A semiconductor processing system includes a first semiconductor processing site and a second semiconductor processing site. The system includes an unmanned electric vehicle configured to carry a portable cleanroom stocker between the first and second semiconductor processing sites. The portable cleanroom stocker is configured to maintain cleanroom conditions within the portable cleanroom stocker during transportation.
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2. The method of claim 1, wherein transporting the portable cleanroom stocker includes executing one or more manufacturing execution system applications with a control module of the unmanned electric vehicle.
4. The method of claim 3, wherein the command includes identification data identifying the second semiconductor processing site as a destination.
5. The method of claim 4, comprising generating the command by executing an application with a virtual machine associated with the manufacturing execution system associated with the first semiconductor processing site.
6. The method of claim 1, comprising recording, with a transportation data management module of the unmanned electric vehicle, transportation data including details associated with transporting the portable cleanroom stocker including the transport case from a first semiconductor processing site to a second semiconductor processing site.
7. The method of claim 6, wherein the details include an identification of the second semiconductor processing site.
8. The method of claim 6, comprising providing the details to a manufacturing execution system associated with the second semiconductor processing site.
9. The method of claim 1, wherein maintaining a cleanroom environment includes cycling purging fluids through an interior of an environment management module of the cleanroom stocker.
10. The method of claim 9, wherein the purging fluids include one or more of N2, O2, or dry-air.
12. The system of claim 11, wherein the portable cleanroom stocker includes one or more purging fluid sources, wherein the interior environment management system is configured to cycle purging fluids through the ports to maintain cleanroom conditions within the portable cleanroom stocker.
13. The system of claim 11, wherein the portable cleanroom stocker includes a manufacturing execution system interface.
14. The system of claim 11, wherein the unmanned vehicle includes a power source configured to power the unmanned vehicle and to power the portable cleanroom stocker during transportation.
15. The system of claim 11, wherein the control module is configured to receive a command from a manufacturing execution system associated with the first semiconductor processing site and to control the transporting of the portable cleanroom stocker from the first semiconductor processing site to the second semiconductor processing site responsive to receiving the command from the manufacturing execution system associated with the first semiconductor processing site.
16. The system of claim 11, wherein the ports are configured to hold one or more of front opening unified pods, wafer cassettes, and wafer frame cassettes.
18. The method of claim 17, comprising providing, from the unmanned electric vehicle, transportation data to a manufacturing execution system associated with the second semiconductor processing site.
20. The method of claim 17, wherein the portable cleanroom stocker includes shock absorbers.
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June 3, 2022
November 26, 2024
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