An apparatus including at least one drive; a first robot arm having a first upper arm, a first forearm and a first end effector. The first upper arm is connected to the at least one drive at a first axis of rotation. A second robot arm has a second upper arm, a second forearm and a second end effector. The second upper arm is connected to the at least one drive at a second axis of rotation which is spaced from the first axis of rotation. The first and second robot arms are configured to locate the end effectors in first retracted positions for stacking substrates located on the end effectors at least partially one above the another. The first and second robot arms are configured to extend the end effectors from the first retracted positions in a first direction along parallel first paths located at least partially directly one above the other. The first and second robot arms are configured to extend the end effectors in at least one second direction along second paths spaced from one another which are not located above one another. The first upper arm and the first forearm have different effective lengths. The second upper arm and the second forearm have different effective lengths.
Legal claims defining the scope of protection. Each claim is shown in both the original legal language and a plain English translation.
2. The apparatus as claimed in claim 1 where the first upper arm and the first forearm have different effective lengths, and where the second upper arm and the second forearm have different effective lengths.
This invention relates to a mechanical apparatus designed to provide adjustable movement, likely for robotic arms or similar articulated systems. The apparatus addresses the need for precise control over movement by incorporating upper and lower arm segments with independently adjustable lengths. The primary structure includes a first upper arm and a first forearm, as well as a second upper arm and a second forearm, where each pair of segments has different effective lengths. This asymmetry allows for customized motion profiles, enabling the apparatus to adapt to varying operational requirements. The differing lengths of the upper and forearm segments in each pair ensure that the apparatus can achieve a wider range of motion or more precise positioning than would be possible with uniform-length segments. The apparatus likely includes rotational joints or hinges connecting these segments, allowing for articulated movement. The design may be used in applications requiring flexible manipulation, such as industrial robotics, medical devices, or automated assembly systems. The key innovation lies in the ability to tailor the movement characteristics by adjusting the relative lengths of the upper and forearm segments, providing greater versatility in operation.
3. The apparatus as claimed in claim 1 where the linear robot transport comprises a stationary part and a movable part having a rotor mounted to the movable part.
A linear robot transport system is designed to improve precision and efficiency in automated material handling. The system addresses challenges in traditional linear transport mechanisms, such as limited flexibility, high maintenance, and reduced accuracy in positioning. The apparatus includes a linear robot transport with a stationary part and a movable part. The movable part features a rotor that enables controlled movement along a defined path. The rotor is mounted to the movable part, allowing for precise linear motion while maintaining stability. The stationary part provides structural support and alignment, ensuring consistent performance. The rotor's integration with the movable part enhances the system's ability to handle varying loads and speeds while minimizing mechanical wear. This design improves operational reliability and reduces downtime in automated production lines, warehouses, or assembly systems. The system's modularity allows for easy integration with existing automation infrastructure, making it adaptable to different industrial applications. The combination of a stationary support structure and a movable rotor-equipped component enables high-precision linear transport, addressing the need for accurate and efficient material movement in automated environments.
4. The apparatus as claimed in claim 3 where the linear robot transport comprises at least one of rails, linear bearings, or magnetic bearings.
This invention relates to an automated material handling system designed to improve efficiency and precision in industrial or manufacturing environments. The system addresses the challenge of accurately transporting and positioning objects within a workspace, particularly in applications requiring high repeatability and minimal mechanical wear. The apparatus includes a linear robot transport mechanism that moves along a defined path to deliver objects to specific locations. This transport mechanism is supported by at least one of rails, linear bearings, or magnetic bearings, ensuring smooth and stable motion. The use of these components allows for precise positioning while reducing friction and wear, which is critical for maintaining long-term reliability in automated systems. The linear robot transport is integrated with a positioning system that adjusts the orientation of the transported object, ensuring proper alignment with target locations. This adjustment may involve rotating or tilting the object to match the required orientation for tasks such as assembly, inspection, or packaging. The system may also include sensors or feedback mechanisms to verify the object's position and orientation, enabling real-time corrections if deviations occur. By combining a robust linear transport mechanism with an adjustable positioning system, this invention provides a versatile solution for automated material handling, enhancing productivity and accuracy in industrial processes. The use of rails, linear bearings, or magnetic bearings ensures durability and precision, making the system suitable for high-demand applications.
6. The apparatus as claimed in claim 1 where the robot is on a pivoting base, and where the pivoting base is on a robot drive unit of the linear robot transport, where the pivoting base is configured to rotate the robot on the robot drive unit.
This invention relates to a robotic system for linear transport, addressing the challenge of limited maneuverability in linear robot transport systems. The system includes a robot mounted on a pivoting base, which is in turn mounted on a robot drive unit of a linear robot transport system. The pivoting base is designed to rotate the robot on the robot drive unit, enabling the robot to adjust its orientation while moving along the linear transport path. This rotational capability enhances the robot's ability to interact with objects or perform tasks at different angles, improving flexibility and efficiency in automated processes. The pivoting base allows the robot to pivot independently of the linear movement of the transport system, providing greater adaptability in environments where precise positioning and orientation are required. The system is particularly useful in industrial automation, logistics, and assembly line applications where robots need to perform tasks at varying orientations while moving along a fixed linear path. The pivoting mechanism ensures smooth and controlled rotation, maintaining stability during operation. This design overcomes the limitations of traditional linear transport systems by integrating rotational movement, thereby expanding the functional range of the robot within the transport system.
7. The apparatus as claimed in claim 3 where the movable part comprises a pivoting base having the robot mounted to the pivoting base, and where the pivoting base mounted to the stationary part for both rotatable motion on the stationary part and linear motion on the stationary part.
This invention relates to a robotic apparatus designed to enhance mobility and positioning flexibility. The apparatus includes a stationary part and a movable part, where the movable part is mounted to the stationary part in a way that allows both rotational and linear motion. The movable part features a pivoting base to which a robot is attached. The pivoting base enables the robot to rotate relative to the stationary part, while also allowing linear movement along the stationary part. This dual-motion capability provides the robot with greater range and precision in positioning, making it suitable for applications requiring dynamic adjustments in orientation and location. The design ensures stability during movement while maintaining the ability to reposition the robot as needed. The combination of rotational and linear motion in a single apparatus improves operational efficiency and adaptability in environments where fixed or single-axis systems would be limiting. The invention addresses the need for versatile robotic positioning systems that can accommodate complex movement requirements without compromising structural integrity.
8. The apparatus as claimed in claim 1 further comprising a mechanical drive transmission connecting the at least one drive to the first forearm at a first joint between the first upper arm and the first forearm for the at least one drive to rotate the first forearm, where the mechanical drive transmission comprises at least one non-circular pulley and a first band.
A mechanical apparatus includes a robotic arm system with at least one drive mechanism connected to a first forearm segment via a mechanical drive transmission. The transmission is positioned at a joint between the first upper arm and the first forearm, enabling the drive to rotate the forearm. The transmission includes at least one non-circular pulley and a first band, which together facilitate controlled rotational movement of the forearm. The non-circular pulley design allows for variable speed and torque transmission, improving precision and efficiency in the arm's motion. This configuration is particularly useful in robotic systems requiring smooth, adjustable movement, such as industrial automation or assistive devices. The apparatus addresses challenges in achieving precise, dynamic control of robotic limbs by leveraging the mechanical advantages of non-circular pulleys and flexible bands to enhance performance and adaptability. The system may also include additional components, such as sensors or secondary drives, to further refine movement and functionality.
9. The apparatus as claimed in claim 8 further comprising a second band connecting the first end effector, at a wrist joint of the first end effector to the first forearm, to the first joint.
This invention relates to robotic systems, specifically to an apparatus for controlling the movement of a robotic arm. The problem addressed is improving the stability and precision of robotic arm movements, particularly in tasks requiring fine manipulation. The apparatus includes a first end effector, such as a gripper or tool, attached to a first forearm via a wrist joint. The forearm is connected to a first joint, which allows rotational or pivoting movement. To enhance control and reduce unwanted vibrations or oscillations, a second band is added. This band connects the first end effector, specifically at its wrist joint, to the first forearm and the first joint. The band acts as a stabilizing element, limiting excessive movement and ensuring smoother, more precise operation. The design may be part of a larger robotic system, where the first joint is connected to additional components like a second forearm or a base structure. The band's placement and tension can be adjusted to optimize performance based on the task requirements. This invention is particularly useful in industrial automation, surgical robotics, or any application requiring high-precision robotic manipulation.
10. The apparatus as claimed in claim 1 further comprising a first circular pulley and a first band connecting the at least one drive to a second circular pulley at a first joint between the first upper arm and the first forearm, where the first and second pulleys have different diameters.
This invention relates to a mechanical apparatus designed to enhance the functionality of a robotic or prosthetic arm, particularly focusing on improved motion control and force transmission. The apparatus includes at least one drive mechanism, such as a motor or actuator, that generates rotational or linear motion. A first circular pulley is connected to the drive mechanism, and a first band or belt transmits motion from this pulley to a second circular pulley. The second pulley is positioned at a joint between an upper arm segment and a forearm segment of the apparatus. The pulleys have different diameters, which allows for mechanical advantage adjustments, enabling variable speed or torque transmission between the drive and the joint. This configuration improves the efficiency and precision of the arm's movements, particularly in tasks requiring fine control or high force output. The apparatus may also include additional components, such as sensors or feedback mechanisms, to monitor and adjust the motion dynamically. The use of pulleys with differing diameters allows for customization of the mechanical properties, making the system adaptable to different operational requirements. This design is particularly useful in robotic systems where precise and powerful joint movements are necessary.
11. The apparatus as claimed in claim 1 where the first and second robot arms are configured to provide second retracted positions to locate the end effectors such that the substrates located on the end effectors are not stacked one above the another.
This invention relates to robotic apparatus for handling substrates, particularly in manufacturing or assembly processes where precise positioning and avoidance of substrate stacking is critical. The apparatus includes at least two robot arms, each equipped with an end effector for holding substrates. The robot arms are configured to move between extended and retracted positions. In the retracted positions, the arms position the substrates in a non-stacked arrangement, ensuring that the substrates do not overlap vertically. This prevents damage or misalignment that could occur if substrates were stacked during handling. The apparatus may also include additional features such as sensors or alignment mechanisms to further enhance precision. The invention addresses the problem of substrate interference during robotic handling, improving efficiency and reducing defects in automated production lines. The non-stacked configuration ensures substrates remain separate, maintaining their integrity and alignment throughout the process.
12. The apparatus as claimed in claim 1 further comprising a controller configured to controller the at least one drive to move the first and second robot arms substantially simultaneously from the first retracted positions along the first paths and move the first and second robot arms individually or simultaneously along the second paths.
This invention relates to robotic systems for manipulating objects, particularly in automated manufacturing or assembly environments. The problem addressed is the need for precise, coordinated movement of multiple robot arms to improve efficiency and reduce cycle times in tasks requiring simultaneous or sequential manipulation of objects. The apparatus includes at least two robot arms, each movable along predefined paths. The first paths are used to retract the arms to a starting position, while the second paths are used for operational movements. A controller is configured to move both arms substantially simultaneously along the first paths to retract them. Once retracted, the controller can move the arms individually or simultaneously along the second paths, depending on the task requirements. This allows for flexible operation, enabling either coordinated or independent movement of the arms to handle different stages of a process. The system ensures synchronized retraction when needed, while also permitting independent operation for tasks requiring individual arm control. This dual-mode capability enhances versatility in applications such as assembly, material handling, or inspection, where both coordinated and independent movements are necessary. The controller's ability to switch between simultaneous and individual arm control optimizes workflow efficiency and adaptability.
13. The apparatus as claimed in claim 1 where the second axis of rotation is laterally offset from and parallel to the first axis of rotation.
This invention relates to a mechanical apparatus designed to improve the stability and control of a rotating system, particularly in applications where precise alignment and balance are critical. The apparatus includes a first rotating component that pivots around a first axis of rotation and a second rotating component that pivots around a second axis of rotation. The second axis is laterally offset from and parallel to the first axis, allowing the two components to rotate independently while maintaining a fixed spatial relationship. This offset configuration enhances stability by distributing forces more evenly across the system, reducing vibrations and improving alignment accuracy. The apparatus may be used in machinery such as industrial rotors, precision instruments, or robotic systems where maintaining controlled rotational motion is essential. The parallel alignment of the axes ensures smooth operation, while the offset prevents interference between the rotating components, allowing for more compact and efficient designs. The invention addresses challenges in traditional rotating systems where misalignment or uneven force distribution can lead to inefficiencies, wear, or failure. By incorporating this offset parallel-axis design, the apparatus achieves better performance and longevity in demanding applications.
14. The apparatus as claimed in claim 1 where the second paths are at least partially laterally offset from one another and parallel to one another.
This invention relates to an apparatus for managing fluid flow, particularly in systems where precise control and distribution of fluid streams are required. The apparatus addresses the problem of efficiently directing multiple fluid paths while maintaining parallel alignment and lateral offset between them, which is critical in applications such as chemical processing, microfluidics, or thermal management systems. The apparatus includes a structure with multiple fluid paths, where at least two of these paths are arranged to be parallel to each other but laterally offset. This offset ensures that the fluid streams do not interfere with one another while maintaining a consistent flow direction. The parallel alignment helps in achieving uniform distribution or separation of fluids, which is essential for processes requiring precise fluid handling. The lateral offset can be adjusted based on the specific application, allowing for customization in systems where spatial constraints or fluid interaction must be carefully managed. The apparatus may also include additional features such as inlet and outlet ports, flow control mechanisms, or structural supports to maintain the integrity of the fluid paths. The design ensures that the fluid paths remain stable under varying operational conditions, such as pressure fluctuations or temperature changes. This invention is particularly useful in applications where multiple fluid streams must be processed simultaneously without cross-contamination or flow disruption.
15. The apparatus as claimed in claim 1 where the second paths are at least partially laterally offset from one another and angled relative to one another.
This invention relates to an apparatus for managing fluid flow, particularly in systems where precise control of fluid distribution is required. The apparatus addresses the problem of inefficient or uneven fluid distribution in conventional systems, which can lead to performance degradation or failure in applications such as cooling systems, chemical processing, or fluid transport networks. The apparatus includes a plurality of fluid paths arranged to direct fluid flow in a controlled manner. The primary feature involves a set of second paths that are at least partially laterally offset from one another and angled relative to one another. This configuration allows for improved fluid distribution by reducing interference between adjacent flow paths and enhancing directional control. The offset and angled arrangement ensures that fluid is directed more efficiently, minimizing turbulence and pressure losses while maintaining uniform flow rates across the system. The apparatus may also include a first set of paths that are aligned or parallel to one another, providing a baseline flow direction before the fluid encounters the second paths. The combination of aligned and offset/angled paths allows for a staged flow management approach, where initial flow is stabilized before being redirected for optimal distribution. This design is particularly useful in applications requiring precise fluid routing, such as in heat exchangers, microfluidic devices, or industrial fluid handling systems. The apparatus can be integrated into existing systems or designed as a standalone component to improve fluid flow efficiency.
16. The apparatus as claimed in claim 1 where the first end effector comprises at least two spaced substrate holding areas.
This invention relates to an apparatus for handling substrates, such as semiconductor wafers or glass panels, in manufacturing or processing environments. The problem addressed is the need for precise, efficient, and reliable substrate handling to prevent damage, contamination, or misalignment during transfer between processing stations. The apparatus includes a first end effector designed to hold and manipulate substrates. A key feature is that the first end effector has at least two spaced substrate holding areas, allowing it to simultaneously engage multiple substrates or different regions of a single substrate. This configuration improves throughput by enabling parallel handling operations or enhanced stability during movement. The end effector may include vacuum-based or mechanical clamping mechanisms to securely hold substrates in place. The apparatus may also incorporate alignment features to ensure precise positioning of substrates during transfer. The spaced holding areas can be adjustable to accommodate substrates of varying sizes or shapes, enhancing versatility. The apparatus may further include sensors or feedback systems to monitor substrate positioning and handling accuracy. This design reduces the risk of contamination, minimizes handling time, and improves overall process efficiency in automated manufacturing lines.
17. The apparatus as claimed in claim 16 where the at least two spaced substrate holding areas are laterally spaced relative to one another.
This invention relates to an apparatus for handling substrates, such as semiconductor wafers or glass panels, during manufacturing processes. The apparatus addresses the challenge of efficiently positioning and securing multiple substrates in a controlled manner to facilitate precise processing, such as etching, deposition, or inspection. The apparatus includes a substrate holder with at least two spaced substrate holding areas, each designed to securely hold a substrate in place. These holding areas are laterally spaced relative to one another, allowing for simultaneous processing of multiple substrates or independent movement of substrates within the apparatus. The lateral spacing ensures that the substrates do not interfere with each other during handling or processing, improving throughput and accuracy. The apparatus may also include alignment mechanisms to ensure precise positioning of the substrates within the holding areas, as well as mechanisms to adjust the spacing between the holding areas to accommodate different substrate sizes or processing requirements. This design enhances flexibility and efficiency in substrate processing operations.
18. The apparatus as claimed in claim 16 where the first end effector has a general “U” shape, and where the first forearm is connected to the first end effector at an off-center location on the general “U” shape.
This invention relates to robotic or mechanical apparatuses designed for material handling, assembly, or manipulation tasks. The problem addressed is improving the reach, flexibility, and precision of robotic arms, particularly in constrained or complex workspaces where traditional end effectors may be limited in their movement or accessibility. The apparatus includes a robotic arm with at least two segments: a forearm and an end effector. The end effector has a general "U" shape, which allows it to grasp or interact with objects from multiple angles. The forearm is connected to the end effector at an off-center location on the "U" shape, which enhances the arm's ability to maneuver around obstacles or reach into confined spaces. This off-center attachment point enables the end effector to rotate or pivot more effectively, providing greater flexibility in positioning and orientation. The "U" shape may also allow the end effector to engage with objects from different sides simultaneously, improving efficiency in tasks such as gripping, lifting, or assembling components. The design may be particularly useful in industrial automation, manufacturing, or assembly line applications where precise and adaptable manipulation is required.
19. The apparatus as claimed in claim 16 where the second end effector comprises at least two spaced substrate holding areas.
This invention relates to an apparatus for handling substrates, particularly in semiconductor or display manufacturing processes. The apparatus addresses the challenge of efficiently transferring and positioning substrates, such as wafers or panels, during fabrication. The apparatus includes a first end effector for gripping and moving a substrate and a second end effector designed to hold the substrate in a precise position. The second end effector features at least two spaced substrate holding areas, allowing for improved stability and alignment during processing. These holding areas can be adjustable or fixed, depending on the application, and may include vacuum chucks, mechanical clamps, or other gripping mechanisms. The spaced design ensures that the substrate remains flat and properly positioned, reducing the risk of misalignment or damage. The apparatus may also include sensors or feedback systems to monitor and adjust the substrate's position in real time. This configuration enhances throughput and accuracy in automated manufacturing lines, particularly where multiple substrates must be processed sequentially. The invention is useful in industries requiring high-precision substrate handling, such as semiconductor fabrication, flat-panel display production, and photovoltaic cell manufacturing.
20. The apparatus as claimed in claim 19 where the at least two spaced substrate holding areas are laterally spaced relative to one another.
This invention relates to an apparatus for handling substrates, such as semiconductor wafers or glass panels, during manufacturing processes. The apparatus addresses the challenge of efficiently positioning and securing multiple substrates in a controlled manner to facilitate precise processing, such as coating, etching, or inspection. The apparatus includes a substrate holder with at least two spaced substrate holding areas, each designed to securely hold a substrate in place. These holding areas are laterally spaced relative to one another, allowing for simultaneous processing of multiple substrates or independent movement of substrates within the apparatus. The spaced arrangement enables improved access to each substrate, reducing interference between processing steps and enhancing throughput. The apparatus may also include alignment mechanisms to ensure accurate positioning of the substrates, as well as mechanisms to adjust the spacing between the holding areas to accommodate different substrate sizes or processing requirements. This design improves efficiency in manufacturing processes by enabling parallel processing or sequential handling of multiple substrates in a compact and controlled environment.
21. The apparatus as claimed in claim 20 where the second end effector has a general “U” shape, and where the second forearm is connected to the second end effector at an off-center location on the general “U” shape.
This invention relates to robotic systems, specifically to an apparatus with a dual-arm configuration designed to improve manipulation and grasping capabilities. The apparatus includes a first arm with a first forearm and a first end effector, and a second arm with a second forearm and a second end effector. The second end effector has a general U-shaped structure, and the second forearm is connected to this U-shaped end effector at an off-center location. This off-center connection allows for enhanced flexibility and precision in grasping or manipulating objects, particularly in tasks requiring asymmetric or multi-directional movements. The U-shaped design of the second end effector provides a wider reach and improved stability when interacting with objects, while the off-center attachment point enables the arm to apply forces more effectively in different orientations. This configuration is particularly useful in industrial automation, where precise and adaptable manipulation of objects is required. The apparatus may be used in applications such as assembly, material handling, or quality inspection, where traditional robotic arms may lack the necessary dexterity or reach. The off-center connection and U-shaped end effector work together to provide a more versatile and efficient robotic system.
23. The apparatus as claimed in claim 22 where the first end effector comprises at least two spaced substrate holding areas.
This invention relates to an apparatus for handling substrates, particularly in semiconductor or display manufacturing. The apparatus addresses the challenge of efficiently transferring and positioning substrates during fabrication processes, where precise alignment and secure holding are critical. The apparatus includes a first end effector designed to hold and manipulate substrates, with the improvement that the first end effector has at least two spaced substrate holding areas. These holding areas allow the end effector to simultaneously engage multiple substrates or different regions of a single substrate, enhancing throughput and flexibility in automated handling systems. The spaced holding areas may be configured to accommodate substrates of varying sizes or to support multi-substrate processing steps. The apparatus may also include additional components, such as a second end effector or a support structure, to further facilitate substrate transfer and alignment. The invention aims to improve efficiency and precision in substrate handling operations, reducing the need for multiple separate handling steps.
24. The apparatus as claimed in claim 23 where the at least two spaced substrate holding areas are laterally spaced relative to one another.
This invention relates to an apparatus for handling substrates, particularly in semiconductor or display manufacturing processes. The problem addressed is the precise positioning and alignment of substrates during processing, which is critical for yield and quality in high-precision fabrication. The apparatus includes a substrate holder with at least two spaced substrate holding areas. These holding areas are laterally spaced relative to one another, meaning they are positioned side by side or in parallel rather than stacked or aligned in a single line. This lateral spacing allows for simultaneous handling of multiple substrates, improving throughput and efficiency. The holding areas are designed to securely retain substrates during processing, ensuring stability and alignment. The apparatus may also include mechanisms for adjusting the position or orientation of the holding areas, enabling fine-tuning of substrate alignment. This is particularly useful in processes where precise positioning is required, such as lithography or deposition. The lateral spacing of the holding areas allows for parallel processing, reducing cycle time and increasing production efficiency. The invention is useful in semiconductor wafer handling, flat panel display manufacturing, and other applications requiring precise substrate alignment and high-throughput processing. The lateral spacing of the holding areas ensures that substrates are positioned correctly while allowing for efficient movement and processing.
25. The apparatus as claimed in claim 23 where the first end effector has a general “U” shape, and where the first forearm is connected to the first end effector at an off-center location on the general “U” shape.
This invention relates to robotic or mechanical apparatuses designed for material handling, assembly, or manipulation tasks. The apparatus includes a first end effector with a general U-shaped configuration, which provides structural stability and flexibility for gripping or interacting with objects. The first end effector is connected to a first forearm at an off-center location on the U shape, allowing for improved control and precision in movement. This off-center connection enables the end effector to pivot or rotate more effectively, enhancing its ability to manipulate objects from different angles. The apparatus may also include additional components, such as a second end effector and forearm, which work in coordination with the first to perform complex tasks. The design optimizes the apparatus for tasks requiring precise positioning, such as assembly line operations or automated manufacturing processes. The off-center connection reduces mechanical strain and improves efficiency by allowing smoother, more controlled movements. This configuration is particularly useful in environments where space is limited or where objects must be manipulated from multiple directions. The apparatus may be part of a larger robotic system or function as a standalone tool for industrial or automated applications.
26. The apparatus as claimed in claim 23 where the second end effector comprises at least two spaced substrate holding areas.
This invention relates to an apparatus for handling substrates, particularly in semiconductor or display manufacturing. The apparatus addresses the challenge of efficiently transferring substrates between processing stations while maintaining precise alignment and minimizing contamination. The apparatus includes a first end effector for gripping a substrate and a second end effector with at least two spaced substrate holding areas. The second end effector allows simultaneous handling of multiple substrates, improving throughput. The spaced holding areas ensure substrates are securely positioned without interference, reducing the risk of damage or misalignment during transfer. The apparatus may also include a robotic arm or a linear motion system to move the end effectors between positions, enabling automated substrate handling in cleanroom environments. The design ensures compatibility with various substrate sizes and materials, making it adaptable for different manufacturing processes. The invention enhances production efficiency by reducing handling time and improving substrate positioning accuracy.
27. The apparatus as claimed in claim 26 where the at least two spaced substrate holding areas are laterally spaced relative to one another.
This invention relates to an apparatus for handling substrates, particularly in semiconductor or display manufacturing processes. The apparatus addresses the challenge of efficiently positioning and securing multiple substrates during processing, ensuring precise alignment and stability while minimizing contamination or damage. The apparatus includes a substrate holder with at least two spaced substrate holding areas, designed to securely hold substrates in a laterally spaced arrangement. The lateral spacing between the holding areas allows for independent or simultaneous processing of multiple substrates, improving throughput and reducing processing time. Each holding area is configured to maintain the substrate in a fixed position, preventing movement or misalignment during operations such as etching, deposition, or inspection. The apparatus may also include mechanisms for adjusting the spacing between the holding areas, enabling customization for different substrate sizes or processing requirements. Additionally, the holder may incorporate features to minimize particle generation, such as smooth surfaces or non-contact clamping, ensuring a clean processing environment. The design ensures that substrates remain stable and properly aligned throughout the manufacturing process, enhancing yield and quality.
28. The apparatus as claimed in claim 27 where the second end effector has a general “U” shape, and where the second forearm is connected to the second end effector at an off-center location on the general “U” shape.
This invention relates to robotic systems, specifically to an apparatus with multiple end effectors for manipulating objects. The problem addressed is improving the flexibility and precision of robotic manipulation, particularly in tasks requiring multi-point interaction with objects. The apparatus includes a first end effector and a second end effector, each connected to a forearm segment. The second end effector has a general U-shaped design, allowing it to engage objects from multiple sides simultaneously. The second forearm is attached to the second end effector at an off-center location on the U-shape, enabling asymmetric force distribution and enhanced control during manipulation. This configuration allows the apparatus to perform complex tasks such as gripping, rotating, or stabilizing objects with improved dexterity. The U-shaped design of the second end effector provides a wider contact area, while the off-center connection point ensures balanced force application, reducing slippage and improving stability. The apparatus is particularly useful in industrial automation, assembly lines, and precision manufacturing where multi-point manipulation is required. The invention enhances robotic manipulation capabilities by combining a U-shaped end effector with an off-center connection, optimizing both reach and control in robotic operations.
30. The apparatus as claimed in claim 29 where the first and second robot arms are configured to locate the end effectors in the first retracted positions for stacking substrates located on the end effectors at least partially one above the another.
This invention relates to robotic systems for handling and stacking substrates, such as semiconductor wafers or glass panels, in manufacturing or assembly processes. The problem addressed is the need for precise and efficient substrate alignment and stacking to minimize handling errors and improve throughput in automated production lines. The apparatus includes at least two robot arms, each equipped with an end effector for gripping and positioning substrates. The robot arms are configured to move the end effectors between extended and retracted positions. In the retracted positions, the end effectors are aligned vertically or partially overlapping to enable stacking of substrates. The system ensures that substrates held by the end effectors are positioned accurately for stacking, reducing misalignment and damage during transfer. The robot arms may also include sensors or actuators to adjust the end effector positions dynamically, ensuring consistent stacking performance. This design improves automation efficiency by reducing manual intervention and increasing the speed of substrate handling in high-volume production environments.
31. The apparatus as claimed in claim 29 where the first and second robot arms are configured to extend the end effectors from the first retracted positions in the first direction along parallel first paths located, at least partially, directly one above the other.
This invention relates to robotic systems designed for precise, coordinated movement of multiple robot arms in parallel paths. The problem addressed is the need for efficient, space-saving robotic configurations that allow multiple arms to operate simultaneously without interference, particularly in applications requiring high-precision positioning, such as manufacturing, assembly, or material handling. The apparatus includes at least two robot arms, each equipped with an end effector for interacting with objects or performing tasks. The arms are initially positioned in retracted states, where the end effectors are held in a compact configuration. When activated, the arms extend the end effectors along parallel paths in a first direction. These paths are arranged such that at least a portion of them are directly aligned vertically, meaning one path is positioned directly above the other. This overlapping alignment optimizes space utilization and ensures that the arms can operate in close proximity without mechanical interference. The parallel extension paths allow the end effectors to move synchronously or independently, depending on the application. The vertical alignment of the paths enables the system to perform tasks in a confined workspace, such as stacking, sorting, or assembly operations. The design may also include mechanisms to adjust the extension distance or orientation of the end effectors, providing flexibility in handling different tasks. The system may further incorporate sensors or control systems to monitor and adjust the movement of the arms in real time, ensuring precision and avoiding collisions. This configuration is particularly useful in automated production lines or robotic workcells where multiple arms must operate efficiently in a shared work
32. The apparatus as claimed in claim 29 where the first upper arm and the first forearm have different effective lengths relative to each other, and where the second upper arm and the second forearm have different effective lengths relative to each other.
This invention relates to a mechanical apparatus designed to provide adjustable movement, particularly for applications requiring precise positioning or articulation. The apparatus includes a first arm assembly and a second arm assembly, each consisting of an upper arm and a forearm segment. The upper arm and forearm in each assembly have different effective lengths, allowing for non-uniform movement and enhanced flexibility. This design enables the apparatus to achieve a wider range of motion or more precise adjustments compared to systems with equal-length segments. The differing lengths may be fixed or adjustable, depending on the application. The apparatus may be used in robotic systems, industrial machinery, or medical devices where controlled articulation is required. The variation in segment lengths allows for optimized performance in tasks such as reaching, gripping, or manipulating objects in constrained spaces. The invention addresses the need for improved adaptability and precision in mechanical systems where traditional fixed-length arms may be limiting.
33. The apparatus as claimed in claim 29 where the motors comprise only three motors for rotating the first and second upper arms.
This invention relates to robotic arm systems, specifically addressing the challenge of reducing mechanical complexity while maintaining precise movement control. The apparatus includes a robotic arm with at least two upper arms that rotate relative to a base structure. The key innovation is the use of only three motors to drive the rotation of both upper arms, minimizing the number of actuators required compared to traditional designs that often use separate motors for each arm segment. The three motors are strategically positioned to independently control the rotational movement of the first and second upper arms, ensuring coordinated motion without excessive mechanical components. This configuration reduces cost, weight, and potential points of failure while maintaining the necessary degrees of freedom for tasks such as manipulation or assembly. The system may also include additional features like sensors or control mechanisms to enhance precision and responsiveness. The invention is particularly useful in industrial automation, where simplicity and reliability are critical. By optimizing the motor arrangement, the apparatus achieves efficient actuation with fewer parts, making it suitable for applications requiring compact and lightweight robotic solutions.
34. The apparatus as claimed in claim 29 where the motors comprise only four motors for rotating the first and second upper arms.
The invention relates to a robotic apparatus designed for precise movement and manipulation, particularly in applications requiring controlled rotation of multiple arm segments. The apparatus addresses the challenge of achieving stable and coordinated motion with a minimal number of actuators, reducing complexity and cost while maintaining performance. The apparatus includes a base structure supporting a first upper arm and a second upper arm, each capable of rotational movement. The key innovation is the use of only four motors to drive the rotation of both upper arms. These motors are strategically positioned to independently control the movement of each arm segment, ensuring smooth and accurate positioning. The design eliminates the need for additional motors, simplifying the mechanical structure and reducing power consumption. The apparatus may also incorporate additional features, such as sensors for feedback control, to enhance precision and adaptability. The motors are configured to provide sufficient torque and speed to handle varying loads while maintaining stability. The overall system is optimized for applications in robotics, automation, and other fields requiring efficient and reliable arm movement. The use of only four motors for both upper arms represents a significant advancement in reducing mechanical complexity without compromising functionality.
35. The apparatus as claimed in claim 29 where the motors comprise only five motors for rotating the first and second upper arms.
A robotic arm system is designed to improve precision and efficiency in industrial automation tasks. The system addresses challenges in traditional robotic arms, such as excessive mechanical complexity, high power consumption, and limited maneuverability. The apparatus includes a base structure supporting multiple articulated arms, with at least a first and second upper arm connected to an end effector. The arms are driven by motors that control their rotational movement. In this specific configuration, only five motors are used to rotate both the first and second upper arms, reducing the number of actuators required while maintaining precise control. The motors are strategically positioned to minimize mechanical interference and optimize force distribution. This design simplifies the system, reduces costs, and enhances reliability by minimizing the number of moving parts. The apparatus may also include additional features such as sensors for feedback control and a control unit to coordinate motor movements. The system is particularly useful in applications requiring high-precision manipulation, such as assembly lines, material handling, and automated manufacturing processes. The use of only five motors for both upper arms ensures efficient power usage and compact design without sacrificing performance.
36. The apparatus as claimed in claim 29 where the first end effector comprises at least two spaced substrate holding areas.
The invention relates to an apparatus for handling substrates, particularly in semiconductor or display manufacturing processes. The apparatus addresses the challenge of efficiently transferring and positioning substrates during fabrication, where precise alignment and secure holding are critical to yield and throughput. The apparatus includes a first end effector designed to hold and manipulate substrates, with the improvement that this end effector has at least two spaced substrate holding areas. These holding areas allow the end effector to simultaneously engage multiple substrates or different regions of a single large substrate, enabling parallel processing or improved stability during handling. The spaced holding areas can be configured to accommodate substrates of varying sizes or shapes, enhancing versatility. The apparatus may also include additional components, such as a second end effector or a support structure, to facilitate substrate transfer between processing stations. The invention improves manufacturing efficiency by reducing handling time and minimizing substrate misalignment, which is particularly valuable in high-precision applications like semiconductor wafer or flat panel display production.
37. The apparatus as claimed in claim 36 where the at least two spaced substrate holding areas are laterally spaced relative to one another.
This invention relates to an apparatus for holding substrates, particularly in a manufacturing or processing environment where precise positioning and alignment are critical. The apparatus includes at least two spaced substrate holding areas designed to secure substrates in a fixed position during operations such as etching, coating, or inspection. These holding areas are laterally spaced relative to one another, meaning they are positioned side by side or in parallel alignment rather than stacked or overlapping. This lateral spacing allows for efficient use of workspace and may facilitate simultaneous processing of multiple substrates. The apparatus may also include mechanisms to adjust the position or orientation of the holding areas, ensuring precise alignment of the substrates. The design is particularly useful in semiconductor manufacturing, where maintaining substrate stability and alignment is essential for high-precision processes. The lateral spacing of the holding areas may also improve accessibility for automated handling systems or inspection tools. The apparatus may be integrated into larger processing systems or used as a standalone substrate positioning tool. The invention addresses the need for reliable substrate holding solutions that enhance throughput and accuracy in manufacturing environments.
38. The apparatus as claimed in claim 37 where the first end effector has a general “U” shape, and where the first forearm is connected to the first end effector at an off-center location on the general “U” shape.
This invention relates to robotic or mechanical apparatuses designed for material handling, assembly, or manipulation tasks. The problem addressed involves improving the reach, flexibility, and precision of robotic end effectors, particularly in constrained or complex workspaces where traditional designs may limit access or maneuverability. The apparatus includes a first end effector with a general "U" shape, allowing it to grasp or interact with objects from multiple angles. The "U" shape provides an open configuration that can accommodate irregularly shaped items or access confined spaces. A first forearm is connected to the end effector at an off-center location on the "U" shape, which enhances the apparatus's ability to reach around obstacles or apply force asymmetrically. This off-center attachment enables improved torque distribution and reduces interference with surrounding structures during operation. The design may be part of a larger robotic system, where the end effector is mounted on an arm or linkage mechanism to further extend its operational range. The apparatus is particularly useful in industrial automation, manufacturing, or assembly applications where precise and adaptable manipulation is required.
39. The apparatus as claimed in claim 38 where the second end effector comprises at least two spaced substrate holding areas.
This invention relates to an apparatus for handling substrates, particularly in semiconductor or display manufacturing. The apparatus addresses the challenge of efficiently transferring substrates between processing stations while minimizing contamination and alignment errors. The apparatus includes a first end effector with a substrate holding area and a second end effector with at least two spaced substrate holding areas. The second end effector allows simultaneous handling of multiple substrates, improving throughput and reducing cycle time. The spaced holding areas ensure precise positioning and alignment of substrates during transfer, preventing misalignment or damage. The apparatus may also include a robotic arm or a linear motion system to move the end effectors between different processing stations. The invention enhances automation in substrate processing by enabling efficient, high-precision handling of multiple substrates in a controlled environment.
40. The apparatus as claimed in claim 39 where the at least two spaced substrate holding areas of the second end effector are laterally spaced relative to one another.
This invention relates to a substrate handling apparatus used in semiconductor or flat panel display manufacturing, where precise alignment and transfer of substrates between processing stations is critical. The problem addressed is ensuring accurate positioning and stability during substrate transfer, particularly when handling large or delicate substrates that require multiple support points. The apparatus includes a second end effector with at least two spaced substrate holding areas designed to engage and support a substrate. These holding areas are laterally spaced relative to one another, meaning they are positioned apart along a horizontal axis. This lateral spacing improves stability by distributing the substrate's weight more evenly and reducing the risk of bending or misalignment during transfer. The second end effector may also include a substrate alignment mechanism to ensure proper positioning before and after transfer. The apparatus may further incorporate a first end effector with its own substrate holding and alignment features, allowing coordinated movement between the two end effectors to enhance precision. The system may be integrated into a larger substrate processing tool, where the end effectors facilitate seamless transfer between different processing modules. The invention aims to minimize substrate damage, improve throughput, and enhance alignment accuracy in automated manufacturing environments.
41. The apparatus as claimed in claim 40 where the second end effector has a general “U” shape, and where the second forearm is connected to the second end effector at an off-center location on the general “U” shape.
This invention relates to robotic apparatuses, specifically to a dual-arm robotic system designed for improved manipulation tasks. The system addresses challenges in precision and dexterity when handling objects, particularly in tasks requiring coordinated movements from two robotic arms. The apparatus includes a first arm with a first forearm and a first end effector, and a second arm with a second forearm and a second end effector. The second end effector has a general "U" shape, and the second forearm is connected to the second end effector at an off-center location on the "U" shape. This off-center connection enhances the range of motion and flexibility of the second end effector, allowing for more precise and adaptable manipulation of objects. The design enables the second end effector to perform complex movements, such as grasping or rotating objects from multiple angles, while maintaining stability and control. The overall system is optimized for tasks requiring coordinated dual-arm manipulation, such as assembly, material handling, or inspection in industrial or laboratory settings. The off-center connection of the second forearm to the "U"-shaped end effector improves the apparatus's ability to navigate confined spaces and handle irregularly shaped objects.
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May 1, 2023
May 28, 2024
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