An image forming apparatus includes an observation image input section in which a plurality of observation images is input, an emphasis information input section that inputs information to be emphasized, a storage section that defines a plurality of conversion functions that converts the plurality of observation images into a converted image on the basis of a function for conversion and takes, as a parameter, a gradation value of each pixel in the plurality of observation images and a plurality of emphasis functions that takes, as a parameter, a gradation value of each pixel in the conversion functions, an image calculation section that calculates an image in which information to be emphasized is emphasized on the basis of the plurality of input observation images, the input information of the information to be emphasized, the conversion functions, and the emphasis functions, and an emphasized image output section that outputs the emphasized image.
Legal claims defining the scope of protection, as filed with the USPTO.
1. An image forming apparatus comprising: a storage device in which a plurality of conversion functions that takes, as a parameter, a gradation value of each pixel in the plurality of observation images, and a plurality of emphasis functions that takes, as a parameter, a gradation value of each pixel in the conversion functions, are defined; an image acquisition facility for acquiring the plurality of images, the image acquisition facility internally includes a stage for conveying a sample and a sample for calibration on the stage, wherein the sample for calibration includes an opening region including a plurality of pairs each including two non-through openings having the same depth, the non-through openings being a combination of a substantially vertical opening and a tilted opening, the non-through openings having opening positions that are coincident with each other at a deepest portion of the non-through openings, the tilted opening having at least three types of tilt angles; and a computer communicatively coupled to the storage device, the computer configured to execute instructions to: receive a plurality of observation images as input; receive inputs indicative of information to be emphasized; calculate an image in which information to be emphasized is emphasized based on the plurality of observation images, the inputs indicative of the information to be emphasized, the conversion functions, and the emphasis functions; and output the emphasized image.
2. The image forming apparatus according to claim 1 , wherein: signals that form the plurality of images are a plurality of images that includes signals acquired by separating signals generated based on the same generation condition according to energy or angle.
3. The image forming apparatus according to claim 1 , wherein the image acquisition facility includes an optical system, the image forming apparatus sets an image acquisition condition including at least either an optical condition of the optical system or coordinates of the stage to control the image acquisition facility, and the image acquisition condition and the plurality of images together with the image acquisition condition are stored in the storage device.
4. The image forming apparatus according to claim 3 , wherein: the image acquisition facility is a microscope including two or more detectors arranged in an array.
5. The image forming apparatus according to claim 3 , wherein: the image acquisition facility further includes a sample for calibration on the stage; and the sample for calibration includes at least one of: a surface tilted region having three or more types of tilt angles, a groove region having three or more types of ratios between a depth of the groove region to a width of the groove region, a material region including three or more types of single materials, an opening region including a plurality of pairs each including two non-through openings having the same depth, the non-through openings being a combination of a substantially vertical opening and a tilted opening, the non-through openings having opening positions that are coincident with each other at a deepest portion of the non-through openings, the tilted opening having at least three types of tilt angles, a voltage region in which a voltage is partially applicable, and a laminated layer region in which a lower layer and an upper layer are laminated, the lower layer including a material including a heavy element, the upper layer including a material including a light element, the lower layer having a stepped top end, the upper layer having a flat surface.
6. The image forming apparatus according to claim 1 , wherein: outputting the emphasized image comprises forming an image while contents calculated by the image calculation section are changed based on a predetermined condition setting file.
7. The image forming apparatus according to claim 1 , wherein: the plurality of emphasis functions is any two or more of a crystal structure, a crystal orientation, a material composition, a Z position selection, shape enhancement, charging enhancement, a molecular orientation, a spin, and grain boundary enhancement, and the computer is further configured to calculate the image emphasized based on the plurality of emphasis functions.
8. The image forming apparatus according to claim 3 , wherein: the image acquisition facility further includes a sample for calibration on the stage; and the sample for calibration includes a surface tilted region having three or more types of tilt angles.
9. The image forming apparatus according to claim 3 , wherein: the image acquisition facility further includes a sample for calibration on the stage; and the sample for calibration includes a groove region having three or more types of ratios between a depth of the groove region to a width of the groove region.
10. The image forming apparatus according to claim 3 , wherein: the image acquisition facility further includes a sample for calibration on the stage; and the sample for calibration includes a material region including three or more types of single materials.
11. The image forming apparatus according to claim 3 , wherein: the image acquisition facility further includes a sample for calibration on the stage; and the sample for calibration includes a voltage region in which a voltage is partially applicable.
12. The image forming apparatus according to claim 3 , wherein: the image acquisition facility further includes a sample for calibration on the stage; and the sample for calibration includes a laminated layer region in which a lower layer and an upper layer are laminated, the lower layer including a material including a heavy element, the upper layer including a material including a light element, the lower layer having a stepped top end, the upper layer having a flat surface.
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February 12, 2018
August 25, 2020
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