The invention provides a flexible display substrate and manufacturing method thereof. The manufacturing method for flexible display substrate patternizes the inorganic layer between the two organic layers on the flexible substrate so that the two organic layer contacting each other at the gaps on the inorganic separation layer, so as to avoid the potential damage on the films during the subsequent laser-lift-off process. The method is simple and the manufacturing process is efficient. The flexible display substrate of the present invention uses a structure of stacked four thin film layers to realize effective water/oxygen blocking, thus avoiding display devices' eroding. The inner two organic layers of the flexible substrate contact each other directly at the gaps of the inorganic separation layer, and the high adhesion strength between the upper and lower film layers of the flexible substrate helps avoiding film-peeling inner the stacked structure.
Legal claims defining the scope of protection, as filed with the USPTO.
1. A manufacturing method for flexible display substrate, which comprises: Step 1 : providing a carrier substrate, and forming a first organic layer on the carrier substrate; Step 2 : forming a patterned first inorganic separation layer on the first organic layer, the first inorganic separation layer comprising a plurality of inorganic separation units arranged with gaps in-between the units; Step 3 : forming a second organic layer on the first organic layer and the first inorganic separation layer, the second organic layer contacting the first organic layer at the gaps between the plurality of inorganic separation units; Step 4 : forming a second inorganic separation layer on the second organic layer to obtain a flexible substrate comprising the first organic layer, the first inorganic separation layer, the second organic layer and the second inorganic separation layer; Step 5 : forming a display component on the flexible substrate, and Step 6 : peeling the flexible substrate off the carrier substrate.
2. The manufacturing method for flexible display substrate as claimed in claim 1 , wherein Step 2 comprises: Step 21 : providing an electrostatic spinning device, the electrostatic pinning device comprising a nozzle, a working platform disposed below the nozzle, a left and right rail, and a front and rear rail; placing the carrier substrate on the working platform; Step 22 : starting the electrostatic spinning device, spraying an electrostatic spinning solution through the nozzle onto the carrier substrate positioned below, while the carrier substrate moved with the working platform along the left and right rail, and the front and rear rail, so that interweaving electrostatic spun fibers formed on the first organic layer to obtain a polymer fiber layer having a mesh structure; Step 23 : depositing an inorganic film layer on the first organic layer, and the polymer fiber layer, a portion of the inorganic film layer directly adhered to electrostatic spun fibers of the polymer fiber layer, another portion directly attached to the first organic layer to form a plurality of spaced inorganic separation units; the plurality of inorganic separation units being divided by the electrostatic spun fibers; and Step 24 : removing the polymer fiber layer, and the inorganic material film adhered to the polymer fiber layer to obtain the first inorganic separation layer having a plurality of inorganic separation units.
3. The manufacturing method for flexible display substrate as claimed in claim 2 , wherein in Step 22 , the electrostatic spun fiver has a diameter of 10 nm-1000 μm.
4. The manufacturing method for flexible display substrate as claimed in claim 2 , wherein the polymer fiber layer formed in Step 22 is of a mesh structure arranged regularly; and the plurality of inorganic separation units of the inorganic separation layer formed in Step 24 is arranged in an array.
5. The manufacturing method for flexible display substrate as claimed in claim 4 , wherein the distance between two adjacent electrostatic spun fibers in the same direction is 10 nm-1000 μm.
6. The manufacturing method for flexible display substrate as claimed in claim 2 , wherein the polymer fiber layer formed in Step 22 is of a mesh structure arranged irregularly.
7. The manufacturing method for flexible display substrate as claimed in claim 2 , wherein in Step 24 , a solution immersion method, ultrasonic method, or a combination of both methods is used to remove the polymer fiber layer and the inorganic film layer adhered to the polymer fiber layer.
8. The manufacturing method for flexible display substrate as claimed in claim 1 , wherein in Step 1 , the carrier substrate is made of glass; in Step 6 , a laser lift-off method is used to peel the flexible substrate and the display components off the carrier substrate.
9. A flexible display substrate, which comprises: a carrier substrate, a flexible substrate disposed on the carrier substrate, and a display unit disposed on the flexible substrate; the flexible substrate comprising: a first organic layer, a first inorganic separation layer, a second organic layer and a second inorganic separation layer, formed in sequence on the carrier substrate; and the first inorganic separation layer comprising a plurality of inorganic separation units arranged with gaps in-between, the second organic layer contacting the first organic layer at the gaps.
10. The flexible display substrate as claimed in claim 9 , wherein the plurality of inorganic separation units are arranged in an array or arranged irregularly.
11. A manufacturing method for flexible display substrate, which comprises: Step 1 : providing a carrier substrate, and forming a first organic layer on the carrier substrate; Step 2 : forming a patterned first inorganic separation layer on the first organic layer, the first inorganic separation layer comprising a plurality of inorganic separation units arranged with gaps in-between the units; Step 3 : forming a second organic layer on the first organic layer and the first inorganic separation layer, the second organic layer contacting the first organic layer at the gaps between the plurality of inorganic separation units; Step 4 : forming a second inorganic separation layer on the second organic layer to obtain a flexible substrate comprising the first organic layer, the first inorganic separation layer, the second organic layer and the second inorganic separation layer; Step 5 : forming a display component on the flexible substrate, and Step 6 : peeling the flexible substrate and the display components off the carrier substrate; wherein Step 2 comprises: Step 21 : providing an electrostatic spinning device, the electrostatic pinning device comprising a nozzle, a working platform disposed below the nozzle, a left and right rail, and a front and rear rail; placing the carrier substrate on the working platform; Step 22 : starting the electrostatic spinning device, spraying an electrostatic spinning solution through the nozzle onto the carrier substrate positioned below, while the carrier substrate moved with the working platform along the left and right rail, and the front and rear rail, so that interweaving electrostatic spun fibers formed on the first organic layer to obtain a polymer fiber layer having a mesh structure; Step 23 : depositing an inorganic film layer on the first organic layer, and the polymer fiber layer, a portion of the inorganic film layer directly adhered to electrostatic spun fibers of the polymer fiber layer, another portion directly attached to the first organic layer to form a plurality of spaced inorganic separation units; the plurality of inorganic separation units being divided by the electrostatic spun fibers; and Step 24 : removing the polymer fiber layer, and the inorganic material film adhered to the polymer fiber layer to obtain the first inorganic separation layer having a plurality of inorganic separation units; wherein in Step 22 , the electrostatic spun fiver has a diameter of 10 nm-1000 μm. wherein in Step 1 , the carrier substrate is made of glass; in Step 6 , a laser lift-off method is used to peel the flexible substrate off the carrier substrate.
12. The manufacturing method for flexible display substrate as claimed in claim 11 , wherein the polymer fiber layer formed in Step 22 is of a mesh structure arranged regularly; and the plurality of inorganic separation units of the inorganic separation layer formed in Step 24 is arranged in an array.
13. The manufacturing method for flexible display substrate as claimed in claim 12 , wherein the distance between two adjacent electrostatic spun fibers in the same direction is 10 nm-1000 μm.
14. The manufacturing method for flexible display substrate as claimed in claim 11 , wherein the polymer fiber layer formed in Step 22 is of a mesh structure arranged irregularly.
15. The manufacturing method for flexible display substrate as claimed in claim 11 , wherein in Step 24 , a solution immersion method, ultrasonic method, or a combination of both methods is used to remove the polymer fiber layer and the inorganic film layer adhered to the polymer fiber layer.
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December 28, 2015
August 7, 2018
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