Heat transfer medium supply system and substrate processing apparatus

1. A supply system for alternately supplying a first heat transfer medium and a second heat transfer medium, the supply system being capable of being connected to one or more zones of a stage configured to support a substrate, a temperature of the first heat transfer medium being different from a temperature of the second heat transfer medium, the system comprising: one or more valve units each of which is configured to alternately supply the first heat transfer medium and the second heat transfer medium to a corresponding zone among the one or more zones, a first supply line configured to supply the first heat transfer medium to the valve units; a second supply line configured to supply the second heat transfer medium to the valve units; one or more third supply lines configured to feed the first heat transfer medium from the first supply line through the valve units to the one or more zones, respectively; one or more fourth supply lines configured to feed the second heat transfer medium from the second supply line through the valve units to the one or more zones, respectively, a first return line configured to feed a heat transfer medium returning from said one or more zones; a second return line configured to feed the heat transfer medium returning from the one or more zones; and one or more third return lines configured to feed the heat transfer medium returning from the one or more zones, wherein each of said one or more valve units includes: a tubular housing having a first inlet, a second inlet, a first outlet and a second outlet, the first inlet being connected to the first supply line, the second inlet being connected to the second supply line, the first outlet being connected to one of said one or more third supply lines configured to feed the first heat transfer medium to the corresponding zone, the second outlet being connected to one of said one or more fourth supply lines configured to feed the second heat transfer medium to the corresponding zone; a shaft body inserted in the housing and having a first supply groove and a second supply groove which extend along a circumferential direction around a central axis of the shaft body, the first supply groove connecting the first inlet to the first outlet when a rotation angle about the central axis of the shaft body is within a first angle range and the second supply groove connecting the second inlet to the second outlet when the rotation angle about the central axis of the shaft body is within a second angle range; and a driving unit configured to rotate the shaft body about the central axis, wherein the first inlet and the second inlet are arranged in parallel to the central axis of the shaft body, wherein the housing further has a third inlet, a third outlet and a fourth outlet, the third inlet being connected to one of said one or more third return lines which feeds the heat transfer medium returning from the corresponding zone, the third outlet being connected to the first return line, the fourth outlet being connected to the second return line, the shaft body is further provided with a first return groove and a second return groove formed along the circumferential direction, the first return groove connecting the third inlet to the third outlet when a rotation angle about the central axis of the shaft body is within the first angle range and the second return groove connecting the third inlet to the fourth outlet when the rotation angle about the central axis of the shaft body is within the second angle range, and the shaft body is further provided with a third return groove and a fourth return groove, the third return groove connecting the first inlet to the third outlet when the rotation angle about the central axis of the shaft body is within the second angle range and the fourth return groove connecting the second inlet to the fourth outlet when the rotation angle about the central axis of the shaft body is within the first angle range.

2. The supply system of claim 1 , further comprising: one or more joints, each having two input ports and one output port communicating with the two input ports; and one or more fifth supply lines each of which is configured to feed a heat transfer medium between an output port of one of said one or more joints and the corresponding zone, wherein the two input ports of each of said one or more joints are respectively connected to one of said one or more third supply lines which feeds the first heat transfer medium to the corresponding zone and to one of said one or more fourth supply lines which feeds the second heat transfer medium to the corresponding zone, and flow path lengths of said one or more third supply lines and flow path lengths of said one or more fourth supply lines are longer than flow path lengths of said one or more fifth supply lines.

3. The supply system of claim 1 , wherein a gap is formed between the housing and the shaft body, and each of said one or more valve units further includes a sealing member provided between the housing and the shaft body to seal a space in the housing.

4. The supply system of claim 1 , wherein the first return groove and the second return groove are formed between the first supply groove and the second supply groove in an extension direction of the central axis.

5. The supply system of claim 1 , wherein the third return groove is formed between the first supply groove and the first return groove in an extension direction of the central axis and the fourth return groove is formed between the second supply groove and the second return groove in the extension direction of the central axis.

6. The supply system of claim 1 , wherein the first outlet and the second outlet are formed at a portion of the housing opposite to a portion where the first inlet and the second inlet are formed.

7. The supply system of claim 1 , wherein the supply system is configured to alternately supply the first heat transfer medium and the second heat transfer medium to a plurality of zones of the stage as the one or more zones, said one or more third supply lines are a plurality of third supply lines configured to feed the first heat transfer medium from the first supply line to the respective zones, said one or more fourth supply lines are a plurality of fourth supply lines configured to feed the second heat transfer medium from the second supply line to the respective zones, said one or more third return lines are a plurality of third return lines configured to feed the heat transfer medium returning from the respective zones, and said one or more valve units are a plurality of valve units.

8. The supply system of claim 7 , further comprising: a first member having the first supply line and the first return line; and a second member having the second supply line and the second return line, wherein the first member and the second member are spaced apart from each other.

9. A supply system for alternately supplying a first heat transfer medium and a second heat transfer medium, the supply system being capable of being connected to one or more zones of a stage configured to support a substrate, a temperature of the first heat transfer medium being different from a temperature of the second heat transfer medium, the system comprising: one or more valve units each of which is configured to alternately supply the first heat transfer medium and the second heat transfer medium to a corresponding zone among the one or more zones, a first supply line configured to supply the first heat transfer medium to the valve units; a second supply line configured to supply the second heat transfer medium to the valve units; one or more third supply lines configured to feed the first heat transfer medium from the first supply line through the valve units to the one or more zones, respectively; one or more fourth supply lines configured to feed the second heat transfer medium from the second supply line through the valve units to the one or more zones, respectively, a first return line configured to feed a heat transfer medium returning from said one or more zones; a second return line configured to feed the heat transfer medium returning from the one or more zones; one or more third return lines configured to feed the heat transfer medium returning from the one or more zones; a first member having the first supply line and the first return line; and a second member having the second supply line and the second return line, wherein each of said one or more valve units includes: a tubular housing having a first inlet, a second inlet, a first outlet and a second outlet, the first inlet being connected to the first supply line, the second inlet being connected to the second supply line, the first outlet being connected to one of said one or more third supply lines configured to feed the first heat transfer medium to the corresponding zone, the second outlet being connected to one of said one or more fourth supply lines configured to feed the second heat transfer medium to the corresponding zone; a shaft body inserted in the housing and having a first supply groove and a second supply groove which extend along a circumferential direction around a central axis of the shaft body, the first supply groove connecting the first inlet to the first outlet when a rotation angle about the central axis of the shaft body is within a first angle range and the second supply groove connecting the second inlet to the second outlet when the rotation angle about the central axis of the shaft body is within a second angle range; and a driving unit configured to rotate the shaft body about the central axis, wherein the first inlet and the second inlet are arranged in parallel to the central axis of the shaft body, wherein the housing further has a third inlet, a third outlet and a fourth outlet, the third inlet being connected to one of said one or more third return lines which feeds the heat transfer medium returning from the corresponding zone, the third outlet being connected to the first return line, the fourth outlet being connected to the second return line, the shaft body is further provided with a first return groove and a second return groove formed along the circumferential direction, the first return groove connecting the third inlet to the third outlet when a rotation angle about the central axis of the shaft body is within the first angle range and the second return groove connecting the third inlet to the fourth outlet when the rotation angle about the central axis of the shaft body is within the second angle range, the supply system is configured to alternately supply the first heat transfer medium and the second heat transfer medium to a plurality of zones of the stage as the one or more zones, said one or more third supply lines are a plurality of third supply lines configured to feed the first heat transfer medium from the first supply line to the respective zones, said one or more fourth supply lines are a plurality of fourth supply lines configured to feed the second heat transfer medium from the second supply line to the respective zones, said one or more third return lines are a plurality of third return lines configured to feed the heat transfer medium returning from the respective zones, said one or more valve units are a plurality of valve units, the first member and the second member are spaced apart from each other, the first member extends in a first direction such that the first supply line and the first return line extend in the first direction, the second member extends in the first direction such that the second supply line and the second return line extend in the first direction, the first member and the second member are arranged along a second direction perpendicular to the first direction, and the respective valve units are provided on the first member and the second member such that shaft bodies of the respective valve units extend in the second direction.

10. The supply system of claim 9 , wherein the first return line and the second return line are provided between the first supply line and the second supply line.

11. The supply system of claim 9 , wherein the first inlet and the first supply line are arranged along a third direction perpendicular to the first direction and the second direction; the third outlet and the first return line are arranged along the third direction; the second inlet and the second supply line are arranged along the third direction; and the fourth outlet and the second return line are arranged along the third direction.

12. The supply system of claim 11 , wherein the first member and the second member are provided with a plurality of connection lines extending in the third direction and allowing connection between the first inlet and the first supply line, connection between the third outlet and the first return line, connection between the second inlet and the second supply line, and connection between the fourth outlet and the second return line.

13. A substrate processing apparatus for processing a substrate, comprising: a chamber main body; a stage provided in the chamber main body and configured to hold a substrate, the stage having one or more zones; and the supply system, described in claim 1 , configured to alternately supply the first heat transfer medium and the second heat transfer medium to the one or more zones.

14. A substrate processing apparatus for processing a substrate, comprising: a chamber main body; a stage provided in the chamber main body and configured to hold a substrate, the stage having a plurality of zones; and the supply system, described in claim 7 , configured to alternately supply the first heat transfer medium and the second heat transfer medium to the plurality of zones.