Patentable/Patents/US-10309549
US-10309549

Valve device, fluid control apparatus, and semiconductor manufacturing apparatus

PublishedJune 4, 2019
Assigneenot available in USPTO data we have
Inventorsnot available in USPTO data we have
Technical Abstract

A valve device has a valve main body and a tube fitting that has an air passage for supplying operation air into the valve main body. An upper lid portion of a cap is formed with a fitted hole provided with a projection. The tube fitting has a fitting portion to be fitted into the upper lid portion. The fitting portion is formed with, on an outer circumference thereof, a fitting groove to which the projection is fitted, and has a tip end portion located closer to a tip end side than the fitting groove.

Patent Claims

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Patent Metadata

Filing Date

October 27, 2015

Publication Date

June 4, 2019

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