A method, a test line and a system for detecting defects on a semiconductor wafer are presented. The method includes measuring a current-voltage (IV) curve of a plurality of metal oxide semiconductor (MOS) transistors which are connected in series in a test key; comparing the measured IV curve with a reference curve to obtain a first drain current drop in a linear region and a second drain current drop in a saturation region; and determining whether at least one of the MOS transistor among the MOS transistors of the test key is defected according to at least one of the first drain current drop and the second drain current drop.
Legal claims defining the scope of protection, as filed with the USPTO.
1. A wafer defect detection method adapted to a wafer monitoring system, the method comprising: measuring a current-voltage (IV) curve of a plurality of metal oxide semiconductor (MOS) transistors which are connected in series in a test key, wherein gate terminals of the MOS transistors are electrically isolated from corresponding drain terminals of the MOS transistors while source terminals of the MOS transistors are electrically connected to corresponding body terminals of the MOS transistors; comparing the measured IV curve with a reference IV curve to obtain a first drain current drop in a linear region and a second drain current drop in a saturation region, wherein the first and second drain current drops are determined according to a ratio of drain current of the reference IV curve and a corresponding drain current in measured IV curve; and determining whether at least one MOS transistor among the MOS transistors of the test key is defected according to at least one of the first drain current drop and the second drain current drop, comprising: determining that there is a void in at least one of the MOS transistors in the test key in response to determining that the first drain current drop of a first MOS transistor among the plurality of MOS transistors is greater than a first threshold value and the second drain current drop of the first MOS transistor is smaller than a second threshold value, wherein the first threshold value is greater than the second threshold value, wherein a number of the MOS transistors in the test key is determined according to a calculated order of the drain current drop by using a chart recording a relation between the order of a drain current drop detected by applying a gate voltage to a gate terminal of each of the MOS transistors in the test key and the number of the MOS transistors in the test key.
2. The wafer defect detection method of claim 1 , wherein the step of measuring the IV curve of the plurality of MOS transistors which are connected in series in the test key comprises: respectively measuring the IV curve of the plurality of MOS transistors in the linear region and in the saturation region.
3. The wafer defect detection method of claim 1 , wherein the determined number of the MOS transistors corresponds to the order of the drain current drop having an observability over a predetermined level, wherein the observability represents a change of a drain current capable of being observed.
4. The wafer defect detection method of claim 1 , wherein the order of the drain current drop is obtained by performing a logarithm operation on a ratio of a first drain current to a second drain current, wherein the first drain current is measured when none of the MOS transistors in the test key is defected, and the second drain current is measured when at least one of the MOS transistors in the test key is defected.
5. The wafer defect detection method of claim 1 , wherein the step of determining whether the at least one MOS transistor among the MOS transistors of the test key is defected according to at least one of the first drain current drop and the second drain current drop comprises: determining that a gate terminal of at least one of the MOS transistors in the test key is opened in response to determining that the first drain current drop is smaller than the first threshold value and the second drain current drop is greater than the second threshold value, wherein the first threshold value is smaller than the second threshold value.
6. The wafer defect detection method of claim 1 , wherein the step of determining whether the at least one MOS transistor among the MOS transistors of the test key is defected according to at least one of the first drain current drop and the second drain current drop comprises: determining that at least one of the MOS transistor is defected due to internal connection resistance among the MOS transistors in response to determining that the first drain current drop is greater than the first threshold value and the second drain current drop is greater than the second threshold value.
7. The wafer defect detection method of claim 1 , further comprising: sequentially testing a plurality of test keys in a test line, wherein the test keys in the test line are connected in parallel.
8. The wafer defect detection method of claim 7 , wherein the testing is performed by sequentially enabling a plurality of D flip-flops respectively connected to the test keys.
9. A test line of a wafer monitoring system, the test line comprising: a plurality of test keys electrically connected in parallel, wherein each of the test keys comprises a plurality of MOS transistors electrically connected in series, and gate terminals of the MOS transistors are electrically isolated from corresponding drain terminals of the MOS transistors while source terminals of the MOS transistors are electrically connected to corresponding body terminals of the MOS transistors, wherein a current-voltage (IV) curve of the plurality of MOS transistors in each of the test keys is measured and compared with a reference IV curve to obtain a first drain current drop in a linear region and a second drain current drop in a saturation region, wherein the first and second drain current drops are determined according to a ratio of drain current of the reference IV curve and a corresponding drain current in measured IV curve, and wherein a void in at least one of the MOS transistors in the test key is determined in response to determining that the first drain current drop of a first MOS transistor among the plurality of MOS transistors is greater than a first threshold value and the second drain current drop of the first MOS transistor is smaller than a second threshold value, wherein the first threshold value is greater than the second threshold value, wherein a number of the MOS transistors in each of the test keys is determined according to a calculated order of the drain current drop by using a chart recording a relation between the order of a drain current drop detected by applying a gate voltage to the gate terminal of each of the MOS transistors in the test key and the number of the MOS transistors in the test key.
10. The test line of the wafer monitoring system of claim 9 , wherein the determined number of the MOS transistors corresponds to the order of the drain current drop having an observability over a predetermined level, wherein the observability represents a change of a drain current capable of being observed.
11. The test line of the wafer monitoring system of claim 9 , wherein the order of the drain current drop is obtained by performing a logarithm operation on a ratio of a first drain current to a second drain current, wherein the first drain current is measured when none of the MOS transistors in the test key is defected, and the second drain current is measured when at least one of the MOS transistors in the test key is defected.
12. The test line of the wafer monitoring system of claim 9 , further comprising: a plurality of D flip-flops respectively connected to the test keys being controlled by a controller to sequentially enable the plurality of D flip-flops to test the plurality of test keys.
13. The test line of the wafer monitoring system of claim 9 , wherein the IV curve of the plurality of MOS transistors in the linear region and in the saturation region are respectively measured.
14. A wafer monitoring system for detecting defects on a semiconductor wafer, the system including a programmable processor and a memory which stores executable program instructions, the executable program instructions are configured, when executed by the programmable processor, to cause the system to perform: providing a test line which includes a plurality of test keys electrically connected in parallel, wherein a plurality of MOS transistors are connected in series in each of the test keys, gate terminals of the MOS transistors are electrically isolated from corresponding drain terminals of the MOS transistors, and source terminals of the MOS transistors are electrically connected to corresponding body terminals of the MOS transistors; and sequentially testing the test keys in a predetermined period to detect defects of at least one MOS transistor among the plurality of MOS transistors in each of the test keys, wherein for each of the test keys, the system performs: measuring a IV curve of the MOS transistors in the test key; comparing the measured IV curve with a reference IV curve to obtain a first drain current drop in a linear region and a second drain current drop in a saturation region, wherein the first and second drain current drops are determined according to a ratio of the drain current of the reference IV curve and a corresponding drain current in measured IV curve; determining whether at least one of the MOS transistor among the MOS transistors of the test key is defected according to at least one of the first drain current drop and the second drain current drop, comprising: determining that there is a void in at least one of the MOS transistors in the test key in response to determining that the first drain current drop of a first MOS transistor among the plurality of MOS transistors is greater than a first threshold value and the second drain current drop of the first MOS transistor is smaller than a second threshold value, wherein the first threshold value is greater than the second threshold value, wherein a number of the MOS transistors in the test key is determined according to a calculated order of the drain current drop by using a chart recording a relation between the order of a drain current drop detected by applying a gate voltage to a gate terminal of each of the MOS transistors in the test key and the number of the MOS transistors in the test key.
15. The wafer monitoring system for detecting defects on the semiconductor wafer of claim 14 , wherein the programmable processor sequentially tests each of the test keys by sequentially enabling a plurality of D flip-flops respectively connected to the test keys.
16. The wafer monitoring system for detecting defects on the semiconductor wafer of claim 14 , wherein the determined number of the MOS transistors corresponds to the order of the drain current drop having an observability over a predetermined level, wherein the observability represents a change of a drain current capable of being observed.
17. The wafer monitoring system for detecting defects on the semiconductor wafer of claim 14 , wherein the order of the drain current drop is obtained by performing a logarithm operation on a ratio of a first drain current to a second drain current, wherein the first drain current is measured when none of the MOS transistors in the test key is defected, and the second drain current is measured when at least one of the MOS transistors in the test key is defected.
18. The wafer monitoring system for detecting defects on the semiconductor wafer of claim 14 , wherein the system respectively measures the IV curve of the plurality of MOS transistors in the linear region and in the saturation region.
19. The wafer monitoring system for detecting defects on the semiconductor wafer of claim 14 , wherein the system determines that a gate terminal of at least one of the MOS transistors in the test key is opened in response to determining that the first drain current drop is smaller than the first threshold value and the second drain current drop is greater than the second threshold value, wherein the first threshold value is smaller than the second threshold value.
20. The wafer monitoring system for detecting defects on the semiconductor wafer of 14 , wherein the system determines that at least one of the MOS transistor is defected due to internal connection resistance among the MOS transistors in response to determining that the first drain current drop is greater than the first threshold value and the second drain current drop is greater than the second threshold value.
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August 29, 2017
March 31, 2020
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