Patentable/Patents/US-10964656
US-10964656

Semiconductor package and method of manufacturing same

PublishedMarch 30, 2021
Assigneenot available in USPTO data we have
Inventorsnot available in USPTO data we have
Technical Abstract

The present invention relates to a semiconductor package and a method of manufacturing the same. In a semiconductor package which electrically connects a semiconductor chip and a printed circuit board using a solder ball, the semiconductor package further includes a thermal buffer layer which is positioned on a semiconductor chip, absorbs and disperse heat generated by the semiconductor chip, increases a distance between the semiconductor chip and a printed circuit board to decrease a deviation of a heat conduction process, and has a thickness ranging from 7.5 to 50% of a diameter of a solder ball.

Patent Claims
16 claims

Legal claims defining the scope of protection, as filed with the USPTO.

1

1. A semiconductor package which electrically connects a semiconductor chip and a printed circuit board using a solder ball, the semiconductor package further comprising a thermal buffer layer which is positioned on a semiconductor chip, absorbs and disperse heat generated by the semiconductor chip, increases a distance between the semiconductor chip and a printed circuit board to decrease a deviation of a heat conduction process, and has a thickness ranging from 7.5 to 50% of a diameter of a solder ball, wherein the thermal buffer layer includes a resin coated film in contact with chip pad side surface of the semiconductor chip and a passivation layer formed on the resin coated film, wherein the passivation layer has a multilayer structure, wherein: a lowest layer of the multilayer structure is positioned on an entirety of the resin coated layer; and a highest layer of the multilayer structure is disposed on a part of the resin coated layer such that a step is formed on an under bump metallization on which the solder ball is seated.

2

2. The semiconductor package of claim 1 , wherein the thermal buffer layer has the thickness ranging from 15 to 100 μm.

3

3. The semiconductor package of claim 1 , wherein: the under bump metallization includes a lower region of the step, which is a region in contact with a re-distribution layer, an upper region of the step, which is positioned on the passivation layer, and a step surface, which connects the upper region and the lower region of the step; and a central portion of the solder ball is positioned on the lower region of the step and a peripheral portion of the solder ball is positioned on the upper region of the step.

4

4. The semiconductor package of claim 2 , wherein the thickness of the thermal buffer layer and a thickness of the semiconductor chip are adjusted such that an overall thickness of the semiconductor package is constant.

5

5. The semiconductor package of claim 1 , further comprising an epoxy molding compound which supports a side portion of the solder ball on the thermal buffer layer.

6

6. A method of manufacturing a semiconductor package, the method comprising: a) forming a resin coated film on a semiconductor chip and forming a re-distribution layer in contact with an electrode of the semiconductor chip on a part of an upper portion of the resin coated film; b) forming a passivation layer which is positioned on the resin coated film and is a thermal buffer layer, which exposes an upper central portion of the re-distribution layer, to have a thickness ranging from 7.5 to 50% of a diameter of a solder ball; c) forming an under bump metallization in contact with the re-distribution layer; and d) forming the solder ball which electrically connects the under bump metallization and a printed circuit board.

7

7. The method of claim 6 , wherein the passivation layer is formed as a plurality of layers, wherein: a lowest layer of the plurality of layers is formed on an entirety of the resin coated film; and a highest layer thereof is formed to be positioned under a peripheral portion of the under bump metallization.

8

8. The method of claim 6 , wherein: the under bump metallization includes a lower region of a step, which is a region in contact with the re-distribution layer, an upper region of the step, which is positioned on the passivation layer, and a step surface which connects the upper region and the lower region of the step; and a central portion of the solder ball is positioned on the lower region of the step and a peripheral portion of the solder ball is positioned on the upper region of the step.

9

9. The method of claim 6 , further comprising forming an epoxy molding compound, which supports a side portion of the solder ball, on the thermal buffer layer.

10

10. The method of claim 6 , wherein a thickness of the thermal buffer layer and a thickness of the semiconductor chip are adjusted such that an overall thickness of the semiconductor package is constant.

11

11. The method of claim 10 , wherein a rear surface of the semiconductor chip is ground by an amount by which the thickness of the thermal buffer layer is increased.

12

12. A method of manufacturing a semiconductor package comprising: a-1) forming a resin coated film, which is a thermal buffer layer, on a semiconductor chip to have a thickness ranging from 7.5 to 50% of a diameter of a solder ball and forming a re-distribution layer in contact with an electrode of the semiconductor chip on a part of an upper portion of the resin coated film; b-1) forming a passivation layer which is positioned on the resin coated film and is a thermal buffer layer which exposes an upper central portion of the re-distribution layer; c-1) forming an under bump metallization in contact with the re-distribution layer; and d-1) forming the solder ball which electrically connects the under bump metallization and a printed circuit board.

13

13. The method of claim 12 , wherein: the under bump metallization includes a lower region of a step, which is a region in contact with the re-distribution layer, an upper region of the step, which is positioned on the passivation layer, and a step surface which connects the upper region and the lower region of the step; and a central portion of the solder ball is positioned on the lower region of the step and a peripheral portion of the solder ball is positioned on the upper region of the step.

14

14. The method of claim 12 , further comprising forming an epoxy molding compound, which supports a side portion of the solder ball, on the thermal buffer layer.

15

15. The method of claim 12 , wherein a thickness of the thermal buffer layer and a thickness of the semiconductor chip are adjusted such that an overall thickness of the semiconductor package is constant.

16

16. The method of claim 15 , wherein a rear surface of the semiconductor chip is ground by an amount by which the thickness of the thermal buffer layer is increased.

Classification Codes (CPC)

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Patent Metadata

Filing Date

May 30, 2019

Publication Date

March 30, 2021

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Cite as: Patentable. “Semiconductor package and method of manufacturing same” (US-10964656). https://patentable.app/patents/US-10964656

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