An attachment and detachment device that excels in responsiveness to attachment and detachment of a workpiece even when the workpiece is thin while utilizing an electrostatic chuck method is provided. The attachment and detachment device that enables suction and separation of a workpiece includes a machinable ceramic layer, an adhesion activating layer provided on the machinable ceramic layer, an electrode layer provided on the adhesion activating layer, and a dielectric layer provided on the electrode layer, wherein the electrode layer is covered with the adhesion activating layer and the dielectric layer, and the dielectric layer has a volume resistivity of 109 to 1012 Ω·cm.
Legal claims defining the scope of protection, as filed with the USPTO.
2. The attachment and detachment device according to claim 1, wherein the workpiece has a thickness of 0.001 to 1.5 mm.
3. The attachment and detachment device according to claim 1, wherein the workpiece is any of a conductor, a semiconductor, or an insulator.
4. The attachment and detachment device according to claim 1, wherein the workpiece is any of a flake, foil, paper, or a film.
5. The attachment and detachment device according to claim 1, wherein the dielectric layer and/or the electrode layer includes a sealing hole.
6. The attachment and detachment device according to claim 1, wherein the adhesion activating layer includes a sealing hole.
7. The attachment and detachment device according to claim 1, wherein the electrode layer constitutes a unipolar electrode or a bipolar electrode to which voltages having different polarities are applied.
8. The attachment and detachment device according to claim 1, wherein the electrode layer includes a plurality of partitioned regions partitioned in an array.
9. The attachment and detachment device according to claim 2, wherein the workpiece is any of a conductor, a semiconductor, or an insulator.
10. The attachment and detachment device according to claim 2, wherein the workpiece is any of a flake, foil, paper, or a film.
11. The attachment and detachment device according to claim 1, wherein the dielectric layer comprises an aluminum oxide-based ceramic sprayed film.
12. The attachment and detachment device according to claim 1, wherein the electrode layer comprises a sprayed film comprising conductive ceramics or a metal sprayed film.
13. The attachment and detachment device according to claim 1, wherein the workpiece has a thickness of 0.001 to 0.3 mm.
14. The attachment and detachment device according to claim 1, wherein the adhesion activating layer has a volume resistivity at room temperature of 109 to 1012 Ω·cm.
Cooperative Patent Classification codes for this invention. Click any code to explore related patents in that topic.
August 31, 2020
February 27, 2024
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