This application discloses a computing system implementing a mask synthesis system to generate synthetic image clips of design shapes and corresponding mask data for the synthetic image clips. The mask data can describe lithographic masks capable of being used to fabricate the design shapes on an integrated circuit. The mask synthesis system can utilize the synthetic image clips of the design shapes and the corresponding mask data to train a machine-learning system to determine pixelated output masks from portions of the layout design. The mask synthesis system can identify one or more pixelated output masks for portions of a layout design describing an electronic system using the trained machine-learning. The mask synthesis system can synthesize a mask layout design for the electronic system based, at least in part, on the layout design describing the electronic system and the one or more pixelated output masks for the layout design.
Legal claims defining the scope of protection, as filed with the USPTO.
3. The method of claim 1, further comprising utilizing, by the computing system, the synthetic image clips of the design shapes and the corresponding mask data to train machine-learning system to determine pixelated output masks from portions of the layout design.
4. The method of claim 1, further comprising dividing, by a computing system, the layout design into multiple image cells, each image cell corresponding to one of the portions of the layout design, wherein synthesizing the mask layout design for the electronic system includes generating mask data for each of the image cells, and aggregating the mask data into the mask layout design for the electronic system.
5. The method of claim 4, wherein a plurality of the image cells at least partially overlap.
6. The method of claim 1, wherein synthesizing the mask layout design for the electronic system further comprises performing inverse lithography technology optical proximity correction, which modifies features in the one or more pixelated output masks to generate a final mask layout design.
7. The method of claim 1, wherein the machine-learning system trained using the synthetic image clips of the design shapes and the corresponding mask data is configured to map the portions of the layout design to the one or more pixelated output masks.
10. The system of claim 8, wherein the computing system, in response to execution of the computer-executable instructions, is further configured to utilize the synthetic image clips of the design shapes and the corresponding mask data to train machine-learning system to determine pixelated output masks from portions of the layout design.
12. The system of claim 8, wherein the computing system, in response to execution of the computer-executable instructions, is further configured to refine the mask layout design for the electronic system by performing inverse lithography technology optical proximity correction, which modifies features in the one or more pixelated output masks to generate a final mask layout design.
13. The system of claim 8, wherein the machine-learning system trained using the synthetic image clips of the design shapes and the corresponding mask data is configured to map the portions of the layout design to the one or more pixelated output masks.
16. The apparatus of claim 14, wherein the instructions are configured to cause one or more processing devices to perform operations further comprising utilizing the synthetic image clips of the design shapes and the corresponding mask data to train machine-learning system to determine pixelated output masks from portions of the layout design.
17. The apparatus of claim 14, wherein the instructions are configured to cause one or more processing devices to perform operations further comprising dividing the layout design into multiple image cells, each image cell corresponding to one of the portions of the layout design, wherein synthesizing the mask layout design for the electronic system includes generating mask data for each of the image cells, and aggregating the mask data into the mask layout design for the electronic system.
18. The apparatus of claim 17, wherein a plurality of the image cells at least partially overlap.
19. The apparatus of claim 14, wherein synthesizing the mask layout design for the electronic system further comprises performing inverse lithography technology optical proximity correction, which modifies features in the one or more pixelated output masks to generate the mask layout design.
20. The apparatus of claim 14, wherein the machine-learning system trained using the synthetic image clips of the design shapes and the corresponding mask data is configured to map the portions of the layout design to the one or more pixelated output masks.
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August 30, 2021
December 17, 2024
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