Patentable/Patents/US-10290490
US-10290490

Dust collecting apparatus, substrate processing system, and method of manufacturing semiconductor device

PublishedMay 14, 2019
Assigneenot available in USPTO data we have
Inventorsnot available in USPTO data we have
Technical Abstract

In one embodiment, a dust collecting apparatus includes a container configured to contain a fluid that includes particles to be collected. The apparatus further includes one or more sound sources configured to generate, in the container, a standing sound wave including at least one node to trap the particles in a vicinity of the node. The one or more sound sources are configured to generate the standing sound wave so that the node does not contact a wall face of the container or contacts a predetermined portion of the wall face of the container. The predetermined portion is formed of a member that prevents the particles from leaving from the node located in a vicinity of the predetermined portion.

Patent Claims

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Patent Metadata

Filing Date

August 17, 2016

Publication Date

May 14, 2019

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