greater than said first or second minimum wire width, a first via cushion conductive layer which is larger than said via and formed in said first wiring layer, and a second via cushion conductive layer which is larger than said via and formed in said second wiring layer, wherein said first or second via cushion conductive layer is larger than the minimum wire width of said orthogonal wire or said diagonal wire.
2. The layout method for a semiconductor device according to claim 1 , wherein said via has a first rectangular form in which a length of one edge is shorter than said first minimum wire width, and said first and second via cushion conductive layers have a second rectangular form which is larger than said first rectangular form, the second rectangular form is provided in the same direction as one of said diagonal wire and said orthogonal wire, and the other of said diagonal wire and said orthogonal wire includes an enlarged wire width region having a wire width which is enlarged beyond said first or second minimum wire width by said first or second via cushion conductive layer.
3. The layout method for a semiconductor device according to claim 1 , wherein said via has a first rectangular form in which a length of one edge is shorter than said first minimum wire width, and said first and second via cushion conductive layers has a second rectangular form which is larger than said first rectangular form, the second rectangular form is provided in the same direction as said orthogonal wire, and said diagonal wire includes an enlarged wire width region having a wire width which is enlarged beyond said second minimum wire width by said second via cushion conductive layer.
4. A semiconductor device wiring layout program for causing a computer to execute a wiring layout procedure for a semiconductor integrated circuit having a plurality of circuit elements and a plurality of wires connecting the circuit elements, said wiring layout procedure comprising: generating data for an orthogonal wire having a first minimum wire width, which is formed in a first wiring layer and extends horizontally or vertically; generating data for a diagonal wire having a second minimum wire width which is substantially equal to said first minimum wire width, formed in a second wiring layer which differs from said first wiring layer and extending in a diagonal direction in relation to said orthogonal wire; and generating data for a via figure at point at which said orthogonal wire and said diagonal wire overlap, said via figure being constituted by a via having a size which is no greater than said first or second minimum wire width, a first via cushion conductive layer which is larger than said via and formed in said first wiring layer, and a second via cushion conductive layer which is larger than said via and formed in said second wiring layer, wherein said first or second via cushion conductive layer is larger than the minimum wire width of said orthogonal wire or said diagonal wire.
Unknown
June 5, 2007
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