A system is disclosed. In one embodiment, the system includes a scanning electron microscopy sub-system including an electron source configured to generate an electron beam and an electron-optical assembly including one or more electron-optical elements configured to direct the electron beam to the specimen. In another embodiment, the system includes one or more grounding paths coupled to the specimen, the one or more grounding paths configured to generate one or more transmission signals based on one or more received electron beam-induced transmission currents. In another embodiment, the system includes a controller configured to: generate control signals configured to cause the scanning electron microscopy sub-system to scan the portion of the electron beam across a portion of the specimen; receive the transmission signals via the one or more grounding paths; and generate transmission current images based on the transmission signals.
Legal claims defining the scope of protection, as filed with the USPTO.
2. The system of claim 1, wherein the one or more transmission current images are further based on the one or more control signals.
7. The system of claim 6, wherein forming the one or more scanning electron microscopy images is performed concurrently with generating the one or more transmission current images.
8. The system of claim 1, wherein the first side of the specimen comprises a front side of the specimen, and the second side of the specimen comprises a back side of the specimen.
10. The system of claim 9, wherein the one or more transmission current images are further based on one or more scan signals.
15. The system of claim 14, wherein forming the one or more scanning electron microscopy images is performed concurrently with generating the one or more transmission current images.
16. The system of claim 9, wherein the first side of the specimen comprises a front side of the specimen, and the second side of the specimen comprises a back side of the specimen.
Cooperative Patent Classification codes for this invention. Click any code to explore related patents in that topic.
May 23, 2019
August 9, 2022
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