Patentable/Patents/US-10119802
US-10119802

Optical position-measuring device having grating fields with different step heights

PublishedNovember 6, 2018
Assigneenot available in USPTO data we have
Inventorsnot available in USPTO data we have
Technical Abstract

An optical position-measuring device includes a scale and a scanning reticle, whose relative position is determinable in three linearly independent spatial directions using interfering light beams. A splitter grating is disposed on the scanning reticle and adapted to split light into sub-beams of different diffraction orders. An optical grating is disposed on the scale and adapted to further split the sub-beams and to recombine them after they have been reflected back from the scanning reticle. Grating fields configured as phase gratings are disposed on a side of the scanning reticle that faces the scale. The grating fields act as diffractive optics that influence the further split sub-beams. The grating fields have different step heights. An output grating is disposed on the scanning reticle and adapted to output, as interfering sub-beams, light that has been multiply reflected between the scale and the scanning reticle.

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Patent Metadata

Filing Date

January 20, 2017

Publication Date

November 6, 2018

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