Provided are an F-P sensor probe, an absolute distance measurement device, and an absolute distance measurement method, which relate to the field of non-contact absolute distance measurement technologies. This structure includes a first N+1-core multimode optical fiber probe (9), an optical fiber sleeve (10), an imaging lens group (11), and a reference lens (12), wherein: the first N+1-core multimode optical fiber probe (9), the imaging lens group (11), and the reference lens (12) are sequentially fixed inside the optical fiber sleeve (10) along a direction of the F-P sensor probe toward a sample (8); and the first N+1-core multimode optical fiber probe (9) includes N first multimode optical fibers (16) and one second multimode optical fiber (17), where N≥2, and the N first multimode optical fibers (16) are arranged around the second multimode optical fiber (17).
Legal claims defining the scope of protection, as filed with the USPTO.
2. The F-P sensor probe according to claim 1, wherein the film layer inside the window is a metal film layer with a transmittance of 40%±5% and a reflectivity of 15%±5%, and preferably, the metal film layer comprises a metallic chromium layer with a thickness of 4 to 8 nm.
3. The F-P sensor probe according to claim 1, wherein the reference lens is quartz glass with a thickness greater than or equal to 5 mm and a PV of the surface topography less than or equal to λ/20, where λ is a wavelength at which an interferometer measures the surface topography of the reference lens.
4. The F-P sensor probe according to claim 1, wherein the second multimode optical fiber is disposed at a central position of the first N+1-core multimode optical fiber probe, and the N first multimode optical fibers are arranged annularly at an equal spacing Δd1 around the second multimode optical fiber.
5. The F-P sensor probe according to claim 4, wherein each of the N first multimode optical fibers is in a tangential relationship to the second multimode optical fiber.
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December 5, 2022
December 24, 2024
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