A deposition apparatus includes a deposition source containing a deposition material, the deposition source including a center area between two outer areas along a first direction, and a plurality of spray nozzles arranged on the center area of the deposition source along the first direction, the plurality of spray nozzles being configured to spray the deposition material toward a surface substrate, wherein the spray nozzles include first and second spray nozzles, the first spray nozzles having terminal ends thereof parallel to and facing the surface of the substrate, and the second spray nozzles having terminal ends thereof at an oblique angle with respect to the surface of the substrate.
Legal claims defining the scope of protection, as filed with the USPTO.
1. A deposition apparatus, comprising: a deposition source containing a deposition material, the deposition source including a center area between two outer areas along a first direction, a combined length of the two outer areas along the first direction being larger than half a total length of the deposition source along the first direction; and a plurality of spray nozzles arranged only on the center area of the deposition source along the first direction to spray the deposition material toward a surface of a substrate, wherein the plurality of spray nozzles include first spray nozzles and second spray nozzles arranged parallel to the first spray nozzles along the first direction, the first spray nozzles having terminal ends thereof parallel to and facing the surface of the substrate, and the second spray nozzles having terminal ends thereof at an oblique angle with respect to the surface of the substrate, and wherein the second spray nozzles include first and second groupings of the second spray nozzles, the second spray nozzles in the first grouping leaning away from the second grouping, and the second spray nozzles in the second grouping leaning away from the first grouping.
2. The deposition apparatus of claim 1 , wherein centers of the substrate and the deposition source in the first direction are aligned, the center area of the deposition source having a length L 1 in the first direction as follows: L 1 = 2 T tan θ - L 2 wherein L 2 is a deposition area length on the substrate in the first direction, T is a distance between the substrate and the terminal ends of the spray nozzles, and θ is an incident angle between the deposition material and the substrate, and wherein L 2 is at least twice longer than L 1 .
3. The deposition apparatus of claim 1 , wherein an incident angle between the deposition material and the substrate is about 43° to about 53°.
4. The deposition apparatus of claim 3 , wherein the oblique angle is about 25° to about 35°.
5. The deposition apparatus of claim 1 , wherein the plurality of spray nozzles include: a first column of the first spray nozzles arranged in the first direction; and at least one second column of the second spray nozzles arranged in the first direction, the first column and the second column being parallel and spaced apart in a second direction crossing the first direction.
6. The deposition apparatus of claim 1 , wherein the plurality of spray nozzles are symmetrically arranged in the first direction with respect to the center area of the deposition source.
7. A method manufacturing an organic light emitting diode (OLED) display, the method comprising: providing a deposition apparatus according to the claim 1 ; disposing the substrate to face the spray nozzles: and spraying the deposition material through the spray nozzles toward the substrate, while moving the deposition source in a second direction crossing the first direction.
8. The method of claim 7 , wherein disposing the substrate includes aligning centers of the substrate and deposition source in the first direction, the center area having a length L 1 in the first direction as follows: L 1 = 2 T tan θ - L 2 wherein L 2 is a deposition area length on the substrate in the first direction, T is a distance between the substrate and the terminal ends of the spray nozzles, and θ is an incident angle between the deposition material and the substrate.
9. The method of claim 7 , wherein an incident angle between the deposition material and the substrate is formed to be about 43° to about 53°.
10. The method of claim 9 , wherein the oblique angle is formed to be about 25° to about 35°.
11. The method of claim 7 , wherein the plurality of spray nozzles includes: a first column of the first spray nozzle arranged in the first direction; and a second column of the second spray nozzle arranged in the first direction, the first column and the second column being parallel and spaced apart in the second direction crossing the first direction.
12. The method of claim 7 , wherein the plurality of spray nozzles are symmetrically arranged in the first direction with respect to the center of the deposition source.
13. The deposition apparatus of claim 1 , wherein the first and second groupings of the second spray nozzles are separated from each other in the first direction within a same column of the second spray nozzles.
14. The deposition apparatus of claim 13 , wherein the first and second groupings of the second spray nozzles are symmetrical with respect to a center of the deposition source.
15. The deposition apparatus of claim 13 , wherein the second spray nozzles within each of the first and second groupings face a same direction.
16. The deposition apparatus of claim 1 , wherein the second spray nozzles in each of the first and second groupings are directed away from a center of the substrate.
17. A deposition apparatus, comprising: a deposition source containing a deposition material, the deposition source including a center area between two outer areas along a first direction, a combined length of the two outer areas along the first direction being larger than half a total length of the deposition source along the first direction; and a plurality of spray nozzles arranged only on the center area of the deposition source to spray the deposition material toward a surface of a substrate, wherein the plurality of spray nozzles include a plurality of first spray nozzles and a plurality of second spray nozzles, the first spray nozzles having terminal ends thereof parallel to and facing the surface of the substrate, and the second spray nozzles having terminal ends thereof at an oblique angle with respect to the surface of the substrate, wherein the second spray nozzles include a third spray nozzle and a fourth spray nozzle, the terminal ends of the third spray nozzle and the fourth spray nozzle having different oblique angles with respect to the surface of the substrate, wherein the first spray nozzles are arranged along a first line and the third spray nozzle and the fourth spray nozzle of the second spray nozzles are arranged along a second line, and wherein the first line and the second line are spaced from each other and extend in the first direction.
18. The deposition apparatus of claim 17 , wherein centers of the substrate and the deposition source in the first direction are aligned, the center area of the deposition source having a length L 1 in the first direction as follows: L 1 = 2 T tan θ - L 2 wherein L 2 is a deposition area length on the substrate in the first direction, T is a distance between the substrate and the terminal ends of the spray nozzles, and θ is an incident angle between the deposition material and the substrate.
19. The deposition apparatus of claim 17 , wherein an incident angle between the deposition material and the substrate is about 43° to about 53°.
20. The deposition apparatus of claim 19 , wherein the oblique angle is about 25° to about 35°.
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August 13, 2013
July 9, 2019
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