Semiconductor device with waveguide and method therefor

2. The method of claim 1, wherein the launcher structure is formed having a cavity, the antenna launcher located at a bottom surface of the cavity.

3. The method of claim 2, wherein attaching the waveguide structure to the substrate further includes extending sidewalls of an opening in the waveguide structure into the cavity to substantially surround the antenna launcher.

4. The method of claim 3, wherein dimensions of the opening in the waveguide structure are configured for propagation of a mmWave signal.

5. The method of claim 2, further comprising forming a conductive ring structure substantially surround the antenna launcher, outer sidewalls of the conductive ring structure spaced from sidewalls of the cavity to form a channel between the conductive ring structure and sidewalls of the cavity.

6. The method of claim 5, wherein attaching the waveguide structure to the substrate further includes extending sidewalls of an opening in the waveguide structure into the channel formed between the conductive ring structure and the sidewalls of the cavity.

8. The method of claim 7, wherein attaching the waveguide structure to the substrate further includes extending sidewalls of an opening in the waveguide structure to substantially surround the conductive ring structure.

9. The method of claim 7, wherein attaching the waveguide structure to the substrate further includes extending sidewalls of an opening in the waveguide structure to substantially surround the antenna launcher, the conductive ring structure surrounding the extended sidewall of the opening.

11. The method of claim 10, wherein the package substrate is characterized as a build-up substrate comprising a redistribution layer configured to couple a bond pad on the active surface of the semiconductor die with the antenna launcher.

12. The method of claim 10, wherein the waveguide structure is configured and arranged for propagation of a mmWave signal.

13. The method of claim 10, wherein the launcher structure is formed having a cavity, the antenna launcher located at a bottom surface of the cavity.

14. The method of claim 13, wherein the waveguide structure includes a waveguide opening having sidewall portions extended into the cavity and substantially surrounding the antenna launcher.

15. The method of claim 13, wherein the launcher structure further includes a conductive ring structure substantially surrounding the antenna launcher, outer sidewalls of the conductive ring structure spaced from sidewalls of the cavity to form a channel between the conductive ring structure and sidewalls of the cavity.

16. The method of claim 15, wherein the waveguide structure includes a waveguide opening having sidewall portions extended into the channel formed between the conductive ring structure and the sidewalls of the cavity.

18. The method of claim 17, wherein the launcher structure is formed having a cavity, the antenna launcher located at a bottom surface of the cavity.

19. The method of claim 18, wherein sidewall portions of the waveguide opening extend into the cavity and substantially surround the antenna launcher.

20. The method of claim 18, wherein the launcher structure further includes a conductive ring structure substantially surrounding the antenna launcher and spaced from sidewalls of the cavity to form a channel between the conductive ring structure and sidewalls of the cavity, sidewall portions of the waveguide opening extend into the channel formed between the conductive ring structure and the sidewalls of the cavity.