The present disclosure provides a method that includes providing a semiconductor substrate having a first region and a second region; forming a first gate within the first region and a second gate within the second region on the semiconductor substrate; forming first source/drain features of a first semiconductor material with an n-type dopant in the semiconductor substrate within the first region; forming second source/drain features of a second semiconductor material with a p-type dopant in the semiconductor substrate within the second region. The second semiconductor material is different from the first semiconductor material in composition. The method further includes forming first silicide features to the first source/drain features and second silicide features to the second source/drain features; and performing an ion implantation process of a species to both the first and second regions, thereby introducing the species to first silicide features and the second source/drain features.
Legal claims defining the scope of protection, as filed with the USPTO.
1. A device comprising: a first source/drain feature disposed in a semiconductor substrate, the first source/drain feature including a first semiconductor material with a first type dopant; a second source/drain feature formed in the semiconductor substrate, the second source/drain feature including a second semiconductor material with a second type dopant, the second source/drain feature further including a doping species, the second semiconductor material being formed of a different semiconductor material than the first semiconductor material, the second type dopant being opposite conductivity of the first type dopant; and a first silicide feature disposed on the first source/drain feature, the first silicide feature including the doping species at a first concentration; and a second silicide feature disposed on the second source/drain feature, the second silicide feature including the doping species at a second concentration that is different than the first concentration.
2. The device of claim 1 , wherein the first concentration is greater than the second concentration.
3. The device of claim 2 , wherein the first type dopant in a n-type dopant and the second type dopant is a p-type dopant.
4. The device of claim 1 , wherein the doping species includes a metal.
5. The device of claim 4 , wherein the metal is selected from the group consisting of Ytterbium (Yb), Erbium (Er), Yttrium (Y), Selenium (Se), Platinum (Pt) and Barium (Ba).
6. The device of claim 1 , wherein the first source/drain feature includes the doping species at a third concentration that is different than first concentration, and wherein the second source/drain feature includes the doping species at a fourth concentration that is different than second concentration.
7. The device of claim 1 , wherein the first semiconductor material includes carbon and the second semiconductor material includes germanium.
8. A device comprising: a first source/drain feature disposed in a semiconductor substrate, the first source/drain feature including a first semiconductor material with an n-type dopant; a second source/drain feature formed in the semiconductor substrate, the second source/drain feature including a second semiconductor material with a p-type dopant; and a first silicide feature disposed on the first source/drain feature, the first silicide feature including a metal doping species at a first concentration; and a second silicide feature disposed on the second source/drain feature, the second silicide feature including the metal doping species at second concentration that is less than the first concentration.
9. The device of claim 8 , wherein the first source/drain feature includes the metal doping species at a third concentration that is different than the first concentration, and wherein the second source/drain feature includes the metal doping species at a fourth concentration that is different than the second concentration.
10. The device of claim 8 , further comprising: a fin structure disposed on the semiconductor substrate; a high-k dielectric layer disposed on the fin structure; and a metal gate electrode disposed on the high-k dielectric layer.
11. The device of claim 8 , further comprising a dielectric isolation structure disposed in the semiconductor substrate, and wherein one of the first and second source/drain features interfaces with the dielectric isolation structure.
12. The device of claim 8 , wherein the second source/drain feature has a greater concentration of the metal doping species than the first source drain feature.
13. The device of claim 8 , wherein the second source/drain feature has a greater concentration of the metal doping species than the second silicide feature.
14. The device of claim 8 , wherein the metal doping species includes Ytterbium (Yb).
15. A device comprising: a first source/drain feature disposed in a semiconductor substrate, the first source/drain feature including a first semiconductor material with a first type dopant, the first source/drain feature including a doping species at a first concentration; a second source/drain feature formed in the semiconductor substrate, the second source/drain feature including a second semiconductor material with a second type dopant, the second type being opposite the first type, the second source/drain feature including the doping species at a second concentration; and a first silicide feature disposed on the first source/drain feature, the first silicide feature including the doping species at a third concentration that is different than the first concentration; and a second silicide feature disposed on the second source/drain feature, the second silicide feature including the doping species at a fourth concentration that is different than the second concentration.
16. The device of claim 15 , wherein the second source/drain feature includes more than 70% of the concentration of the doping species across the second source/drain feature and the second silicide feature.
17. The device of claim 15 , wherein the first source/drain feature includes more than 70% of the concentration of the doping species across the first source/drain feature and the first silicide feature.
18. The device of claim 15 , wherein the first concentration is greater than the third concentration, and wherein the second concentration is less than the fourth concentration.
19. The device of claim 18 , wherein the first type dopant is a n-type dopant and the second type dopant is a p-type dopant, and wherein the doping species includes a metal.
20. The device of claim 15 , further comprising a gate stack associated with one of the first and second source/drain features, the gate stack including: a high-k dielectric layer disposed on the semiconductor substrate; a metal gate electrode disposed on the high-k dielectric layer; and a sidewall spacer disposed along a sidewall of the gate stack, the sidewall spacer having a bottom surface facing the semiconductor substrate, and wherein the one of the first and second source/drain features interfaces with the bottom surface of the sidewall spacer.
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December 17, 2019
March 29, 2022
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