Patentable/Patents/US-10036714
US-10036714

Image capturing device and inspection apparatus and inspection method

PublishedJuly 31, 2018
Assigneenot available in USPTO data we have
Inventorsnot available in USPTO data we have
Technical Abstract

An image capturing device comprising, a light source configured to emit light having a predetermined wavelength, a polarization beamsplitter configured to receive the light from the light source, a Faraday rotator configured to rotate a polarization plane of the light via the polarization beamsplitter by changing the intensity of the magnetic field, an objective lens configured to illuminate an inspection target with the light transmitted through the Faraday rotator and a sensor configured to capture an optical image of the inspection target by causing the light reflected by the inspection target to be incident through the objective lens, the Faraday rotator, and the polarization beamsplitter.

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Patent Metadata

Filing Date

August 26, 2014

Publication Date

July 31, 2018

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