The present invention relates to a substrate processing apparatus capable of shortening a process time, and the substrate processing apparatus according to the present invention comprises an index chamber having a transfer robot loading/unloading a substrate; a process chamber having a heating means heating the substrate and processing the substrate; a loadlock chamber disposed between the index chamber and the process chamber; and a conveying chamber having a conveying robot conveying the substrate between the process chamber and the loadlock chamber, wherein a pre-heating means is provided in the conveying robot to pre-heat the substrate in a state before processing.
Legal claims defining the scope of protection, as filed with the USPTO.
3. The substrate processing apparatus of claim 2, wherein the one or more preheaters of the loadlock chamber are configured to turn on when the substrate is mounted on a supporting unit of the loadlock chamber.
4. The substrate processing apparatus of claim 3, wherein the one or more preheaters of the loadlock chamber are configured to turn off when the substrate is not mounted on the supporting unit of the loadlock chamber.
6. The substrate processing apparatus of claim 1, wherein the heating lamp is configured to turn on before the hand preheater turns on when the substrate is mounted on the hand.
7. The substrate processing apparatus of claim 1, wherein the heating lamp is configured to turn off when the substrate is not mounted on the hand.
11. The substrate processing apparatus of claim 10, wherein the support unit preheater is configured to turn on when the substrate is mounted on the support unit.
12. The substrate processing apparatus of claim 10, wherein the support unit preheater is configured to turn off when the substrate is not mounted on the support unit.
14. The substrate processing apparatus of claim 13, wherein the housing preheater is configured to turn on to preheat the substrate in a non-contact manner when the substrate is mounted on the support unit.
15. The substrate processing apparatus of claim 13, wherein the housing preheater is configured to turn off when the substrate is not mounted on the support unit.
20. The substrate processing apparatus of claim 19, wherein the hand preheater is configured to turn on when the substrate is mounted on the hand and turn off when the substrate is not mounted on the hand.
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October 28, 2020
May 7, 2024
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