There is provided a substrate processing apparatus including: a transfer region communicating with a process chamber where substrates are processed; a first shelf region installed above the transfer region and having a first shelf storing transfer vessels accommodating the substrates; a second shelf region installed below a stage part where the vessels to be transferred to and from an external device are loaded, and having a second shelf stacking and storing the transfer vessels; and a transfer vessel transfer robot installed inside a housing accommodating the transfer region, the first shelf region and the second shelf region and transferring the vessels to and from the stage part, the first shelf, the second shelf, and the transfer region. The transfer vessel transfer robot includes: a main body base part; a first table part; a first driving part; a second table part; a second driving part; and a vessel support part.
Legal claims defining the scope of protection, as filed with the USPTO.
1. A substrate processing apparatus, comprising: a transfer region configured to communicate with a process chamber in which substrates are processed; a first shelf region installed above the transfer region, and having a first shelf configured to store a plurality of transfer vessels configured to accommodate the substrates; a second shelf region installed below a stage part on which the transfer vessels to be transferred to and from an external device are loaded, and having a second shelf that is a stacked shelf having a plurality of stages of shelf boards and that is configured to stack and store the transfer vessels; and a transfer vessel transfer robot installed inside a housing that accommodates the transfer region, the first shelf region and the second shelf region, and configured to transfer the transfer vessels to and from the stage part, the first shelf, the second shelf, and the transfer region, wherein the transfer vessel transfer robot includes: a main body base part installed on a bottom surface of the housing; a first table part configured to be moved up and down with respect to the main body base part; a first driving part disposed at an upper position of the main body base part and configured to serve as a driving source for moving the first table part up and down; a second table part mounted on the first table part and configured to be moved up and down with respect to the first table part; a second driving part configured to serve as a driving source for moving the second table part up and down; and a vessel support part mounted on the second table part and configured to support the transfer vessels to be transferred.
2. The apparatus of claim 1 , wherein the first driving part is connected to a drive transmission mechanism configured to move the first table part up and down at an upper side of the main body base part through a connection mechanism.
3. The apparatus of claim 2 , wherein the first driving part and the second driving part are respectively configured as the driving sources separate from each other and are respectively configured to be independently controlled.
4. The apparatus of claim 3 , wherein the second driving part is disposed at either an upper position or a lower position of the first table part.
5. The apparatus of claim 4 , wherein a driving torque of the first driving part is larger than a driving torque of the second driving part.
6. The apparatus of claim 5 , further comprising an air flow generating part configured to generate a down-flow from an upper side toward a bottom side in a region inside the housing where the transfer vessel transfer robot is disposed.
7. The apparatus of claim 3 , wherein a driving torque of the first driving part is larger than a driving torque of the second driving part.
8. The apparatus of claim 2 , wherein the second driving part is disposed at either an upper position or a lower position of the first table part.
9. The apparatus of claim 8 , wherein a driving torque of the first driving part is larger than a driving torque of the second driving part.
10. The apparatus of claim 2 , wherein a driving torque of the first driving part is larger than a driving torque of the second driving part.
11. The apparatus of claim 1 , wherein the first driving part and the second driving part are respectively configured as the driving sources separate from each other and are respectively configured to be independently controlled.
12. The apparatus of claim 11 , wherein the second driving part is disposed at either an upper position or a lower position of the first table part.
13. The apparatus of claim 12 , wherein a driving torque of the first driving part is larger than a driving torque of the second driving part.
14. The apparatus of claim 11 , wherein a driving torque of the first driving part is larger than a driving torque of the second driving part.
15. The apparatus of claim 1 , wherein the second driving part is disposed at either an upper position or a lower position of the first table part.
16. The apparatus of claim 15 , wherein a driving torque of the first driving part is larger than a driving torque of the second driving part.
17. The apparatus of claim 1 , wherein a driving torque of the first driving part is larger than a driving torque of the second driving part.
18. The apparatus of claim 1 , further comprising an air flow generating part configured to generate a down-flow from an upper side toward a bottom side in a region inside the housing where the transfer vessel transfer robot is disposed.
19. The apparatus of claim 1 , further comprising the stage part configured to load thereon the transfer vessels to be transferred to and from the external device.
Cooperative Patent Classification codes for this invention. Click any code to explore related patents in that topic.
January 15, 2019
December 28, 2021
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