Moisture and hydrogen adsorption getter and method of fabricating the same

1. A method of fabricating a moisture and hydrogen adsorption getter, the method comprising: preparing a silicon substrate including a concave portion and a convex portion; forming a plurality of holes extending downward from surfaces of the concave portion and the convex portion, wherein a plurality of metal particles is provided in the plurality of holes, forming a silicon oxide layer for adsorbing moisture; and forming a hydrogen adsorption pattern on the silicon oxide layer.

2. A method of fabricating a moisture and hydrogen adsorption getter, the method comprising: preparing a silicon substrate including a concave portion and a convex portion; forming a plurality of holes extending downward from surfaces of the concave portion and the convex portion, wherein a plurality of metal particles is provided in the plurality of holes, forming a silicon oxide layer for adsorbing moisture by immersing the silicon substrate in an acid solution; and forming a hydrogen adsorption pattern on the silicon oxide layer.

3. The method of claim 2 , further comprising: forming a plurality of holes extending downward from surfaces of the concave portion and the convex portion before the forming of the silicon oxide layer.

4. The method of claim 2 , wherein the preparing of the silicon substrate comprises: forming a mask film that covers a first region of the silicon substrate and exposes a second region of the silicon substrate; and immersing the silicon substrate in a basic solution to form the concave portion and the convex portion on the second region of the silicon substrate.

5. The method of claim 2 , wherein the forming of the hydrogen adsorption pattern comprises: forming a hydrogen adsorption preliminary pattern on the silicon oxide layer; and oxidizing the hydrogen adsorption preliminary pattern by a thermal treatment method to form the hydrogen adsorption pattern.

6. A method of fabricating a moisture and hydrogen adsorption getter, the method comprising: preparing a silicon substrate including a concave portion and a convex portion; forming a silicon oxide layer for adsorbing moisture by immersing the silicon substrate in an acid solution; and forming a hydrogen adsorption pattern on the silicon oxide layer, forming a plurality of holes extending downward from surfaces of the concave portion and the convex portion before the forming of the silicon oxide layer, wherein the forming of the holes comprises: forming a metal thin layer on the concave portion and the convex portion; thermally treating the metal thin layer formed on the concave portion and the convex portion to form metal particles; and forming the holes extending downward from the surfaces corresponding to the metal particles by a method of etching the silicon substrate including the concave portion and the convex portion by using the metal particles as a catalyst.

7. A method of fabricating a moisture and hydrogen adsorption getter, the method comprising: preparing a silicon substrate including a concave portion and a convex portion; forming a silicon oxide layer for adsorbing moisture by immersing the silicon substrate in an acid solution; forming a hydrogen adsorption pattern on the silicon oxide layer; and forming passivation metal catalyst particles on the hydrogen adsorption pattern, wherein the forming of the passivation metal catalyst particles comprises: forming a metal catalyst pattern on the hydrogen adsorption pattern; and thermally treating the metal catalyst pattern to form the passivation metal catalyst particles.