Processing chamber components and methods of manufacture of same are provided herein. In some embodiments, a component part body includes a component part body having a base plane and at least one textured surface region, wherein the at least one textured surface region comprises a plurality of independent surface features having a first side having at least a 45 degree angle with respect to the base plane. In at least some embodiments, the textured surface includes a plurality of independent surface features which are pore free.
Legal claims defining the scope of protection, as filed with the USPTO.
2. The chamber component of claim 1, wherein the first side is a downwardly facing surface towards the base plane and wherein only the first side is porous and has a porosity of greater than zero and less than approximately one percent.
3. The chamber component of claim 1, wherein the plurality of independent surface features comprise protrusions having a diameter of about 1.1 to about 1.8 millimeters.
4. The chamber component of claim 1, wherein the plurality of independent surface features comprise protrusions having a heights of about 0.70 to about 1.30 millimeters.
5. The chamber component of claim 1, wherein the plurality of independent surface features comprise protrusions spaced upon the coil spacer by about 0.70 to about 1.30 millimeters.
6. The chamber component of claim 1, wherein each feature of the plurality of independent surface features has a center, and each center is about 1.3 to about 2.5 millimeters from any adjacent feature.
7. The chamber component of claim 1, wherein the plurality of independent surface features include a predetermined repetitive pattern of cylindrical protrusions.
8. The chamber component of claim 1, wherein the independent surface features are equally sized and equally spaced cylindrical protrusions.
9. The chamber component of claim 1, wherein the independent surface features have a flat top.
10. The chamber component of claim 1, wherein the coil spacer comprises at least two textured surface regions.
13. The coil spacer of claim 12, wherein each of the plurality of independent surface features has an upper fillet radius of approximately 0.25 millimeters and a bottom fillet radius of approximately 0.10 mm.
14. The coil spacer of claim 12, wherein the first side is a downwardly facing surface towards the base plane and wherein only the first side is porous and has a porosity of greater than zero and less than approximately one percent.
15. The coil spacer of claim 12, wherein a top portion is disposed adjacent the cup region, wherein the top portion comprises a plurality of features.
16. The coil spacer of claim 12, comprising an outer lip proximate the top portion and disposed between the exterior surface and the interior surface.
Cooperative Patent Classification codes for this invention. Click any code to explore related patents in that topic.
December 8, 2017
June 27, 2023
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