An annular resonator for a vibrating structure angular rate sensor comprises a planar annular member that lies in the X-Y plane and one or more supporting structures arranged to flexibly support the annular member in the X-Y plane. The one or more supporting structures each comprise a radial portion, extending radially from the annular member and having a first thickness in the X-Y plane, and a circumferential portion, extending circumferentially from the radial portion and having a second thickness in the X-Y plane, wherein the first thickness is greater than the second thickness.
Legal claims defining the scope of protection, as filed with the USPTO.
1. An annular resonator for a vibrating structure angular rate sensor, the annular resonator comprising: a planar annular member that lies in the X-Y plane; and one or more supporting structures arranged to flexibly support the annular member in the X-Y plane; wherein the one or more supporting structures each comprise: a radial portion, extending radially from the annular member in a radial direction and having a first thickness in the X-Y plane, the second thickness being defined in a direction perpendicular to the circumferential direction; and a circumferential portion, extending circumferentially from the radial portion in a circumferential direction and having a second thickness in the X-Y plane, the second thickness being defined in a direction perpendicular to the circumferential direction, wherein the first thickness is greater than the second thickness.
2. An annular resonator according to claim 1 , wherein the one or more supporting structures each comprise a further radial portion which extends radially from the circumferential portion.
3. An annular resonator according to claim 2 , wherein the further radial portion extends radially in the same direction as the radial portion.
4. An annular resonator according to claim 1 comprising an even number of supporting structures arranged in pairs around the circumference of the annular member.
5. An annular resonator according to claim 4 , wherein each pair of supporting structures comprises a clockwise supporting structure and an anticlockwise supporting structure.
6. An annular resonator according to claim 4 , comprising eight pairs of supporting structures.
7. An annular resonator according to claim 1 , wherein the supporting structures, or pairs of supporting structures, are spaced equiangularly around the annular member.
8. An annular resonator according to claim 1 , wherein the first thickness is at least 20% greater than the second thickness.
9. An annular resonator according to claim 8 , wherein the first thickness is at least 40% greater than the second thickness.
10. An annular resonator according to claim 8 , wherein the first thickness is at least 50% greater than the second thickness.
11. An annular resonator according to claim 1 , wherein the radial portion is connected to the annular member by a connection, and wherein the supporting structure tapers from a higher width at the connection to a lower width away from the connection.
12. An annular resonator according to claim 11 , wherein the connection comprises an elliptical fillet.
13. An annular resonator according to claim 1 , wherein the one or more supporting structures are connected to a fixed support by a connection, and wherein the supporting structure tapers from a higher width at the connection to a lower width away from the connection.
14. A vibrating structure angular rate sensor comprising: an annular resonator comprising: a planar annular member that lies in the X-Y plane; and one or more supporting structures arranged to flexibly support the annular member in the X-Y plane; wherein the one or more supporting structures each comprise: a radial portion, extending radially from the annular member in a radial direction and having a first thickness in the X-Y plane, the first thickness being defined in a direction perpendicular to the radial direction; and a circumferential portion, extending circumferentially from the radial portion in a circumferential direction and having a second thickness in the X-Y plane, the second thickness being defined in a direction perpendicular to the circumferential direction, wherein the first thickness is greater than the second thickness.
15. A vibrating structure angular rate sensor according to claim 14 , wherein the sensor is a capacitive type angular rate sensor.
16. A vibrating structure angular rate sensor according to claim 14 , wherein the sensor is an inductive type angular rate sensor.
17. A vibrating structure angular rate sensor according to claim 14 , wherein the annular resonator is arranged to resonate in the Cos 2θmode.
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July 9, 2018
October 27, 2020
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