Patentable/Patents/US-11769667
US-11769667

Template, method for producing template, and method for producing semiconductor device

PublishedSeptember 26, 2023
Assigneenot available in USPTO data we have
Inventorsnot available in USPTO data we have
Technical Abstract

Patent Claims
13 claims

Legal claims defining the scope of protection, as filed with the USPTO.

2

2. The template according to claim 1, wherein the film converts ultraviolet light into visible light.

3

3. The template according to claim 1, wherein quantum dots absorb ultraviolet light and emit visible light.

4

4. The template according to claim 1, wherein the quantum dots comprise at least one element selected from cadmium, zinc, indium, selenium, sulfur, silicon, and carbon.

6

6. The template according to claim 1, wherein the quantum dots are a core-type with a protective coating.

7

7. The template according to claim 1, wherein the quantum dots are a core-shell type with a protective coating.

8

8. The template according to claim 1, wherein the substrate is quartz.

9

9. The template according to claim 1, wherein the quantum dots comprise one of cadmium sulfide, cadmium selenide, cadmium telluride, zinc sulfide, zinc cadmium selenide, indium phosphide, lead sulfide, roquesite (CuInS2), or graphene.

10

10. The template according to claim 1, wherein the mesa structure comprises quartz as a main component.

12

12. The template according to claim 1, wherein the mesa structure is a portion of the substrate.

13

13. The template according to claim 1, wherein the substrate and the mesa structure have identical composition as one another.

15

15. The template according to claim 1, wherein the substrate has a second main surface that is opposite the first main surface and has a concave structure having a planar dimension larger than the mesa structure.

16

16. The template according to claim 1, wherein the substrate comprises quartz as a main component.

17

17. The template according to claim 16, wherein the mesa structure comprises quartz as a main component.

Patent Metadata

Filing Date

Unknown

Publication Date

September 26, 2023

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