Patentable/Patents/US-11152458
US-11152458

Metal capacitor

PublishedOctober 19, 2021
Assigneenot available in USPTO data we have
Inventorsnot available in USPTO data we have
Technical Abstract

A metal capacitor provided includes a first metal layer and a second metal layer disposed above a substrate. The first metal layer includes a first electrode sheet and a second electrode sheet, and the second metal layer includes a third electrode sheet and a fourth electrode sheet. The first electrode sheet and the second electrode sheet collectively form a first coplanar capacitor. The third electrode sheet and the fourth electrode sheet collectively form a second coplanar capacitor. At least a portion of the fourth electrode sheet is arranged above the first electrode sheet, and the first electrode sheet and the fourth electrode sheet collectively form a first vertical capacitor. At least a portion of the third electrode sheet is arranged above the second electrode sheet, and the second electrode sheet and the third electrode sheet collectively form a second vertical capacitor.

Patent Claims
19 claims

Legal claims defining the scope of protection, as filed with the USPTO.

1

1. A metal capacitor comprising: a first metal layer disposed above a substrate, comprising: a first electrode sheet including a first common electrode parallel to a first direction; and a second electrode sheet, wherein the first electrode sheet and the second electrode sheet collectively form a first coplanar capacitor; and a second metal layer disposed above the first metal layer, comprising: a third electrode sheet; and a fourth electrode sheet, wherein the third electrode sheet and the forth electrode sheet collectively form a second coplanar capacitor, wherein at least a portion of the fourth electrode sheet is arranged above the first electrode sheet, and the first electrode sheet and the fourth electrode sheet collectively form a first vertical capacitor, wherein at least a portion of the third electrode sheet is arranged above the second electrode sheet, and the second electrode sheet and the third electrode sheet collectively form a second vertical capacitor, wherein the first electrode sheet further comprises: a first electrode set comprising: a first main electrode parallel to a second direction and connected to the first common electrode; and a plurality of first branch electrodes parallel to the first direction, wherein each of the plurality of first branch electrodes has a first end and a second end, and the first end of each first branch electrode is connected to the first main electrode; and a second electrode set comprising: a second main electrode parallel to the second direction and connected to the first common electrode; and a plurality of second branch electrodes parallel to the first direction, wherein each of the plurality of second branch electrodes has a first end and a second end, and the second end of each second branch electrode is connected to the second main electrode, wherein the second end of each first branch electrode extends toward the second main electrode, and the first end of each second branch electrode extends toward the first main electrode.

2

2. The metal capacitor according to claim 1 , wherein the second electrode sheet comprises: a second common electrode parallel to the first direction; a first bent electrode comprising: a plurality of first long electrodes parallel to the first direction and arranged in a column along the second direction, each of the plurality of first long electrodes having a first end and a second end; and a plurality of first short electrodes parallel to the second direction, a first one of the plurality of first short electrodes being connected to the second common electrode, wherein a first portion of the plurality of first short electrodes of the first bent electrode are aligned with a first straight line along the second direction, and a second portion of the plurality of first short electrodes of the first bent electrode are aligned with a second straight line along the second direction, the first portion of the plurality of first short electrodes and the second portion of the plurality of first short electrodes being alternate along the second direction, wherein the first portion of the plurality of first short electrodes of the first bent electrode are connected to the first ends of the plurality of first long electrodes of the first bent electrode, and the second portion of the plurality of first short electrodes of the first bent electrode are connected to the second ends of the plurality of first long electrodes of the first bent electrode.

3

3. The metal capacitor according to claim 2 , wherein the first main electrode is closer to the first ends of the plurality of first long electrodes than the second main electrode, and the second main electrode is closer to the second ends of the plurality of first long electrodes than the first main electrode.

4

4. The metal capacitor according to claim 2 , wherein the second electrode sheet further comprises a second bent electrode connected to the second common electrode, wherein the first bent electrode has an identical shape to the second bent electrode, or the first bent electrode and the second bent electrode are symmetric to each other.

5

5. The metal capacitor according to claim 2 , wherein the third electrode sheet comprises: a third common electrode parallel to the first direction; a third electrode set comprising: a third main electrode parallel to the second direction and connected to the third common electrode; and a plurality of third branch electrodes parallel to the first direction, wherein each of the plurality of third branch electrodes has a first end and a second end, and the first end of each third branch electrode is connected to the third main electrode; and a fourth electrode set comprising: a fourth main electrode parallel to the second direction and connected to the third common electrode; and a plurality of fourth branch electrodes parallel to the first direction, wherein each of the plurality of fourth branch electrodes has a first end and a second end, and the second end of each fourth branch electrode is connected to the fourth main electrode, wherein the second end of each third branch electrode extends toward the fourth main electrode, and the first end of each fourth branch electrode extends toward the third main electrode.

6

6. The metal capacitor according to claim 5 , wherein the plurality of third branch electrodes and the plurality of fourth branch electrodes are disposed right above the plurality of first long electrodes of the first bent electrode.

7

7. The metal capacitor according to claim 5 , wherein the third main electrode is disposed right above the first main electrode; and the fourth main electrode is disposed right above the second main electrode.

8

8. The metal capacitor according to claim 5 , wherein the fourth electrode sheet comprises: a fourth common electrode parallel to the first direction; a third bent electrode comprising: a plurality of third long electrodes parallel to the first direction and arranged in a column along the second direction, each of the plurality of third long electrodes having a first end and a second end; and a plurality of third short electrodes parallel to the second direction, a first one of the plurality of third short electrodes being connected to the fourth common electrode, wherein a first portion of the plurality of third short electrodes of the third bent electrode are aligned with a third straight line along the second direction, and a second portion of the plurality of third short electrodes of the third bent electrode are aligned with a fourth straight line along the second direction, the first portion of the plurality of third short electrodes and the second portion of the plurality of third short electrodes being alternate along the second direction, wherein the first portion of the plurality of third short electrodes of the third bent electrode are connected to the first ends of the plurality of third long electrodes of the third bent electrode, and the second portion of the plurality of third short electrodes of the third bent electrode are connected to the second ends of the plurality of third long electrodes of the third bent electrode.

9

9. The metal capacitor according to claim 8 , wherein the plurality of third long electrodes of the third bent electrode are disposed right above the plurality of first branch electrodes and the plurality of second branch electrodes.

10

10. The metal capacitor according to claim 2 , wherein the third electrode sheet comprises: a fifth common electrode parallel to the first direction; a fourth bent electrode comprising: a plurality of fourth long electrodes parallel to the first direction and arranged in a column along the second direction, each of the plurality of fourth long electrodes having a first end and a second end; and a plurality of fourth short electrodes parallel to the second direction, a first one of the plurality of fourth short electrodes being connected to the fifth common electrode, wherein a first portion of the plurality of fourth short electrodes of the first bent electrode are aligned with a fifth straight line along the second direction, and a second portion of the plurality of fourth short electrodes of the fourth bent electrode are aligned with a sixth straight line along the second direction, the first portion of the plurality of fourth short electrodes and the second portion of the plurality of fourth short electrodes being alternate along the second direction, wherein the first portion of the plurality of fourth short electrodes of the fourth bent electrode are connected to the first ends of the plurality of fourth long electrodes of the fourth bent electrode, and the second portion of the plurality of fourth short electrodes of the fourth bent electrode are connected to the second ends of the plurality of fourth long electrodes of the fourth bent electrode.

11

11. The metal capacitor according to claim 10 , wherein the fourth electrode sheet comprises: a sixth common electrode parallel to the first direction; a fifth electrode set comprising: a fifth main electrode parallel to the second direction and connected to the sixth common electrode; and a plurality of fifth branch electrodes parallel to the first direction, wherein each of the plurality of fifth branch electrodes has a first end and a second end, and the first end of each fifth branch electrode is connected to the fifth main electrode; and a sixth electrode set comprising: a sixth main electrode parallel to the second direction and connected to the sixth common electrode; and a plurality of sixth branch electrodes parallel to the first direction, wherein each of the plurality of sixth branch electrodes has a first end and a second end, and the second end of each sixth branch electrode is connected to the sixth main electrode, wherein the second end of each fifth branch electrode extends toward the sixth main electrode, and the first end of each sixth branch electrode extends toward the fifth main electrode.

12

12. The metal capacitor according to claim 1 , wherein the first electrode sheet further comprises: a seventh electrode set disposed between the first electrode set and the second electrode set, the seventh electrode set comprising: a seventh main electrode parallel to the second direction and connected to the first common electrode; and a plurality of seventh branch electrodes parallel to the first direction, wherein each of the plurality of seventh branch electrodes has a first end and a second end, wherein the first ends of a first portion of the plurality of seventh branch electrodes are connected to the seventh main electrode, and the second ends of a second portion of the plurality of seventh branch electrodes are connected to the seventh main electrode, wherein the second ends of the first portion of the plurality of seven branch electrodes extend toward the second main electrode, and the first ends of the second portion of the plurality of seventh branch electrodes extend toward the first main electrode.

13

13. The metal capacitor according to claim 12 , wherein the quantity of the plurality of seventh branch electrodes is greater than the quantity of the first branch electrodes, and the plurality of first branch electrodes and the plurality of second branch electrodes are equal in quantity, wherein the first portion of the seventh branch electrodes and the second portion of the seventh branch electrodes are alternate along the second direction.

14

14. The metal capacitor according to claim 1 , wherein the vertical capacitor is an inter-layer capacitor.

15

15. The metal capacitor according to claim 1 , wherein the first electrode sheet and the third electrode sheet receive a first voltage; and the second electrode sheet and the fourth electrode sheet receive a second voltage, wherein the first coplanar capacitor, the second coplanar capacitor, the first vertical capacitor and the second vertical capacitor are connected in parallel.

16

16. A metal capacitor comprising: at least one metal layer disposed above a metal-oxide-semiconductor capacitor, comprising: a first electrode sheet receiving a first voltage; and a second electrode sheet receiving a second voltage, wherein the first electrode sheet comprises a first common electrode parallel to a first direction, wherein the first electrode sheet further comprises: a first electrode set comprising: a first main electrode parallel to a second direction and connected to the first common electrode; and a plurality of first branch electrodes parallel to the first direction, wherein each of the plurality of first branch electrodes has a first end and a second end, and the first end of each first branch electrode is connected to the first main electrode; and a second electrode set comprising: a second main electrode parallel to the second direction and connected to the first common electrode; and a plurality of second branch electrodes parallel to the first direction, wherein each of the plurality of second branch electrodes has a first end and a second end, and the second end of each second branch electrode is connected to the second main electrode, wherein the second end of each first branch electrode extends toward the second main electrode, and the first end of each second branch electrode extends toward the first main electrode.

17

17. The metal capacitor according to claim 16 , wherein the at least one metal layer comprises: a first metal layer; and a second metal layer, wherein the first electrode sheet and the second electrode sheet of the first metal layer collectively form a first coplanar capacitor; and the first electrode sheet and the second electrode sheet of the second metal layer collectively form a second coplanar capacitor, wherein at least a portion of the second electrode sheet of the second metal layer is arranged above the first electrode sheet of the first metal layer, and the second electrode sheet of the second metal layer and the first electrode sheet of the first metal layer collectively form a first inter-layer capacitor, wherein at least a portion of the first electrode sheet of the second metal layer is arranged above the second electrode sheet of the first metal layer, and the first electrode sheet of the second metal layer and the second electrode sheet of the first metal layer collectively form a second inter-layer capacitor, wherein the first coplanar capacitor, the second coplanar capacitor, the first inter-layer capacitor and the second inter-layer capacitor are connected in parallel.

18

18. The metal capacitor according to claim 17 , wherein a plurality of electrodes of the first electrode sheet of the first metal layer and a plurality of electrodes of the second electrode sheet of the first metal layer are interleaved in an alternate manner, and a plurality of electrodes of the first electrode sheet of the second metal layer and a plurality of electrodes of the second electrode sheet of the second metal layer are interleaved in an alternate manner, wherein an electrode pattern of the first electrode sheet of the first metal layer resembles an electrode pattern of the first electrode sheet of the second metal layer in configuration, and an electrode pattern of the second electrode sheet of the first metal layer resembles an electrode pattern of the second electrode sheet of the second metal layer in configuration.

19

19. The metal capacitor according to claim 17 , wherein a plurality of electrodes of the first electrode sheet of the first metal layer and a plurality of electrodes of the second electrode sheet of the first metal layer are interleaved in an alternate manner, and a plurality of electrodes of the first electrode sheet of the second metal layer and a plurality of electrodes of the second electrode sheet of the second metal layer are interleaved in an alternate manner, wherein an electrode pattern of the first electrode sheet of the first metal layer resembles an electrode pattern of the second electrode sheet of the second metal layer in configuration, and an electrode pattern of the second electrode sheet of the first metal layer resembles an electrode pattern of the first electrode sheet of the second metal layer in configuration.

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Patent Metadata

Filing Date

February 7, 2020

Publication Date

October 19, 2021

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