A mechanical resonator device. The resonator device includes a resonator element made of an elastic material under tensile stress and adapted for sustaining at least one oscillation mode; and a clamping structure supporting the resonator element. The clamping structure has a phononic density of states exhibiting a bandgap or quasi-bandgap such that elastic waves of at least one polarisation and/or frequency are not allowed to propagate through the clamping structure. The resonator element and the clamping structure are configured to match with a soft-clamping condition that elastic waves of polarisation and/or frequency corresponding to the at least one oscillation mode of the resonator penetrate evanescently into the clamping structure in a manner such as to minimize bending throughout the entire resonator device. Thereby, bending related loss may be minimized and the Q-factor of the mechanical resonator may be maximized.
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2. Resonator device according to claim 1, wherein an energy-normalized mode shape curvature integral for said oscillation mode of the resonator device is less than an energy-normalized mode shape curvature integral for a corresponding mode with the same frequency of a reference resonator directly suspended from fixed anchoring means on a substrate.
3. Resonator device according to claim 1, wherein the bandgap or quasi-bandgap is produced in the clamping structure by a periodic pattern with lattice constant a.
4. Resonator device according to claim 1, wherein the resonator element and the clamping structure are made of the same elastic material under tensile stress.
5. Resonator device according to claim 1, wherein the resonator element and the clamping structure are formed in a membrane.
A resonator device includes a resonator element and a clamping structure, both integrated into a membrane. The resonator element is configured to vibrate at a resonant frequency, while the clamping structure mechanically supports the resonator element to enable controlled vibration. The membrane provides a flexible substrate that allows the resonator element to oscillate while maintaining structural integrity. The clamping structure is designed to minimize energy loss during vibration, ensuring efficient operation. This configuration is particularly useful in microelectromechanical systems (MEMS) for applications such as sensors, filters, or oscillators, where precise frequency control and stability are critical. The membrane-based design reduces parasitic effects and improves performance by isolating the resonator element from external disturbances. The resonator element may be a beam, disk, or other geometric shape, and the clamping structure may include anchors or tethers to the surrounding substrate. The membrane material is selected for its mechanical properties, such as low stress and high elasticity, to enhance resonator performance. This design addresses challenges in MEMS resonators, such as energy dissipation and environmental sensitivity, by optimizing the mechanical coupling between the resonator element and its support structure.
6. Resonator device according to claim 1, wherein the at least one oscillation mode of the resonator element is an out-of-plane oscillation mode.
7. Resonator device according to claim 1, wherein the elastic material under tensile stress is one of silicon nitride, diamond, quartz, aluminium nitride, silicon carbide, gallium arsenide, indium gallium arsenide, aluminium gallium arsenide, aluminium, gold, graphene, polymer materials, or combinations thereof.
This invention relates to a resonator device designed for high-frequency mechanical resonance applications, addressing the need for materials that maintain stability and performance under tensile stress. The device utilizes an elastic material under tensile stress to achieve precise and reliable resonant frequencies. The elastic material can be selected from a range of options, including silicon nitride, diamond, quartz, aluminium nitride, silicon carbide, gallium arsenide, indium gallium arsenide, aluminium gallium arsenide, aluminium, gold, graphene, polymer materials, or combinations thereof. These materials are chosen for their mechanical properties, such as high tensile strength, low damping, and thermal stability, which are critical for maintaining consistent resonant behavior. The device leverages the tensile stress in the material to enhance its resonant characteristics, making it suitable for applications in sensors, filters, and timing devices where accuracy and durability are essential. The selection of materials allows for customization based on specific performance requirements, such as frequency range, environmental conditions, and operational longevity. This approach ensures that the resonator device can be optimized for various industrial and scientific applications where precise frequency control is necessary.
8. Resonator device according to claim 1, wherein the elastic material under tensile stress is one of dielectrics, metals, semiconductors, metal dichalcogenides, ceramics or piezoelectric materials, or combinations thereof.
9. Resonator device according to claim 1, wherein an initial stress in the elastic material under tensile stress is between 10 MPa and 50 GPa.
A resonator device includes an elastic material under tensile stress, where the initial stress in the material is between 10 MPa and 50 GPa. The device operates in a frequency range where the elastic material exhibits nonlinear elastic behavior, allowing for frequency tuning by adjusting the tensile stress. The resonator is designed to oscillate at a resonant frequency determined by the material's properties and applied stress, enabling precise control over its vibrational characteristics. The high-stress range ensures stability and tunability, making the device suitable for applications requiring accurate frequency modulation. The elastic material's nonlinear response allows for dynamic adjustments, enhancing performance in sensing, timing, or communication systems. The stress range ensures both mechanical robustness and fine-tuning capabilities, addressing challenges in maintaining consistent resonant frequencies under varying operational conditions. This design improves reliability and adaptability in environments where precise frequency control is critical.
11. Resonator device according to claim 10, wherein the resonator element, the at least one further resonator element, and the clamping structure are made of the same elastic material under tensile stress.
12. Resonator device according to claim 1, wherein a decay length of evanescent elastic waves is in the range of 0.1 to 20 times the wavelength of the elastic waves in the clamp.
14. Method according to claim 13, wherein an energy-normalized mode shape curvature integral for said oscillation mode of the resonator device is less than an energy-normalized mode shape curvature integral for a corresponding mode with the same frequency of a reference resonator directly suspended from fixed anchoring means on a substrate.
18. Sensor according to claim 17, wherein the read-out device uses an optical and/or electronic readout element for sensing displacement of the resonator element.
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August 1, 2017
November 1, 2022
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