A low reflectance film with a second reflectance (50% or lower) lower than a first reflectance is formed between an optical directional coupler and a first-layer wiring with the first reflectance. Thus, even when the first-layer wiring is formed above the optical directional coupler, the influence of the light reflected by the first-layer wiring on the optical signal propagating through the first optical waveguide and the second optical waveguide of the optical directional coupler can be reduced. Accordingly, the first-layer wiring can be arranged above the optical directional coupler, and the restriction on the layout of the first-layer wiring is relaxed.
Legal claims defining the scope of protection, as filed with the USPTO.
1. A semiconductor device, comprising: a semiconductor substrate; a first insulating layer disposed on the semiconductor substrate; an optical waveguide disposed on the first insulating layer; a second insulating layer disposed on the first insulating layer such that the second insulating layer covers the optical waveguide; a first layer wiring disposed on the second insulating layer and located right above the optical waveguide; a barrier metal disposed on a lower surface of the first layer wiring; and a film disposed between the second insulating layer and the barrier metal, wherein the first layer wiring is comprised of metal, wherein the second insulating layer is comprised of silicon oxide, wherein the film is comprised of a compound of nitride, and wherein a thickness of the second insulating layer is greater than a thickness of the film.
2. The semiconductor device according to claim 1 , wherein the optical waveguide is comprised of silicon.
3. The semiconductor device according to claim 1 , wherein the first insulating layer is comprised of silicon oxide.
4. The semiconductor device according to claim 3 , wherein the first layer wiring is disposed on the film without intervening other insulating layers.
5. The semiconductor device according to claim 3 , wherein the first layer wiring is disposed on the second insulating layer via a third insulating layer, and wherein the film is covered with the third insulating layer.
6. The semiconductor device according to claim 1 , wherein the first layer wiring has a first reflectance, and wherein the film has a second reflectance lower than the first reflectance.
7. The semiconductor device according to claim 1 , wherein the film is comprised of a compound of nitride with titanium.
8. The semiconductor device according to claim 1 , wherein the barrier metal is comprised of tantalum, titanium, tantalum nitride or titanium nitride.
9. The semiconductor device according to claim 1 , wherein the film is in direct contact with the barrier metal.
10. The semiconductor device according to claim 1 , wherein an end of the film is located on an outer side relative to an end of the barrier metal in plan view.
11. The semiconductor device according to claim 1 , wherein the film is spaced apart from the barrier metal.
12. The semiconductor device according to claim 1 , wherein the film is spaced apart from the first layer wiring.
13. The semiconductor device according to claim 1 , wherein there is no wiring between the optical waveguide and the first layer wiring.
Cooperative Patent Classification codes for this invention. Click any code to explore related patents in that topic.
October 31, 2017
January 7, 2020
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