A method of processing a substrate in semiconductor fabrication is provided. The method includes supplying a mixture to a process module. The method further includes detecting the concentration of a substance in the mixture. The method also includes dispensing the mixture over a substrate in the process module. In addition, the method includes supplying a supply solution including the substance to the process module and dispensing the supply solution over the substrate if the concentration of the substance in the mixture is less than a desired value.
Legal claims defining the scope of protection, as filed with the USPTO.
1. A method of processing a substrate in semiconductor fabrication, comprising: performing a circulation process by drawing a mixture from a storage module via a circulation loop and back into the storage module; supplying the mixture from the circulation loop to a chamber via an inlet conduit between the circulation loop and the chamber; detecting the concentration of a substance in the mixture, that passes through a filter of the circulation loop, in the inlet conduit at a first position; dispensing the mixture over the substrate disposed in the chamber; and supplying a supply solution including the substance to the chamber via the inlet conduit and dispensing the supply solution over the substrate when the concentration of the substance in the mixture is less than a desired value, wherein the supply solution is supplied to the inlet conduit at a second position closer to the chamber than the first position, wherein the second position is at a portion of the inlet conduit that extends in the chamber.
2. The method as claimed in claim 1 , wherein the concentration of the substance is detected in the inlet conduit before the mixture is mixed with the supply solution.
3. The method as claimed in claim 1 , wherein the supply solution is supplied to the chamber while the mixture is supplied from the storage module to the chamber.
4. The method as claimed in claim 1 , further comprising performing a maintenance process by removing the mixture when a level of a metal impurity in the mixture is higher than a limited value and supplying a new chemical solution into the storage module.
5. The method as claimed in claim 1 , wherein an amount of the supply solution supplied to the inlet conduit per time period is identified in response to a flowing rate of the mixture in the inlet conduit.
6. The method as claimed in claim 1 , wherein the mixture from the storage module is supplied to a plurality of chambers via a plurality of inlet conduits, and an amount of the supply solution supplied to each of the chambers is identified in response to the concentration of the substance detected in the corresponding inlet conduits.
7. The method as claimed in claim 1 , wherein the supply solution is supplied into the inlet conduit before the mixture is dispensed over the substrate, and the mixture and the supply solution are together dispensed over the substrate via the inlet conduit.
8. The method as claimed in claim 7 , further comprising detecting the concentration of the substance in the mixture in the inlet conduit at a third position closer to the chamber than the second position, after the mixture is mixed with the supply solution.
9. The method as claimed in claim 1 , further comprising heating the supply solution before the supply solution is supplied into the inlet conduit.
10. The method as claimed in claim 1 , wherein the concentration of the substance in the mixture is continuously detected, and the amount of the supply solution supplied to the chamber is varied according to the real-time detected results.
11. The method as claimed in claim 1 , wherein the supply solution is supplied into the inlet conduit via a branch conduit, and the concentration of the substance in the mixture is detected in a portion of the inlet conduit that connects the circulation loop to the branch conduit.
12. A method of processing substrates in semiconductor fabrication, comprising: performing a circulation process by drawing a mixture from a storage module via a circulation loop and back into the storage module; supplying the mixture from the circulation loop to a plurality of chambers via a plurality of inlet conduits connected between the circulation loop and the chambers; detecting the concentration of a substance in the mixture, that passes through a filter of the circulation loop, in each of the inlet conduits at a first position; dispensing the mixture over the substrates disposed in the chambers; and supplying a supply solution comprising the substance into the chambers via the inlet conduits, wherein an amount of the supply solution supplied to each of the chambers is identified in response to the concentration of the substance in the mixture supplied to the corresponding inlet conduits, wherein the supply solution is supplied to each of the inlet conduits at a second position closer to the corresponding chamber than the first position, wherein the second position is at a portion of one of the inlet conduits that extends in the corresponding chamber.
13. The method as claimed in claim 12 , further comprising performing a maintenance process by removing the mixture when a level of a metal impurity in the mixture is higher than a limited value and supplying a new chemical solution into the storage module.
14. The method as claimed in claim 12 , wherein the supply solution is supplied into the inlet conduits before the mixture is dispensed over the substrates, and the mixture and the supply solution are together dispensed over the substrates via the corresponding inlet conduits.
15. The method as claimed in claim 12 , wherein the supply solution is supplied into the inlet conduits via a plurality of branch conduits, and the concentration of the substance in the mixture is detected in a portion of one of the inlet conduits that connects the circulation loop to the corresponding branch conduit.
16. A method of processing a substrate in semiconductor fabrication, comprising: performing a circulation process by drawing a mixture from a storage module via a circulation loop and back into the storage module; supplying the mixture from the circulation loop to a chamber via an inlet conduit between the circulation loop and the chamber; detecting the concentration of a substance in the mixture in the inlet conduit at a first position, after the mixture passes through a filter of the circulation loop, wherein the first position is close to the chamber but separated from the chamber; dispensing the mixture over the substrate disposed in the chamber; and supplying a supply solution including the substance to the chamber via the inlet conduit and dispensing the supply solution over the substrate when the concentration of the substance in the mixture is less than a desired value, wherein the supply solution is supplied to the inlet conduit at a second position closer to the chamber than the first position, wherein the second position is at a portion of the inlet conduit that extends in the chamber.
17. The method as claimed in claim 16 , wherein the supply solution is supplied into the inlet conduit via a branch conduit, and the concentration of the substance in the mixture is detected in a portion of the inlet conduit that connects the circulation loop to the branch conduit.
18. The method as claimed in claim 16 , further comprising detecting the concentration of the substance in the mixture in the inlet conduit at a third position closer to the chamber than the second position, after the mixture is mixed with the supply solution.
19. The method as claimed in claim 18 , further comprising analyzing the detected concentration of the substance in the mixture at the first and third positions of the inlet conduit, and adjusting an amount of the supply solution supplied to the inlet conduit according to the analysis result.
20. The method as claimed in claim 16 , further comprising heating the supply solution before the supply solution is supplied into the inlet conduit.
Cooperative Patent Classification codes for this invention. Click any code to explore related patents in that topic.
May 29, 2015
September 22, 2020
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