Substrate processing apparatus, recording medium, and fluid circulation mechanism

2. The apparatus of claim 1, wherein the plurality of suction ports are configured to locally suck the fluid in a high temperature region of the preparatory chamber.

3. The apparatus of claim 1, wherein the plurality of suction ports are disposed in the middle portion and an uppermost portion of the upper portion in the vertical direction of the substrate holder when the substrate holder is disposed at the predetermined position in the preparatory chamber.

4. The apparatus of claim 3, wherein the fluid circulator is installed such that the plurality of suction ports are adjacent to the plurality of coolers.

5. The apparatus of claim 4, wherein the plurality of coolers are installed to pass the fluid immediately after being introduced from the plurality of suction ports.

6. The apparatus of claim 5, wherein the plurality of coolers are installed to pass the fluid immediately before being introduced to the supply duct.

10. The apparatus of claim 1, wherein a door is provided on the first wall of the preparatory chamber to which the cooling plate is disposed adjacent.

11. The apparatus of claim 1, wherein a material of the cooling plate has high heat conductivity.

12. The apparatus of claim 1, wherein a material of the cooling plate is metal.

13. The apparatus of claim 1, wherein a surface of the cooling plate is processed with black alumite.

14. The apparatus of claim 1, wherein the fluid circulator is configured to be installed outside a movable range of the substrate holder.

15. The apparatus of claim 1, wherein the fluid circulator is installed to pass the fluid through the plurality of coolers, which are disposed at least at a position immediately after the plurality of suction ports and at a position immediately before the supply duct.

16. The apparatus of claim 1, wherein the fluid circulator is installed to pass the fluid introduced from the plurality of suction ports through the plurality of coolers a plurality of number of times.