A method of manufacturing an integrated circuit. This method includes forming an epitaxial material comprising single crystal piezo material overlying a surface region of a substrate to a desired thickness and forming a trench region to form an exposed portion of the surface region through a pattern provided in the epitaxial material. Also, the method includes forming a topside landing pad metal and a first electrode member overlying a portion of the epitaxial material and a second electrode member overlying the topside landing pad metal. Furthermore, the method can include processing the backside of the substrate to form a backside trench region exposing a backside of the epitaxial material and the landing pad metal and forming a backside resonator metal material overlying the backside of the epitaxial material to couple to the second electrode member overlying the topside landing pad metal.
Legal claims defining the scope of protection, as filed with the USPTO.
1. A method of manufacturing an integrated circuit, the method comprising: providing a substrate member that includes a surface region and a backside region; treating the surface region to prepare the surface region for growth; forming an epitaxial material comprising single crystal piezo material overlying the surface region to a desired thickness; forming a trench region to form an exposed portion of the surface region through a pattern provided in the epitaxial material; forming a topside landing pad metal within a vicinity of the trench region and overlying the exposed portion of the surface region; forming at least a pair of topside electrode members, including a first electrode member overlying a portion of the epitaxial material, and a second electrode member overlying the topside landing pad metal; processing the backside of the substrate member to form a backside trench region exposing a backside of the epitaxial material overlying the first electrode member, and exposing a backside of the landing pad metal; forming a backside resonator metal material overlying the backside of the epitaxial material to form a connection from the epitaxial material to the backside of the landing pad metal to couple to the second electrode member overlying the topside landing pad metal; and forming a resonator active area using at least a portion of the epitaxial material to electrically and spatially isolate the first electrode member from the second electrode member; and forming a dielectric passivation material comprising a silicon dioxide and a silicon nitride overlying a resulting structure overlying the substrate member, wherein the resulting structure at least includes the first and second electrode members.
2. The method of claim 1 wherein the backside trench region comprises a rib structure to provide mechanical support to the epitaxial material.
3. The method of claim 1 wherein the processing of the backside of the substrate member is provided until a stop occurs on the backside of the epitaxial material.
4. The method of claim 1 wherein the epitaxial material is a single crystal piezo material selected from at least one of AlN, AlGaN, InN, BN, or other group III nitrides; wherein the epitaxial material having a thickness of greater than 0.4 microns, the epitaxial material being characterized by a dislocation density of less than 10 12 defects/ cm 2 .
5. The method of claim 1 wherein the epitaxial material includes a single crystal oxide selected from at least one of a high K dielectric, ZnO, and MgO.
6. The method of claim 1 wherein the each of the first electrode material and the second electrode material is selected from one of tantalum or molybdenum.
7. The method of claim 1 wherein the substrate member is selected from silicon, gallium arsenide, gallium nitride, aluminum nitride, or aluminum oxide.
8. A method of manufacturing an integrated circuit, the method comprising: providing a substrate member that includes a surface region and a backside region; treating the surface region to prepare the surface region for growth; forming an epitaxial material comprising single crystal piezo material overlying the surface region to a desired thickness; forming a trench region to form an exposed portion of the surface region through a pattern provided in the epitaxial material; forming a topside landing pad metal within a vicinity of the trench region and overlying the exposed portion of the surface region; forming at least a pair of topside electrode members, including a first electrode member overlying a portion of the epitaxial material, and a second electrode member overlying the topside landing pad metal; processing the backside of the substrate member to form a backside trench region exposing a backside of the epitaxial material overlying the first electrode member, and exposing a backside of the landing pad metal; forming a backside resonator metal material overlying the backside of the epitaxial material to form a connection from the epitaxial material to the backside of the landing pad metal to couple to the second electrode member overlying the topside landing pad metal; and forming a resonator active area using at least a portion of the epitaxial material to electrically and spatially isolate the first electrode member from the second electrode member; wherein the treating of the surface region comprises cleaning the surface region.
9. A method of manufacturing an integrated circuit, the method comprising: providing a substrate member that includes a surface region and a backside region; treating the surface region to prepare the surface region for growth; forming an epitaxial material comprising single crystal piezo material overlying the surface region to a desired thickness; forming a trench region to form an exposed portion of the surface region through a pattern provided in the epitaxial material; forming a topside landing pad metal within a vicinity of the trench region and overlying the exposed portion of the surface region; forming at least a pair of topside electrode members, including a first electrode member overlying a portion of the epitaxial material, and a second electrode member overlying the topside landing pad metal; processing the backside of the substrate member to form a backside trench region exposing a backside of the epitaxial material overlying the first electrode member, and exposing a backside of the landing pad metal; forming a backside resonator metal material overlying the backside of the epitaxial material to form a connection from the epitaxial material to the backside of the landing pad metal to couple to the second electrode member overlying the topside landing pad metal; and wherein the epitaxial material is characterized by a surface region of at least 50 micron by 50 micron; and wherein the epitaxial material is configured in a first strain state to compensate to the substrate member.
10. A method of manufacturing an integrated circuit, the method comprising: providing a substrate member that includes a surface region and a backside region; treating the surface region to prepare the surface region for growth; forming an epitaxial material comprising single crystal piezo material overlying the surface region to a desired thickness; forming a trench region to form an exposed portion of the surface region through a pattern provided in the epitaxial material; forming a topside landing pad metal within a vicinity of the trench region and overlying the exposed portion of the surface region; forming at least a pair of topside electrode members, including a first electrode member overlying a portion of the epitaxial material, and a second electrode member overlying the topside landing pad metal; processing the backside of the substrate member to form a backside trench region exposing a backside of the epitaxial material overlying the first electrode member, and exposing a backside of the landing pad metal; forming a backside resonator metal material overlying the backside of the epitaxial material to form a connection from the epitaxial material to the backside of the landing pad metal to couple to the second electrode member overlying the topside landing pad metal; and forming a reflector region coupled to the first electrode member.
11. A method of manufacturing an integrated circuit, the method comprising: providing a substrate member that includes a surface region and a backside region; treating surface region to prepare surface region for growth; forming an epitaxial material comprising single crystal piezo material overlying the surface region to a desired thickness; forming a trench region to form an exposed portion of the surface region through a pattern provided in the epitaxial material; forming a topside landing pad metal within a vicinity of the trench region and overlying the exposed portion of the surface region; forming at least a pair of topside electrode members, including a first electrode member overlying a portion of the epitaxial material, and a second electrode member overlying the topside landing pad metal; processing the backside of the substrate member to form a backside trench region comprising a first recessed region to expose a backside of the epitaxial material overlying the first electrode member, and a second recessed region to expose a backside of the landing pad metal; forming a backside resonator metal material overlying the backside of the epitaxial material to form a connection from the epitaxial material to the backside of the landing pad metal to couple to the second electrode member overlying the topside landing pad metal; forming a resonator active area using at least a portion of the epitaxial material to electrically and spatially isolate the first electrode member from the second electrode member; and forming a dielectric passivation material comprising a silicon dioxide and a silicon nitride overlying a resulting structure overlying the substrate member, wherein the resulting structure at least includes the first and second electrode members.
12. The method of claim 11 wherein the first recessed region and the second recessed region is isolated physically by a rib structure to provide mechanical support to the epitaxial material, the rib structure comprising a surface region co-planar with a backside surface of the substrate member.
13. The method of claim 11 wherein the epitaxial material includes a single crystal piezo material selected from at least one of AlN, AlGaN, InN, BN, and other group III nitrides; or wherein the epitaxial material includes a single crystal oxide selected from at least one of a high K dielectric, ZnO, and MgO.
14. A method of manufacturing an integrated circuit, the method comprising: providing a substrate member that includes a surface region and a backside region; treating surface region to prepare surface region for growth; forming an epitaxial material comprising single crystal piezo material overlying the surface region to a desired thickness; forming a trench region to form an exposed portion of the surface region through a pattern provided in the epitaxial material; forming a topside landing pad metal within a vicinity of the trench region and overlying the exposed portion of the surface region; forming at least a pair of topside electrode members, including a first electrode member overlying a portion of the epitaxial material, and a second electrode member overlying the topside landing pad metal; processing the backside of the substrate member to form a backside trench region comprising a first recessed region to expose a backside of the epitaxial material overlying the first electrode member, and a second recessed region to expose a backside of the landing pad metal; and forming a backside resonator metal material overlying the backside of the epitaxial material to form a connection from the epitaxial material to the backside of the landing pad metal to couple to the second electrode member overlying the topside landing pad metal; wherein the epitaxial material is characterized by a surface region of at least 50 micron by 50 micron; and wherein the epitaxial material is configured in a first strain state to compensate to the substrate member.
15. A method of manufacturing an integrated circuit, the method comprising: providing a substrate member that includes a surface region and a backside region; treating surface region to prepare surface region for growth; forming an epitaxial material comprising single crystal piezo material overlying the surface region to a desired thickness; forming a trench region to form an exposed portion of the surface region through a pattern provided in the epitaxial material; forming a topside landing pad metal within a vicinity of the trench region and overlying the exposed portion of the surface region; forming at least a pair of topside electrode members, including a first electrode member overlying a portion of the epitaxial material, and a second electrode member overlying the topside landing pad metal; processing the backside of the substrate member to form a backside trench region comprising a first recessed region to expose a backside of the epitaxial material overlying the first electrode member, and a second recessed region to expose a backside of the landing pad metal; forming a backside resonator metal material overlying the backside of the epitaxial material to form a connection from the epitaxial material to the backside of the landing pad metal to couple to the second electrode member overlying the topside landing pad metal; and forming a reflector region coupled to the first electrode member; wherein each of the first electrode material and the second electrode material is selected from tantalum or molybdenum; wherein the substrate is selected from a silicon, a gallium arsenide, gallium nitride, aluminum nitride, or an aluminum oxide.
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November 28, 2016
December 24, 2019
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