A chip stack packaging structure and method includes: a base chip layer, including a base chip with pins on the front surface; at least one stacked chip layer, which is formed on the base chip layer, has an inter-chip insulating layer and at least one stacked chip attached to the insulating layer and pins on the front surface, where the front surface of the stacked chip faces the front surface of the base chip; and a top insulating layer, stacked on the stacked chip layer farthest from the base chip layer. A vertical interconnection hole is formed inside the inter-chip insulating layer to allow the corresponding pins to be communicated vertically so as to be electrically connected. Inside the vertical interconnection hole, a conductive material layer is formed that makes the corresponding pins electrically connected; the stacked chip is thinned and reduced after being attached to the inter-chip insulating layer.
Legal claims defining the scope of protection, as filed with the USPTO.
2. The chip stack packaging structure according to claim 1, wherein a barrier layer is further provided in the vertical interconnection hole, and the barrier layer is formed between an inner wall of the vertical interconnection hole and the conductive material layer, so as to prevent a material forming the conductive material layer from entering an inside of the inter-chip insulating layer.
3. The chip stack packaging structure according to claim 1, wherein the base chip layer is a wafer or a panel formed by a plurality of base chips.
4. The chip stack packaging structure according to claim 1, wherein in a plan view, the base chip and the at least one stacked chip are in predetermined positions such that the corresponding pins are vertically opposed to each other in a stacking direction.
5. The chip stack packaging structure according to claim 1, wherein the at least one stacked chip layer is provided in a number of two or more.
7. The chip stack packaging method according to claim 6, further comprising a barrier layer forming step of forming a barrier layer in the vertical interconnection hole between the step of forming a vertical interconnection hole and the step of forming a conductive material layer, wherein the barrier layer is formed by deposition on an inner wall of the vertical interconnection hole, so as to prevent a material forming the conductive material layer from entering an inside of the inter-chip insulating layer in the step of forming a conductive material layer.
8. The chip stack packaging method according to claim 6, further comprising a judging step to judge whether all stacked chip layers have been formed between the step of forming a conductive material layer and the step of forming a top insulating layer, wherein if it is determined in the judging step that the stacked chip layers are not fully formed, it is returned to the step of forming a stacked chip layer, and if it is determined in the judging step that the stacked chip layers are all formed, it is entered the step of forming a top insulating layer.
9. The chip stack packaging method according to claim 6, further comprising a temporary insulating layer forming step of forming a temporary insulating layer covering the at least one stacked chip on the at least one stacked chip layer between the step of thinning and reducing the at least one stacked chip and the step of forming a vertical interconnection hole.
10. The chip stack packaging method according to claim 9, further comprising a removal step of removing excess conductive material and all or part of the temporary insulating layer after the step of forming a conductive material layer.
11. The chip stack packaging method according to claim 6, wherein pins of the base chip are embedded in an inter-chip insulating layer of a stacked chip layer adjacent to the base chip layer, and pins of the at least one stacked chip are embedded in a inter-chip insulating layer of a stacked chip layer where the at least one stacked chip is located.
12. The chip stack packaging method according to claim 6, wherein two or more stacked chip layers are formed.
13. The chip stack packaging structure according to claim 2, wherein the base chip layer is a wafer or a panel formed by a plurality of base chips.
14. The chip stack packaging structure according to claim 2, wherein in a plan view, the base chip and the at least one stacked chip are in predetermined positions such that the corresponding pins are vertically opposed to each other in a stacking direction.
15. The chip stack packaging structure according to claim 2, wherein the pins of the base chip are embedded in an inter-chip insulating layer of a stacked chip layer adjacent to the base chip layer, and the pins of the at least one stacked chip are embedded in an inter-chip insulating layer of a stacked chip layer where the at least one stacked chip is located.
16. The chip stack packaging structure according to claim 2, wherein the at least one stacked chip layer is provided in a number of two or more.
17. The chip stack packaging method according to claim 7, further comprising a judging step to judge whether all stacked chip layers have been formed between the step of forming a conductive material layer and the step of forming a top insulating layer, wherein if it is determined in the judging step that the stacked chip layers are not fully formed, it is returned to the step of forming a stacked chip layer, and if it is determined in the judging step that the stacked chip layers are all formed, it is entered the step of forming a top insulating layer.
18. The chip stack packaging method according to claim 7, further comprising a temporary insulating layer forming step of forming a temporary insulating layer covering the at least one stacked chip on the at least one stacked chip layer between the step of thinning and reducing the at least one stacked chip and the step of forming a vertical interconnection hole.
19. The chip stack packaging method according to claim 7, wherein pins of the base chip are embedded in an inter-chip insulating layer of a stacked chip layer adjacent to the base chip layer, and pins of the at least one stacked chip are embedded in a inter-chip insulating layer of a stacked chip layer where the at least one stacked chip is located.
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August 5, 2021
January 9, 2024
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