Legal claims defining the scope of protection, as filed with the USPTO.
2. The transistor of claim 1 further comprising ohmic contacts.
3. The transistor of claim 1 wherein the substrate comprises GaN, sapphire, silicon carbide (SiC), silicon (Si), GaAs, InP, or InSb.
4. The transistor of claim 1 wherein the epitaxy layer comprises an AlGaN barrier layer.
5. The transistor of claim 1 wherein the transistor comprises a high electron mobility transistor.
9. The transistor of claim 1 wherein the dielectric passivation layer has a thickness of 5 nanometers to 75 nanometers.
10. The transistor of claim 1 wherein the gate foot has a width of 40 nanometers or less.
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September 19, 2023
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