The plasma processing apparatus has a plasma processing chamber where plasma processing of the sample is performed, and plasma power supply that supplies radio frequency electric power for generating plasma. The radio frequency electric power is time modulated by a pulse wave having a first period and a second period that are repeated periodically. The pulse wave of the first period has first amplitude and the pulse wave of the second period has second amplitude which is a limited value smaller than the first amplitude. The extinction of the plasma, which is generated during the first period having the first amplitude, is maintained during the second period having the second amplitude with a predetermined dissociation.
Legal claims defining the scope of protection, as filed with the USPTO.
2. The plasma processing apparatus according to claim 1, wherein the time delay is 0.05 milliseconds.
3. The plasma processing apparatus according to in claim 1, wherein the predetermined value the controller is configured to control to turn off output of the second radio frequency power supply when the peak-to-peak voltage of the radio frequency voltage applied from the second radio frequency power supply during the on period reaches is an upper limit (Vmax), which is the predetermined value.
7. The plasma processing apparatus according to in claim 5, wherein the predetermined value is an upper limit (Vmax).
13. The plasma processing apparatus according to in claim 8, wherein the predetermined value is an upper limit (Vmax).
Cooperative Patent Classification codes for this invention. Click any code to explore related patents in that topic.
September 9, 2016
August 16, 2022
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