A transfer method of transferring an object to a target substrate by using a deformable film is provided. The method includes: a first process of forming an object on a source substrate, a second process of placing a deformable film on the source substrate on which the object is formed, a third process of embedding the object into the deformable film, a fourth process of separating an object, which is to be transferred, from the source substrate, integrating the transfer object in or on a surface of the deformable film, and separating deformable film, in which the transfer object is integrated, from the source substrate, and a fifth process of transferring the object integrated into the deformable film to a target substrate.
Legal claims defining the scope of protection, as filed with the USPTO.
1. A transfer method using a deformable film, the transfer method comprising: a first process of forming an object directly on a source substrate that is a growth substrate for growing the object; a second process of placing a deformable film on the source substrate on which the object is formed; a third process of embedding the object into the deformable film; a fourth process of separating from the source substrate a transferred object that is embedded on the deformable film, wherein the fourth process further comprises: separating the transferred object from the source substrate by a Laser-lift-off method or a Chemical-lift-off-method; a fifth process of placing the transferred object to a target substrate, the fifth process further comprising coating or laminating the target substrate on the deformable film such that the target substrate contacts the deformable film and the transferred object; and the transfer method further comprising performing an anti-stiction process on a contact surface between the source substrate and the deformable film.
2. The transfer method of claim 1 , further comprising deforming the deformable film by applying light, heat, or pressure, wherein the deformable film is formed of a material allowing control on a degree of deformation or a deformation frequency.
3. The transfer method of claim 2 , wherein the first process further comprises forming a plurality of objects on the source substrate; and the third process further comprises selectively specifying one or more objects among the plurality of objects to be transferred from the source substrate.
4. The transfer method of claim 3 , wherein the third process further comprises selectively specifying a first transferred object; further comprising: after embedding the first transferred object on the deformable film: repeating the second process through the fourth process; and additionally embedding additional transferred objects in the deformable film where the first transferred object is embedded, the additional transferred objects comprising a second transferred object, a third transferred object, and an n th transferred object, where n is a natural number greater than zero; and wherein additionally embedding further comprises: additionally embedding the second transferred object, the third transferred object, and the n th transferred object at different positions respectively.
5. The transfer method of claim 4 , wherein deforming the deformable film further comprises deforming the deformable film to correspond to a shape of one or more additional transferred objects in the additional embedding process.
6. The transfer method of claim 4 , further comprising: forming an embedding pattern in the deformable film by a non-transferred object; and embedding said one or more additional transferred objects at a position adjacent to the embedding pattern.
7. The transfer method of claim 4 , further comprising: forming embedding patterns corresponding to the second, the third and the n th transferred objects in the deformable film; and deforming the embedding patterns, in the additional embedding process, to correspond to forms of the additional transferred objects.
8. The transfer method of claim 4 , wherein the additional transferred object includes a plurality of additional transferred objects, and the additional transferred objects are identical.
9. The transfer method of claim 4 , wherein the additional transferred objects are embedded into the deformable film in an array form.
10. The transfer method of claim 1 , further comprising: forming a protection film having resistance to wet etching and surrounding a non-transferred object on the source substrate.
11. The transfer method of claim 1 , further comprising: removing a non-transferred object with the Laser-lift-off method.
12. The transfer method of claim 4 , wherein the additional transferred objects are different from one another in size, material, function, or shape.
13. The transfer method of claim 1 , further comprising forming a sacrificial layer between the object and the source substrate.
14. The transfer method of claim 13 , wherein the first process includes forming a plurality of objects on the source substrate; further comprising: fixing a portion of the transferred object among the plurality of objects to the source substrate by an anchor; and forming, with the transferred object, a freestanding structure or an undercut structure to the source substrate by wet etching.
15. The transfer method of claim 1 , wherein the object comprises an electronic device, an optical device, a sensor device, a diode, a transistor, a photovoltaic device, a laser, a P-N junction, a nano device, an MEMS device, a nano material, a quantum dot, a nano line, or a combination thereof, and the object is provided in the form of an array thereof.
16. The transfer method of claim 1 , wherein the third process further comprises adjusting an embedding depth by adjusting pressure applied to the object at the time of embedding.
17. The transfer method of claim 16 , wherein the third process further comprises adjusting an adhesion between the target substrate and the transferred object delivered thereto according to the embedding depth.
18. The transfer method of claim 1 , wherein the frist first process includes forming a plurality of objects on the source substrate, and further comprising forming the deformable film on a support substrate and placed on the source substrate.
19. The transfer method of claim 1 , wherein the target substrate comprises at least one of a semiconductor substrate, a polymer substrate, glass, metal, paper, and an insulator.
20. The transfer method of claim 1 , wherein the first process includes forming a plurality of objects on the source substrate, and further comprising forming the deformable film by laminating or coating on the source substrate.
21. The transfer method of claim 1 , further comprising forming an adhesion layer on the target substrate or a delivery surface of the transferred object.
22. The transfer method of claim 1 , further comprising: after the fifth process, forming a passivation layer on the target substrate onto which the transferred object has been transferred.
23. The transfer method of claim 1 , further comprising performing an electrode forming process for driving the transferred object on the target substrate or connecting with an external circuit.
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June 22, 2020
March 15, 2022
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