Patentable/Patents/US-10288894
US-10288894

Optical component for use in a radiation source module of a projection exposure system

PublishedMay 14, 2019
Assigneenot available in USPTO data we have
Inventorsnot available in USPTO data we have
Technical Abstract

An optical component for coupling out an individual output beam from a collective output beam includes a plurality of radiation-reflecting regions which are grouped in such a way that regions of the same group serve for guiding different partial beams of the individual output beam to the same scanner.

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Patent Metadata

Filing Date

June 19, 2017

Publication Date

May 14, 2019

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