A temperature control device includes: a top plate that supports a substrate; a base plate connected to the top plate so as to form an internal space with the top plate; a thermoelectric module plate arranged in the internal space; a heat exchange plate that is arranged in the internal space and exchanges heat with the thermoelectric module plate; a first coupling member that couples the top plate and the base plate via the thermoelectric module plate and the heat exchange plate and is fixed to each of the top plate and the base plate; and a second coupling member that couples the top plate and the base plate via the thermoelectric module plate and the heat exchange plate, is fixed to the top plate, and is movable relative to the base plate.
Legal claims defining the scope of protection, as filed with the USPTO.
3. The temperature control device according to claim 2, wherein the viscoelastic film contains heat conductive grease.
4. The temperature control device according to claim 1, wherein the second coupling member includes a bolt, and the sliding member includes a washer arranged around the bolt.
5. The temperature control device according to claim 1, wherein a coefficient of friction of the sliding member with respect to the second coupling member is smaller than a coefficient of friction of the base plate with respect to the second coupling member.
6. The temperature control device according to claim 1, wherein the first coupling member is fixed to a central part of the top plate, and a plurality of the second coupling members are fixed around the first coupling member.
7. The temperature control device according to claim 1, wherein a lower surface of the head portion of the second coupling member is disposed above relative to the bottom surface of the base plate toward the top plate.
8. The temperature control device according to claim 1, wherein an outer circumferential surface of the head portion of the second coupling member is spaced apart from the inner circumferential surface of the concave portion in the radial direction.
11. The temperature control device according to claim 10, wherein an outer circumferential surface of the head portion of the second coupling member and an outer circumferential surface of the second washer are spaced apart from the inner circumferential surface of the concave portion in the radial direction.
12. The temperature control device according to claim 10, wherein a coefficient of friction of the sliding member with respect to the first washer is smaller than a coefficient of friction of a surface of the second washer.
13. The temperature control device according to claim 1, wherein the second coupling member includes the head portion and a shaft portion, the shaft portion having a non-threaded part that is adjacent to the head portion and a threaded part at a distal end of the shaft portion that is configured to be screwed into the top plate.
14. The temperature control device according to claim 13, wherein the threaded part of the second coupling member is configured to penetrate a back surface of the top plate that faces the base plate, and the non-threaded part of the second coupling member is configured to abut the back surface of the top plate.
Cooperative Patent Classification codes for this invention. Click any code to explore related patents in that topic.
October 30, 2019
March 19, 2024
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