A three-dimensional shape measurement apparatus includes main pattern illumination parts, main image-capturing parts and a control part. The main pattern illumination parts obliquely illuminate grating pattern light in different directions toward a measurement target. The main image-capturing parts obtain a grating pattern image of the measurement target by receiving reflection light of the grating pattern light illuminated from the main pattern illumination parts and obliquely reflected by the measurement target. The control part produces height data of the measurement target using grating pattern images of the measurement target, or produces height data of the measurement target using image positions of plane images for the measurement target and texture information of the measurement target. The control part employs a grating pattern illuminated on the measurement target as the texture information to produce height data of the measurement target. Thus, a three-dimensional shape may be measured more easily and accurately.
Legal claims defining the scope of protection, as filed with the USPTO.
1. A three-dimensional shape measurement apparatus comprising: at least one pattern illuminator perpendicularly and/or obliquely illuminating grating pattern light toward a measurement target; a plurality of main image-capturing parts obtaining a grating pattern image of the measurement target by receiving reflection light of the grating pattern light that is illuminated from the pattern illuminator to the measurement target and obliquely reflected by the measurement target; and a controller producing height data of the measurement target by selectively applying a first method of producing the height data of the measurement target by using grating pattern images of the measurement target, a second method of producing the height data of the measurement target by using image positions of plane images for the measurement target and texture information of the measurement target, and a third method of producing the height data of the measurement target by utilizing the grating pattern illuminated on the measurement target as the texture information of the measurement target, wherein each of the plurality of main-image capturing parts includes a camera and a lens.
2. The three-dimensional shape measurement apparatus of claim 1 , further comprising an illuminator illuminating light toward the measurement target, wherein the plurality of main image-capturing parts obtain a plane image of the measurement target by receiving reflection light of the light that is illuminated from the illuminator to the measurement target and reflected by the measurement target.
3. The three-dimensional shape measurement apparatus of claim 1 , wherein the plane images of the measurement target are image-captured without the grating pattern light or obtained by averaging the grating pattern images.
4. The three-dimensional shape measurement apparatus of claim 1 , wherein the controller produces the height data of the measurement target by using the grating pattern images of the measurement target with respect to less than a reference height, and produces the height data of the measurement target by using the image positions of the plane images and for the measurement target and the texture information of the measurement target with respect to the reference height or higher.
5. The three-dimensional shape measurement apparatus of claim 4 , wherein the reference height is less than or equal to a measurable height according to the grating pattern light of the pattern illuminator.
6. The three-dimensional shape measurement apparatus of claim 4 , wherein the at least one illuminator comprises at least two main pattern illuminators that include gratings having different grating pitches to generate grating pattern lights having different equivalent wavelengths, and wherein the reference height is less than or equal to an integrated measurable height according to the different equivalent wavelengths.
7. The three-dimensional shape measurement apparatus of claim 1 , further comprising a top image-capturing part disposed over the measurement target to obtain the grating pattern image of the measurement target by receiving reflection light of the grating pattern light that is perpendicularly reflected by the measurement target, wherein the top image-capturing part includes a camera and a lens.
8. The three-dimensional shape measurement apparatus of claim 7 , wherein the controller produces the height data of the measurement target by using the grating pattern image obtained between the top image-capturing part and each main image-capturing part.
9. The three-dimensional shape measurement apparatus of claim 1 , wherein the at least one pattern illuminator comprises at least two main pattern illuminators that are spaced apart from each other along circumferential direction around the measurement target, and the main image-capturing parts are spaced apart from each other along circumferential direction about the measurement target.
10. The three-dimensional shape measurement apparatus of claim 9 , wherein the main pattern illuminators and the main image-capturing parts form one set and are arranged in correspondence with each other.
11. The three-dimensional shape measurement apparatus of claim 1 , wherein after the controller produces height data of the measurement target in plurality for any one point by both the first method and the second method or the third method, the controller selectively uses the plural height data for the one point.
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March 29, 2019
September 29, 2020
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