In described examples, a method for fabricating a semiconductor device and a three dimensional structure, and packaging them together, includes: fabricating the integrated circuit on a substrate, immersing the substrate in a liquid encapsulation material, and illuminating the liquid encapsulation material to polymerize the liquid encapsulation material. Immersing the semiconductor device is performed to cover a layer of a platform in the liquid encapsulation material. The platform is a lead frame, a packaging substrate, or the substrate. The illuminating step targets locations of the liquid encapsulation material covering the layer. Illuminated encapsulation material forms solid encapsulation material that is fixedly coupled to contiguous portions of the semiconductor device and of the solid encapsulation material. The immersing and illuminating steps are repeated until a three dimensional structure is formed. The integrated circuit and the three dimensional structure are encapsulated in a single package.
Legal claims defining the scope of protection, as filed with the USPTO.
1. Apparatus comprising: a semiconductor device fabricated on a substrate; and a three-dimensional structure comprising a polymerized material coated with a coating metal, the coating metal electrically connected to the semiconductor device, the structure comprising an inductor or an antenna, and the structure fixedly coupled to at least one of: the substrate, a lead frame or a packaging substrate; in which the semiconductor device and the structure are encapsulated together in a device package.
2. The apparatus of claim 1 , wherein the polymerized material is a solid polymerized resin.
3. The apparatus of claim 1 , wherein the semiconductor device and the structure are encapsulated by a polymerized encapsulation resin.
4. The apparatus of claim 1 , wherein the structure comprises one or more of: one or more interconnects, one or more twisted pair lines, or one or more wires with selected impedance.
5. The apparatus of claim 1 , wherein structure is fixedly coupled to the substrate.
6. The apparatus of claim 1 , wherein structure is fixedly coupled to a lead frame.
7. The apparatus of claim 1 , wherein structure is fixedly coupled to a packaging substrate.
8. Apparatus comprising: a semiconductor device fabricated on a substrate; and a three-dimensional structure comprising a polymerized material coated with a coating metal, the coating metal electrically connected to the semiconductor device, the coating metal including a metal stack fabrication metal coated with passivation, and the structure fixedly coupled to at least one of: the substrate, a lead frame or a packaging substrate; in which the semiconductor device and the structure are encapsulated together in a device package.
9. The apparatus of claim 8 , wherein the polymerized material is a solid polymerized resin.
10. The apparatus of claim 8 , wherein the semiconductor device and the structure are encapsulated by a polymerized encapsulation resin.
11. The apparatus of claim 8 , wherein the structure comprises one or more of: one or more interconnects, one or more twisted pair lines, or one or more wires with selected impedance.
12. The apparatus of claim 8 , wherein structure is fixedly coupled to the substrate.
13. The apparatus of claim 8 , wherein structure is fixedly coupled to a lead frame.
14. The apparatus of claim 8 , wherein structure is fixedly coupled to a packaging substrate.
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December 28, 2018
February 2, 2021
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