The present disclosure generally relates to a method and apparatus for loading, processing, and unloading substrates. A processing system comprises a load/unload system coupled to a photolithography system. The load/unload system comprises a first set of tracks having a first height and a first width, and a second set of tracks having a second height and a second width different than the first height and first width. An unprocessed substrate is transferred from a lift pin loader to a chuck along the first set of tracks on a first tray while a processed substrate is transferred from the chuck to the lift pin loader along the second set of tracks on a second tray. While a first tray remains with a substrate on the chuck during processing, the load/unload system is configured to unload a processed substrate and load an unprocessed substrate on a second tray.
Legal claims defining the scope of protection, as filed with the USPTO.
1. A processing system, comprising: a lift pin loader base frame configured to support a first tray and a second tray individually; a lift pin loader coupled to the lift pin loader base frame, the lift pin loader comprising a plurality of lift pins, wherein the lift pin loader is configured to move in a first direction and a second direction opposite the first direction, wherein the first tray is disposed parallel to the lift pin loader, the first tray being configured to support a first substrate, wherein the lift pin loader is configured to move in the first direction to place the first substrate on the first tray when the first tray is in contact with and supported by the lift pin loader base frame; wherein the second tray is disposed parallel to the lift pin loader, the second tray being spaced from the first tray, wherein the second tray is configured to support a second substrate, wherein the lift pin loader is configured to move in the first direction to place the second substrate on the second tray when the second tray is in contact with and supported by the lift pin loader base frame; a pair of upper tray exchange modules disposed above the lift pin loader base frame, the pair of upper tray exchange modules being configured to move in the first and second directions a first distance to lift the first tray and the second tray off the lift pin loader base frame individually; and a pair of lower tray exchange modules disposed between the lift pin loader base frame and the pair of upper tray exchange modules, the pair of lower tray exchange modules being configured to move in the first and second directions a second distance less than the first distance to place the first tray and the second tray on the lift pin loader base frame individually.
2. The processing system of claim 1 , wherein the lift pin loader is configured to move in the second direction to remove the first substrate from the first tray and to remove the second substrate from the second tray.
3. The processing system of claim 1 , wherein the first tray and the second tray each comprise one or more tooling balls.
4. The processing system of claim 1 , wherein the first tray and the second tray each comprise one or more circular rings.
5. The processing system of claim 1 , wherein the plurality of lift pins of the lift pin loader are configured to fit within one or more holes in the first tray and within one or more holes in the second tray.
6. The processing system of claim 1 , wherein the first tray and the second tray each comprise one or more interface tabs disposed on a perimeter of the first tray and the second tray.
7. A processing system, comprising: a first set of parallel tracks disposed at a first height; a second set of parallel tracks disposed parallel to the first set of parallel tracks, the second set of parallel tracks being disposed at a second height, wherein the first height is greater than the second height; a pair of upper tray exchange modules disposed on the first set of parallel tracks, the pair of upper tray exchange modules being configured to move in a first direction and a second direction opposite the first direction along the first set of parallel tracks to transfer one or more trays from a lift pin loader to a chuck; and a pair of lower tray exchange modules disposed on the second set of parallel tracks, the pair of lower tray exchange modules being configured to move in the first direction and the second direction along the second set of parallel tracks to transfer the one or more trays from the chuck to the lift pin loader, wherein the pair of upper tray exchange modules are further configured to move in a third direction and a fourth direction opposite the third direction a first distance, and the pair of lower tray exchange modules are further configured to move in the third direction and the fourth direction a second distance, wherein the first distance is greater than the second distance.
8. The processing system of claim 7 , wherein the pair of upper tray exchange modules transfer a first tray of the one or more trays via one or more interface tabs disposed on a perimeter of the first tray, and wherein the pair of lower tray exchange modules transfer a second tray of the one or more trays via one or more interface tabs disposed on a perimeter of the second tray.
9. The processing system of claim 7 , wherein the first set of tracks have a first width and the second set of tracks have a second width, the second width being greater than the first width.
10. The processing system of claim 7 , wherein the pair of upper tray exchange modules and the pair of lower tray exchange modules are configured to move simultaneously.
11. The processing system of claim 7 , wherein the pair of upper tray exchange modules are configured to transfer a first tray of the one or more trays to the chuck while the pair of lower tray exchange modules are configured to move a second tray of the one or more trays to the lift pin loader.
12. The processing system of claim 7 , wherein the pair of upper tray exchange modules and the pair of lower tray exchange modules both individually comprise one or more end effectors.
13. A method of processing substrates, comprising: placing a first substrate on a plurality of lift pins of a lift pin loader; moving the lift pin loader in a first direction to place the first substrate on a first tray; moving the first tray and the first substrate along a first set of parallel tracks in a second direction using a pair of upper tray exchange modules, the second direction being perpendicular to the first direction; moving the first tray and the first substrate in the first direction to place the first tray and the first substrate on a chuck using the pair of upper tray exchange modules; processing the first substrate; moving the first tray and the first substrate in a third direction using a pair of lower tray exchange modules to lift the first tray and the first substrate from the chuck, the third direction being opposite the first direction; and moving the first tray and the first substrate along a second set of parallel tracks in a fourth direction using the pair of lower tray exchange modules, the fourth direction being opposite the second direction.
14. The method of claim 13 , further comprising: placing a second substrate on the plurality of lift pins of the lift pin loader while processing the first substrate; moving the lift pin loader in the first direction to place the second substrate on a second tray while processing the first substrate; moving the second tray and the second substrate along the first set of parallel tracks in the second direction using the pair of upper tray exchange modules while processing the first substrate; and moving the second tray and the second substrate in the first direction to place the second tray and the second substrate on the chuck using the pair of upper tray exchange modules while moving the first tray and the first substrate along the second set of parallel tracks in the fourth direction.
15. The method of claim 14 , further comprising: moving the lift pin loader in the third direction to lift the first substrate from the first tray using the plurality of lift pins while moving the second tray and the second substrate in the first direction to place the second tray and the second substrate on the chuck.
16. The method of claim 15 , further comprising: placing a third substrate on the plurality of lift pins of the lift pin loader after the first substrate has been lifted from the first tray while processing the second substrate; and moving the lift pin loader in the first direction to place the third substrate on the first tray while processing the second substrate.
17. The method of claim 13 , wherein the first set of parallel tracks is disposed at a first height and the second set of parallel tracks is disposed at a second height, the first height being greater than the second height.
18. The method of claim 17 , wherein the first set of parallel tracks is disposed parallel to the second set of parallel tracks.
19. The method of claim 13 , wherein the first set of parallel tracks and the pair of upper tray exchange modules are spaced a first width apart and the second set of parallel tracks and the pair of lower tray exchange modules are spaced a second width apart, the second width being greater than the first width.
20. A processing system, comprising: a lift pin loader base frame configured to support a first tray and a second tray individually; a lift pin loader coupled to the lift pin loader base frame, the lift pin loader comprising a plurality of lift pins, wherein the lift pin loader is configured to move in a first direction and a second direction opposite the first direction; a first tray disposed parallel to the lift pin loader, the first tray being configured to support a first substrate; a second tray disposed parallel to the lift pin loader, the second tray being spaced from the first tray, wherein the second tray is configured to support a second substrate, and wherein the lift pin loader is configured to move in the first direction to place the first substrate on the first tray and the second substrate on the second tray; a tray exchange module base frame disposed over the lift pin loader base frame; a pair of upper tray exchange modules disposed on the tray exchange module base frame over the lift pin loader, the pair of upper tray exchange modules being able to move in the first direction, the second direction, a third direction, and a fourth direction; and a pair of lower tray exchange modules disposed on the tray exchange module base frame between the lift pin loader base frame and the pair of upper tray exchange modules, the pair of lower tray exchange modules being able to move in the first direction, the second direction, the third direction, and the fourth direction.
Cooperative Patent Classification codes for this invention. Click any code to explore related patents in that topic.
September 28, 2018
January 26, 2021
Browse 5M+ US patents with plain-English claim translations and AI-generated analysis.