According to an embodiment, a capacitor includes a conductive substrate, a conductive layer, a dielectric layer therebetween, and first and second internal electrodes. The substrate has first and second main surfaces. One partial region of the first main surface is provided with first recesses. A region of the second surface corresponding to a combination of the one partial region and another partial region is provided with second recesses. The conductive layer covers the main surfaces and side walls and bottom surfaces of the recesses. The first internal electrode is provided on the one partial region and electrically connected to the conductive layer. The second internal electrode is provided on the another partial region and electrically connected to the substrate.
Legal claims defining the scope of protection, as filed with the USPTO.
2. The capacitor according to claim 1, wherein a depth of the one or more second recesses is greater than a depth of the one or more first recesses.
3. The capacitor according to claim 1, wherein the one or more first recesses are one or more first trenches, the one or more second recesses are one or more second trenches, a length direction of the one or more first trenches and a length direction of the one or more second trenches intersect each other, and the one or more first trenches and the one or more second trenches are connected to each other at intersections thereof.
Cooperative Patent Classification codes for this invention. Click any code to explore related patents in that topic.
August 20, 2020
June 27, 2023
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