Embodiments of the invention provide a substrate processing method for bottom-up formation of a film in a recessed feature. According to one embodiment, the method includes providing a substrate containing a first layer and a second layer on the first layer, the second layer having a recessed feature extending through the second layer, and depositing a non-conformal mask layer on the substrate, where the mask layer has an overhang at an opening of the recessed feature. The method further includes removing the mask layer from a bottom of the recessed feature, while maintaining at least a portion of the overhang at the opening, selectively depositing a film on the bottom of the recessed feature, and removing the mask layer overhang from the substrate. The processing steps may be repeated at least once until the film has a desired thickness in the recessed feature.
Legal claims defining the scope of protection, as filed with the USPTO.
1. A substrate processing method, comprising: a) providing a substrate containing a first layer and a second layer on the first layer, the second layer having a recessed feature extending through the second layer; b) depositing a non-conformal mask layer on the substrate, wherein the mask layer has an overhang at an opening of the recessed feature; c) removing the mask layer from a bottom of the recessed feature, while maintaining at least a portion of the overhang at the opening; d) selectively depositing a film on the bottom of the recessed feature that is not covered by the mask layer; e) subsequent to step d), removing the remainder of the mask layer from the recessed feature; and repeating steps b)-e) until the recessed feature is at least substantially filled with the film.
2. The method of claim 1 , wherein the first and second layers contain the same material.
3. The method of claim 1 , wherein the first and second layers contain different materials.
4. The method of claim 1 , wherein the non-conformal mask layer is deposited by physical vapor deposition (PVD) or sputtering.
5. The method of claim 1 , wherein the film is deposited using atomic layer deposition (ALD).
6. The method of claim 1 , wherein the film includes a metal oxide film that is deposited using atomic layer deposition (ALD) by 1) pulsing a metal-containing precursor into a process chamber containing the substrate, 2) purging the process chamber with an inert gas, 3) pulsing an oxygen-containing precursor into the process chamber, 4) purging the process chamber with an inert gas, and 5) repeating 1)-4) at least once.
7. The method of claim 1 , wherein the film is selected from the group consisting of a metal oxide film, a metal nitride film, a metal oxynitride film, a metal silicate film, and a combination thereof.
8. A substrate processing method, comprising: a) providing a substrate containing a first layer and a second layer on the first layer, the second layer having a recessed feature extending through the first layer; b) conformally depositing a film on a sidewall and a bottom of the recessed feature; and c) selectively removing the film from the sidewall by exposing the entire film to plasma etching, wherein the film is exposed to less plasma etching species on the bottom than on the sidewall to form the film on the bottom.
9. The method of claim 8 , further comprising repeating steps b) and c) at least once until the film has a desired thickness in the recessed feature.
10. The method of claim 8 , further comprising repeating steps b) and c) until the recessed feature is at least substantially filled with the film.
11. The method of claim 8 , wherein the first and second layers contain the same material.
12. The method of claim 8 , wherein the first and second layers contain different materials.
13. The method of claim 8 , wherein the film is deposited by chemical vapor deposition (CVD) or atomic layer deposition (ALD).
14. The method of claim 8 , wherein the film has at least substantially the same thickness on the sidewall as on the bottom.
15. The method of claim 8 , wherein the film is selected from the group consisting of a metal oxide film, a metal nitride film, a metal oxynitride film, a metal silicate film, and a combination thereof.
16. A substrate processing method, comprising: a) providing a substrate containing a first layer and a second layer on the first layer, the second layer having a recessed feature extending through the first layer; b) fully filling the recessed feature with a film; c) removing the film from a sidewall to form the film on a bottom of the recessed feature; and d) repeating steps b) and c) at least once until the film has a desired thickness in the recessed feature.
17. The method of claim 16 , wherein steps b) and c) are repeated until the recessed feature is at least substantially filled with the film.
18. The method of claim 16 , wherein the first and second layers contain the same material.
19. The method of claim 16 , wherein the first and second layers contain different materials.
20. The method of claim 16 , wherein the film is deposited by physical vapor deposition (PVD), sputtering, or chemical vapor deposition (CVD).
Cooperative Patent Classification codes for this invention. Click any code to explore related patents in that topic.
April 11, 2017
March 3, 2020
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