Inspection Method

1. An inspection method comprising: setting a plurality of measurement areas on a board; acquiring reference data and measurement data of at least one adjacent measurement area that is adjacent to a target measurement area for inspecting a measurement target, among the measurement areas; extracting at least one feature object from the adjacent measurement area; acquiring a distortion degree by comparing reference data and measurement data corresponding to the feature object with each other; and compensating for the distortion degree to set an inspection area in the target measurement area.

2. The inspection method of claim 1 , prior to extracting at least one feature object from the adjacent measurement area, further comprising: establishing the feature object for each measurement area; checking whether the number of the established feature object is smaller than a reference number or not, for each measurement area; and selecting the adjacent measurement area for extracting the feature object for the measurement area in which the number of the established feature object is smaller than the reference number.

3. The inspection method of claim 1 , wherein the feature object is extracted from a specific adjacent measurement area in which the measurement data is acquired before the measurement data of the target measurement area is acquired.

4. The inspection method of claim 1 , wherein the extracted feature object is plural, and wherein a greater score is given to the feature object as a shape difference between the reference data and the measurement data corresponding to the feature object is smaller, and the distortion degree is acquired by comparing the reference data and the measurement data corresponding to the feature object selected based on the score with each other.

5. The inspection method of claim 1 , wherein the extracted feature object is plural, and wherein a greater weighted value is given to the feature object as a distance between the feature object and the target measurement area is nearer, a greater score is given to the feature object as a shape difference between the reference data and the measurement data corresponding to the feature object is smaller, and the distortion degree is acquired by comparing the reference data and the measurement data corresponding to the feature object selected based on at least one of the weighted value and the score with each other.

6. The inspection method of claim 1 , wherein the adjacent measurement area is plural, and the extracted feature object is plural, and wherein the feature objects are evenly extracted for the plurality of adjacent measurement areas.

7. The inspection method of claim 1 , wherein extracting at least one feature object in the adjacent measurement area comprises: establishing a reference type and a reference number of the feature object; and extracting the feature object corresponding to the reference type from the adjacent measurement area, in case that the number of the feature object extracted from the target measurement area is smaller than the reference number.

8. The inspection method of claim 7 , wherein the adjacent measurement area is plural, and prior to extracting the feature object corresponding to the reference type from the adjacent measurement area, extracting at least one feature object from the adjacent measurement area further comprises selecting the adjacent measurement area for extracting the feature object among the plurality of adjacent measurement areas.

9. The inspection method of claim 1 , wherein the extracted feature object is plural, and wherein a greater weighted value is given to the feature object as a distance between the feature object and the target measurement area is nearer, and the distortion degree is acquired by comparing the reference data and the measurement data corresponding to the feature object selected based on the weighted value with each other.

10. The inspection method of claim 9 , wherein the distance is measured from at least one of a boundary line of the target measurement area, a central point of the target measurement area and a central point of the measurement target.

11. The inspection method of claim 1 , wherein extracting at least one feature object from the adjacent measurement area comprises: establishing a reference type and a reference number of the feature object; enlarging the target measurement area by a predetermined area; extracting the feature object corresponding to the reference type in the enlarged area; and repeating the step of enlarging the target measurement area by a predetermined area, and the step of extracting the feature object corresponding to the reference type in the enlarged area, in case that the number of the extracted feature object is smaller than the reference number.

12. The inspection method of claim 11 , wherein enlarging the target measurement area by a predetermined area is performed by extracting the feature object corresponding to the reference type in an intersection area between the enlarged area and at least one selected adjacent measurement area.

13. The inspection method of claim 11 , prior to enlarging the target measurement area by a predetermined area, further comprising extracting the feature object corresponding to the reference type in the target measurement area, and enlarging the target measurement area by a predetermined area is performed, in case that the number of the feature object extracted from the target measurement area is smaller than the reference number.

14. An inspection method comprising: setting a plurality of measurement areas on a board; acquiring reference data and measurement data of at least one adjacent measurement area that is adjacent to a target measurement area for inspecting a measurement target, among the measurement areas; extracting at least one feature block having a block unit from the adjacent measurement area; acquiring a distortion degree by comparing reference data and measurement data corresponding to the feature block with each other; and compensating for the distortion degree to set an inspection area in the target measurement area.

15. The inspection method of claim 14 , wherein the extracted feature block is plural, the distortion degree is acquired as a quantified conversion formula between the reference data and the measurement data, and the quantified conversion formula is determined by using at least one of a location change, a slope change, a size change and a transformation degree, which are acquired by comparing the reference data and the measurement data corresponding to the plurality of feature objects with each other.