Legal claims defining the scope of protection, as filed with the USPTO.
1. A method comprising: forming a first dielectric layer over a semiconductor substrate, wherein the first dielectric layer includes a first metal pad; forming a second dielectric layer over the first dielectric layer, wherein the second dielectric layer includes a second metal pad that is not aligned with the first metal pad; forming a third dielectric layer over the second dielectric layer, wherein the third dielectric layer includes a third metal pad that is aligned with the first metal pad; forming a first via extending through the first and second dielectric layers, wherein the first via physically contacts the first and second metal pads; forming a second via extending through the second and third dielectric layers, wherein the second via physically contacts the second and third metal pads; forming a passivation layer over the third dielectric layer; and bonding another semiconductor substrate to the passivation layer.
2. The method of claim 1 , wherein the first dielectric layer includes a dielectric material having a dielectric constant greater than 3.9.
3. The method of claim 1 , wherein the first dielectric layer includes a dielectric material having a dielectric constant less than 3.9.
4. The method of claim 1 , forming a third via extending through the first and second dielectric layers, wherein the third via physically contacts the first and second metal pads.
5. The method of claim 1 , further comprising forming a fourth dielectric layer over the third dielectric layer, wherein the fourth dielectric layer includes a fourth metal pad that is aligned with the second metal pad; and forming a third via extending through the third and fourth dielectric layers, wherein the third via physically contacts the third and fourth metal pads.
6. The method of claim 5 , wherein the first via is aligned with the third via.
7. The method of claim 1 , wherein the first metal pad has a top surface having a total surface area, wherein the second metal pad does not overlap more than 50% of the total surface area of the top surface of the first metal pad.
8. The method of claim 1 , wherein the second dielectric layer is formed of a different material than the first dielectric layer.
9. A device comprising: a first metal pad disposed over a semiconductor substrate; a second metal pad disposed over the first metal pad and offset from the first metal pad in a first direction along a first axis; a third metal pad disposed over the second metal pad and offset from the second metal pad in a third direction along a second axis, the second axis being different from the first axis; a fourth metal pad disposed over the third metal pad and offset from the third metal pad in a second direction along the first axis, the second direction being opposite the first direction; a first via extending from the first metal pad to the second metal pad; a second via extending from the second metal pad to the third metal pad; and a third via extending from the third metal pad to the fourth metal pad.
10. The device of claim 9 , wherein the fourth metal pad overlaps the third, second, and first metal pads.
11. The device of claim 9 , wherein the third metal pad overlaps the second and first metal pads.
12. The device of claim 9 , wherein the first via and the third via are aligned along the second axis.
13. The device of claim 9 , wherein the first metal pad has a top surface having a total surface area, wherein the second metal pad does not overlap more than 50% of the total surface area of the top surface of the first metal pad, wherein the second metal pad has a top surface having a total surface area, wherein the third metal pad does not overlap more than 50% of the total surface area of the top surface of the second metal pad, and wherein the third metal pad has a top surface having a total surface area, wherein the fourth metal pad does not overlap more than 50% of the total surface area of the top surface of the third metal pad.
14. The device of claim 9 , wherein the second axis is perpendicular to the first axis, wherein the fourth metal pad is offset from the first metal pad in the third direction along the second axis, wherein the third metal pad is offset from the first metal pad in the third direction along the second axis, and wherein the second metal pad is offset from the fourth metal pad in a fourth direction along the second axis, the fourth direction being opposite the third direction.
15. A device comprising: a first dielectric layer having a first metal pad disposed over a semiconductor substrate; a second dielectric layer having a second metal pad disposed over the first dielectric layer, a third dielectric layer having a third metal pad disposed over the second dielectric layer, wherein the third metal pad is aligned with the first metal pad and wherein the third metal pad is not aligned with the first metal pad; a first via extending through the first and second dielectric layers, wherein the first via physically contacts the first and second metal pads; a second via extending through the second and third dielectric layers, wherein the second via physically contacts the second and third metal pads; and a passivation layer disposed directly on a top surface of the third metal pad, the top surface of the third metal pad facing away from the semiconductor substrate.
16. The device of claim 15 , further comprising a fourth dielectric layer having a fourth metal pad disposed under the first dielectric layer, wherein the fourth metal pad is aligned with the second metal pad and wherein the fourth metal pad is not aligned with the third metal pad.
17. The device of claim 16 , wherein the fourth metal pad has a top surface having a total surface area, wherein the first metal pad overlaps a first amount of the total surface area of the top surface of the fourth metal pad, and wherein the second metal pad has a top surface having a total surface area, wherein the third metal pad overlaps a second amount of the total surface area of the top surface of the second metal pad, the second amount being different than the first amount.
18. The device of claim 15 , wherein the first, second, and third dielectric layers include a dielectric material having a dielectric constant greater than 3.9.
19. The device of claim 15 , further comprising a fourth dielectric layer having a fourth metal pad disposed under the third dielectric layer, wherein the fourth metal pad is not aligned with the third metal pad.
20. The device of claim 15 , wherein the first metal pad does not overlap more than 50% of the total surface area of the top surface of the fourth metal pad, and wherein the third metal pad does not overlap more than 50% of the total surface area of the top surface of the second metal pad.
Unknown
May 23, 2017
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