A substrate supporting device having a feeder structure that enables a large number of electrodes to be successfully supplied with power. A ceramic heater 100 includes a base 10 having an upper surface as a support surface on which a substrate is supported, electrodes 20 embedded in the base 10, a base-supporting member 30 that is mounted on a lower surface of the base 10 and that is formed of a heat insulating material, and feeder rods 40 that extend through respective through-holes 35 formed in a circumferential wall 34 of the base-supporting member 30 and extending in the vertical direction and that are electrically connected to the electrodes 20.
Legal claims defining the scope of protection, as filed with the USPTO.
1. A substrate supporting device comprising: a base having an upper surface as a support surface for supporting a substrate; an electrode embedded in the base; a cylindrical base-supporting member having a hollow portion, the base-supporting member being mounted on a lower surface of the base and formed of a heat insulating material; and feeder rods or feeder wires that extend through respective through-holes formed in a circumferential wall of the base-supporting member and extending in a vertical direction and that are electrically connected to the electrode; wherein a diameter of the hollow portion is larger than a diameter of the respective through-holes.
2. The substrate supporting device according to claim 1 , further comprising: a lid member that is mounted on a lower surface of the base-supporting member and that has a through-hole extending in the vertical direction through which the feeder rods or the feeder wires extend, wherein spaces between the feeder rods or the feeder wires and the through-hole of the lid member and a space between the base-supporting member and the lid member are sealed.
Cooperative Patent Classification codes for this invention. Click any code to explore related patents in that topic.
February 6, 2017
May 11, 2021
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