An analysis device analyzes inspection results of an inspection object which includes inspection target devices having respective electrodes on which needle marks are formed. The analysis device includes a display part for displaying an image, and an image generation part for generating an image to be displayed on the display part. The image generation part generates an analysis image based on information on inspection results with respect to the needle marks. The analysis image includes a needle mark scatter plot image showing positions of the needle marks with respect to the electrodes in each inspection target device in an overlapped manner, an inspection object map image showing a surface of the inspection object and showing needle mark inspection results with respect to the inspection target devices, and a captured image of the electrodes. Display contents of the images are linked with each other.
Legal claims defining the scope of protection, as filed with the USPTO.
4. The analysis device of claim 1, wherein the inspection object map image shows the needle mark inspection results in three or more stages.
5. The analysis device of claim 1, wherein the inspection object map image shows the needle mark inspection results with a color.
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November 28, 2019
August 30, 2022
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