A vibrator device includes a vibrator element, and a support substrate configured to support the vibrator element. The vibrator element includes a drive arm provided with a drive signal electrode and a drive constant-potential electrode, and a detection arm provided with a detection signal electrode and a detection constant-potential electrode. The support substrate includes a base, and a drive signal interconnection electrically coupled to the drive signal electrode, a drive constant-potential interconnection electrically coupled to the drive constant-potential electrode, and a detection signal interconnection electrically coupled to the detection signal electrode all provided to the base, and the drive arm includes a first surface located at the support substrate side, and a second surface located at an opposite side to the first surface. Further, the drive constant-potential electrode is disposed on the first surface, and the drive signal electrode is disposed on the second surface.
Legal claims defining the scope of protection, as filed with the USPTO.
1. A vibrator device comprising: three axes orthogonal to each other being defined as an X axis, a Y axis, and a Z axis; a vibrator element; and a support substrate configured to support the vibrator element, the support substrate being generally rectangular-shaped and extending on a plane along the X axis and the Y axis, the support substrate having a thickness along the Z axis, wherein the vibrator element includes a drive arm which is provided with a drive signal electrode and a drive constant-potential electrode, and performs a drive vibration in response to a drive signal applied to the drive signal electrode, the drive constant-potential electrode being configured to receive a drive constant voltage, the drive arm extending along the Y axis, and a detection arm which is provided with a detection signal electrode and a detection constant-potential electrode, and performs a detection vibration in accordance with a physical quantity of a detection target to thereby output a detection signal from the detection signal electrode, the detection constant-potential electrode being configured to receive a detection constant voltage, the detection arm extending along the Y axis, the support substrate includes a base, and a drive signal interconnection electrically coupled to the drive signal electrode, a drive constant-potential interconnection electrically coupled to the drive constant-potential electrode, and a detection signal interconnection electrically coupled to the detection signal electrode all provided to the base, the drive arm includes a first surface and a second surface outwardly opposite to each other, and the first surface faces the support substrate, the drive constant-potential electrode is disposed at least on the first surface, and the drive signal electrode is disposed only on the second surface.
2. The vibrator device according to claim 1 , wherein the drive arm has a third surface and a fourth surface that are outwardly opposite to each other, and each of the third surface and the fourth surface connects the first surface and the second surface, and the drive constant-potential electrode is disposed on the first surface, the third surface, and the fourth surface.
3. The vibrator device according to claim 2 , wherein the drive constant-potential electrode is divided into a portion disposed on the first surface, a portion disposed on the third surface, and a portion disposed on the fourth surface.
4. The vibrator device according to claim 2 , wherein the first surface has a recess recessed toward the second surface, and the drive constant-potential electrode is disposed in the recess.
5. The vibrator device according to claim 1 , wherein the detection signal interconnection has a portion opposed to the drive arm.
6. The vibrator device according to claim 1 , wherein tip parts of the drive signal interconnection, the drive constant-potential interconnection, and the detection signal interconnection protrude from the base, and the vibrator element is supported by the tip parts.
7. An electronic apparatus comprising: the vibrator device according to claim 1 ; and a signal processing circuit configured to perform signal processing based on an output signal of the vibrator device.
8. A vehicle comprising: the vibrator device according to claim 1 ; and a signal processing circuit configured to perform signal processing based on an output signal of the vibrator device.
Cooperative Patent Classification codes for this invention. Click any code to explore related patents in that topic.
July 29, 2020
May 10, 2022
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